Laser Damage Testing Research Articles

Ten-year summary of the Boulder Damage Symposium annual thin film laser damage competition

The thin film damage competition series at the Boulder Damage Symposium provides an opportunity to observe general trends in laser damage behavior between different coating types (high reflector, antireflector, polarizer, and Fabry–Perot filter), wavelength ranges (193 to 1064 nm), and pulse length ranges (40 fs to 18 ns). Additionally, the impact of deposition process, coating material, cleaning process, and layer count can be studied within a single year or more broadly across the history of this competition. Although there are instances where participants attempted to isolate a single variable to better understand its impact on laser resistance, this series of competitions isolates the variable of the damage testing service and protocol for a wide variety of participants to enable the observation of general trends. In total, 275 samples from 58 different participants have been tested at four different laser damage testing facilities over the last 10 years. Hafnia was clearly the best high refractive index material except for ultraviolet (UV) applications, although a wide range of high refractive index materials performed well. The best deposition process varied significantly between the different competitions. The best deposition process was dependent on the coating type, wavelength, and pulse duration. For 1064-nm coatings with nanosecond scale pulse lengths, e-beam coatings tended to be the best performers. For short-pulse length NIR mirrors and nanosecond pulse length UV mirrors, densified coating processes, which all involved sputtering of the target material, were the best performers. For UV antireflector (AR) coatings and excimer mirrors, both tested at nanosecond pulse lengths, they tended to favor very low energetic deposition methods yielding soft coatings, such as sol gel dip coating for the AR and resistive heating of fluorides for the excimer mirrors. Finally, cleaning method and layer count had a less obvious correlation with laser resistance over the history of this thin film damage competition series.

Effect of temperature fields on optical properties of La2Ti2O7 thin films

In order to study the effect of temperature fields on the microstructure, optical properties and response to laser damage of La2Ti2O7 films, a group of films were prepared by electron beam evaporation using the same parameters on Si and fused silica substrates. Then, rapid thermal annealing at different temperatures was applied to simulate the application of a temperature field. The structure, optical constants and response to laser damage of La2Ti2O7 films were investigated by XPS, XRD, ellipsometry and laser damage testing. The results showed that Ti4+ is gradually converted to Ti3+ with increasing temperature resulting in a higher refractive index, larger extinction coefficient and more serious absorption. When the temperature was higher than 800 °C, the loss of oxygen was more pronounced. The density of annealed films first increased and then decreased when the temperature rises from 600 to 1000 °C, and reached its maximum at 800 °C. And the crystallization, oxygen loss and densification were found to be related to the laser damage threshold of La2Ti2O7 film. The laser damage threshold of the film decreased sharply when the temperature is above 900 °C.

Optical properties of oxygen vacancies in HfO2 thin films studied by absorption and luminescence spectroscopy.

Hafnium oxide thin films with varying oxygen content were investigated with the goal of finding the optical signature of oxygen vacancies in the film structure. It was found that a reduction of oxygen content in the film leads to changes in both, structural and optical characteristics. Optical absorption spectroscopy, using nanoKelvin calorimetry, revealed an enhanced absorption in the near-ultraviolet (near-UV) and visible wavelength ranges for films with reduced oxygen content, which was attributed to mid-gap electronic states of oxygen vacancies. Absorption in the near-infrared was found to originate from structural defects other than oxygen vacancy. Luminescence generated by continuous-wave 355-nm laser excitation in e-beam films showed significant changes in the spectral profile with oxygen reduction and new band formation linked to oxygen vacancies. The luminescence from oxygen-vacancy states was found to have microsecond-scale lifetimes when compared with nanosecond-scale lifetimes of luminescence attributed to other structural film defects. Laser-damage testing using ultraviolet nanosecond and infrared femtosecond pulses showed a reduction of the damage threshold with increasing number of oxygen vacancies in hafnium oxide films.

Effect of temperature on surface error and laser damage threshold for self-healing BK7 glass.

Cracks caused during the lapping and polishing process can decrease the laser-induced damage threshold (LIDT) of the BK7 glass optical elements, which would shorten the lifetime and limit the output power of the high-energy laser system. When BK7 glass is heated under appropriate conditions, the surface cracks can exhibit a self-healing phenomenon. In this paper, based on thermodynamics and viscous fluid mechanics theory, the mechanisms of crack self-healing are explained. The heat-healing experiment was carried out, and the effect of water was analyzed. The multi-spatial-frequency analysis was used to investigate the effect of temperature on surface error for self-healing BK7 glass, and the lapped BK7 glass specimens before and after heat healing were detected by an interferometer and atomic force microscopy. The low-spatial-frequency error was analyzed by peak to valley and root mean square, the mid-spatial-frequency error was analyzed by power spectral density, and the high-spatial-frequency error was analyzed by surface roughness. The results showed that the optimal heating temperature for BK7 was 450°C, and when the heating temperature was higher than the glass transition temperature (555°C), the surface quality decreased a lot. The laser damage test was performed, and the specimen heated at 450°C showed an improvement in LIDT.

