International Journal of Computational Engineering ScienceVol. 04, No. 03, pp. 621-625 (2003) Poster PapersNo AccessTHE DEVELOPMENT OF A POLYMER BASED PIEZO-ACTUATED MICROPUMPH. LIU, STEPHEN Y. M. WAN, G. C. LIM and ANDREW A. O. TAYH. LIUSingapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore Search for more papers by this author , STEPHEN Y. M. WANSingapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore Search for more papers by this author , G. C. LIMSingapore Institute of Manufacturing Technology, 71 Nanyang Drive, Singapore 638075, Singapore Search for more papers by this author and ANDREW A. O. TAYDept. of Mechanical Engineering, National University of Singapore, Kent Ridge Crescent, Singapore 119260, Singapore Search for more papers by this author https://doi.org/10.1142/S1465876303001903Cited by:0 PreviousNext AboutSectionsPDF/EPUB ToolsAdd to favoritesDownload CitationsTrack CitationsRecommend to Library ShareShare onFacebookTwitterLinked InRedditEmail AbstractThis paper presents the design, realization and simulation of a novel polymer based check-valve micropump actuated by piezoelectric disc. Comparing with silicon substrate, polymer materials have such advantages as flexibility, chemical and biological compatibility, 3D fabrication possibility and low cost in material and mass production. Laser micromachining technology and precision engineering techniques were used to fabricate the prototype with the dimension of Φ20mm×5.2mm. Result of preliminary experiments on fusion bonding between polyimide and polycarbonate are also presented. Due to the small difference between their glass transition temperatures (Tg) the polyimide and polycarbonate could be bonded together relatively easily. A special fixture for the bonding process has been designed and made to control the lateral and vertical expansion less than 1.5%. Using DI water as the pumping medium, the presented micropump is expected to achieve self-priming, bubble tolerance and low power consumption and a flow rate of 30μl/min at the resonance frequency of 300Hz. A planar format micropump will be delivered based on this presented successful design for mass fabrication.Keywords:PolymerLaser MicrofabricationFusion BondingMicrovalve References Gert Blankenstein, Microfluidic devices for biomedical applications, MSTNEWS, April, 2000 . Google Scholar Angela Rasmussen, Mona E.Zaghloul, In the Flow with MEMS, IEEE, Circuits and Devices, pp. 12-25, July 1998 . Google Scholar Nam-Trung Nguyen and Steven T. Wereley , Fundamentals and Applications of Microfluidics ( Artech House Inc. , 2002 ) . Google ScholarR. Zengerle and M. Richter, J. Micromech. Microeng. 4, 192 (1994). Crossref, Google Scholar F. E. H. Tay (ed.) , Microfluidics and BioMEMS applications ( Kluwer Academic Publishers , 2002 ) . Crossref, Google Scholar William D. Calister Jr. , Materials Science and Engineering: An Introduction ( John Wiley & Sons Inc , New York , 1997 ) . Google Scholar FiguresReferencesRelatedDetails Recommended Vol. 04, No. 03 Metrics History KeywordsPolymerLaser MicrofabricationFusion BondingMicrovalvePDF download