The global requirement for grating monochromators with high precision and exceptional vibrational stability is crucial for diffraction-limited synchrotron radiation sources (DLSR). An ultra-high-spectral resolution plane grating monochromator (PGM) based on the stroke bearing shaft has been developed for Hefei Advanced Light Facility (HALF) at the National Synchrotron Radiation Laboratory (NSRL). A comprehensive performance evaluation of PGM is crucial prior to its online installation during the commissioning phase. Various vibration measurement tools were employed to meticulously characterize PGM stability. A magneto-electric velocity sensor is used to measure the vibration amplitude of the PGM components, and an optical encoder and laser interferometer are used to quantify the angular stability. The measured data are analyzed to determine the vibration source. Angular vibrations with different water-cooling conditions are compared. The PGM exhibited angular vibrations of approximately 30 nrad RMS (1–500 Hz, pitch direction), thereby satisfying the beamline requirements.
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