Comparing the ISO-recommended and the cumulative data-reduction algorithms in S-on-1 laser damage test by a reverse approach method.

We compare the ISO-recommended (the standard) data-reduction algorithm used to determine the surface laser-induced damage threshold of optical materials by the S-on-1 test with two newly suggested algorithms, both named "cumulative" algorithms/methods, a regular one and a limit-case one, intended to perform in some respects better than the standard one. To avoid additional errors due to real experiments, a simulated test is performed, named the reverse approach. This approach simulates the real damage experiments, by generating artificial test-data of damaged and non-damaged sites, based on an assumed, known damage threshold fluence of the target and on a given probability distribution function to induce the damage. In this work, a database of 12 sets of test-data containing both damaged and non-damaged sites was generated by using four different reverse techniques and by assuming three specific damage probability distribution functions. The same value for the threshold fluence was assumed, and a Gaussian fluence distribution on each irradiated site was considered, as usual for the S-on-1 test. Each of the test-data was independently processed by the standard and by the two cumulative data-reduction algorithms, the resulting fitted probability distributions were compared with the initially assumed probability distribution functions, and the quantities used to compare these algorithms were determined. These quantities characterize the accuracy and the precision in determining the damage threshold and the goodness of fit of the damage probability curves. The results indicate that the accuracy in determining the absolute damage threshold is best for the ISO-recommended method, the precision is best for the limit-case of the cumulative method, and the goodness of fit estimator (adjusted R-squared) is almost the same for all three algorithms.

Thermally ruggedized ITO transparent electrode films for high power optoelectronics.

We present two strategies to minimize laser damage in transparent conductive films. The first consists of improving heat dissipation by selection of substrates with high thermal diffusivity or by addition of capping layer heatsinks. The second is reduction of bulk energy absorption by lowering free carrier density and increasing mobility, while maintaining film conductance with thicker films. Multi-pulse laser damage tests were performed on tin-doped indium oxide (ITO) films configured to improve optical lifetime damage performance. Conditions where improvements were not observed are also described. When bulk heating is not the dominant damage process, discrete defect-induced damage limits damage behavior.

Damage threshold influenced by polishing imperfection distribution under 355-nm laser irradiation

A systematic interpretation of laser-induced damage in the nanosecond regime is realized with a defect distribution buried inside the redeposited layer arising from a polishing process. Under the 355-nm laser irradiation, the size dependence of the defect embedded in the fused silica can be illustrated through the thermal conduction model. Considering CeO2 as the major initiator, the size distribution with the power law model is determined from the damage probability statistics. To verify the accuracy of the size distribution, the ion output scaling with depth for the inclusion element is obtained with the secondary ion mass spectrometer. For CeO2 particulates in size of the depth interval with ion output satisfied in the negative exponential form, the corresponding density is consistent with that of the identical size in the calculated size distribution. This coincidence implies an alternative method for the density analysis of photoactive imperfections within optical components at the semi-quantitative level based on the laser damage tests.

Efficient method for the measurement of lifetime optical damage performance of thin film coatings from laser damage size analysis.

A laser damage test method based on damage size analysis (DSA) is described that simplifies the derivation of the lifetime optical damage threshold of film materials critical in the design of devices used in high-repetition-rate, high-power laser systems. The DSA method presented here is solely based on imaging to measure the damage site size produced from exposure to a known Gaussian-shaped beam with a fixed, systematically selected fluence well above the ablation threshold. The method locates the damage boundary produced from repeated exposures, using images with a high contrast, and maps it to the beam profile to extract a lifetime laser damage fluence threshold value. We validate the DSA approach using a few relevant transparent film material systems and by comparing it to the standard S/1 laser damage test method. The DSA method can be more efficient and accelerate materials development and validation necessary to support the design of high-power repetition-rated lasers and optoelectronic devices.

Optimization of morphological parameters for mitigation pits on rear KDP surface: experiments and numerical modeling.

In high power laser systems, precision micro-machining is an effective method to mitigate the laser-induced surface damage growth on potassium dihydrogen phosphate (KDP) crystal. Repaired surfaces with smooth spherical and Gaussian contours can alleviate the light field modulation caused by damage site. To obtain the optimal repairing structure parameters, finite element method (FEM) models for simulating the light intensification caused by the mitigation pits on rear KDP surface were established. The light intensity modulation of these repairing profiles was compared by changing the structure parameters. The results indicate the modulation is mainly caused by the mutual interference between the reflected and incident lights on the rear surface. Owing to the total reflection, the light intensity enhancement factors (LIEFs) of the spherical and Gaussian mitigation pits sharply increase when the width-depth ratios are near 5.28 and 3.88, respectively. To achieve the optimal mitigation effect, the width-depth ratios greater than 5.3 and 4.3 should be applied to the spherical and Gaussian repaired contours. Particularly, for the cases of width-depth ratios greater than 5.3, the spherical repaired contour is preferred to achieve lower light intensification. The laser damage test shows that when the width-depth ratios are larger than 5.3, the spherical repaired contour presents higher laser damage resistance than that of Gaussian repaired contour, which agrees well with the simulation results.

Spectral laser damage testing of optical materials

Abstract The spectral laser-induced damage of optical components was measured using a new instrument based on combining a laser-induced damage threshold (LIDT) testing procedure with angle-resolved light scattering and using a tunable optical parametric oscillator laser source. Tests on aluminum mirrors revealed a significant drop of the LIDT around 800 nm, which is not predicted by simple scaling laws. For near-infrared edge filters, remarkable changes in the LIDT around the band edge were observed, which are linked to the spectral variation of the field distribution in the interference coating.

Scalable process for mitigation of laser-damaged potassium dihydrogen phosphate crystal optic surfaces with removal of damaged antireflective coating.

We investigate an approach for the recycling of laser-damaged large-aperture deuterated potassium dihydrogen phosphate (DKDP) crystals used for optical switching (KDP) and for frequency conversion (DKDP) in megajoule-class high-power laser systems. The approach consists of micromachining the surface laser damage sites (mitigation), combined with multiple soaks and ultrasonication steps in a coating solvent to remove, synergistically, both the highly adherent machining debris and the laser-damage-affected antireflection coating. We identify features of the laser-damage-affected coating, such as the "solvent-persistent" coating and the "burned-in" coating, that are difficult to remove by conventional approaches without damaging the surface. We also provide a solution to the erosion problem identified in this work when colloidal coatings are processed during ultrasonication. Finally, we provide a proof of principle of the approach by testing the full process that includes laser damage mitigation of DKDP test parts, coat stripping, reapplication of a new antireflective coat, and a laser damage test demonstrating performance up to at least 12 J/cm2 at UV wavelengths, which is well above current requirements. This approach ultimately provides a potential path to a scalable recycling loop for the management of optics in large, high-power laser systems that can reduce cost and extend lifetime of highly valuable and difficult to grow large DKDP crystals.

Shape dependence of laser–particle interaction-induced damage on the protective capping layer of 1 ω high reflector mirror coatings

The response of a potential candidate protective capping layer (SiO2 or Al2O3) to laser exposure of 1ω (1053 nm) to high-reflector silica-hafnia multilayer coatings in the presence of variously shaped Ti particles is investigated by combining laser damage testing and numerical modeling. Each sample is exposed to a single oblique angle (45 deg) laser shot (p-polarization, ∼10 J/cm2, 14 ns) in the presence of spherically or irregularly shaped Ti particles on the surface. The two capping layers show markedly different responses. For the spherical particles, the Al2O3 cap layer exhibits severe damage, with the capping layer becoming completely delaminated at the particle locations. The SiO2 capping layer is only mildly modified by a shallow depression, likely due to plasma erosion. The different response of the capping layer is attributed to the large difference in the thermal expansion coefficient of the materials, with that of the Al2O3 about 15 times greater than that of the SiO2 layer. For the irregular particles, the Al2O3 capping layer displays minimal to no damage while the SiO2 capping layer is significantly damaged. The difference is due to the disparity in mechanical strength with Al2O3 possessing approximately 10 times higher fracture toughness.

CO2 laser microprocessing for laser damage growth mitigation of fused silica optics

We report on the development of a mitigation process to prevent the growth of UV nanosecond laser-initiated damage sites under successive irradiations of fused silica components. The developed process is based on fast microablation of silica as it has been proposed by Bass et al. [Bass et al., Proc. SPIE 7842, 784220 (2010)]. This is accomplished by the displacement of the CO2 laser spot with a fast galvanometer beam scanner to form a crater with a typical conical shape to mitigate large (millimetric) and deep (few hundred microns) damage sites. We present the developed experimental system and process for this application. Particularly, we detail and evaluate a method based on quantitative phase imaging to obtain fast and accurate three-dimensional topographies of the craters. The morphologies obtained through different processes are then studied. Mitigation of submillimetric nanosecond damage sites is demonstrated through different examples. Experimental and numerical studies of the downstream intensifications, resulting in cone formation on the surface, are presented to evaluate and minimize the downstream intensifications. Eventually, the laser damage test resistance of the mitigated sites is evaluated at 355, 2.5 ns, and we discuss on the efficiency of the process for our application.

Laser damage comparisons of broad-bandwidth, high-reflection optical coatings containing TiO2, Nb2O5, or Ta2O5high-index layers

Broad bandwidth coatings allow angle of incidence flexibility and accommodate spectral shifts due to aging and water absorption. Higher refractive index materials in optical coatings, such as TiO2, Nb2O5, and Ta2O5, can be used to achieve broader bandwidths compared to coatings that contain HfO2 high index layers. We have identified the deposition settings that lead to the highest index, lowest absorption layers of TiO2, Nb2O5, and Ta2O5, via e-beam evaporation using ion-assisted deposition. We paired these high index materials with SiO2 as the low index material to create broad bandwidth high reflection coatings centered at 1054 nm for 45 deg angle of incidence and P polarization. High reflection bandwidths as large as 231 nm were realized. Laser damage tests of these coatings using the ISO 11254 and NIF-MEL protocols are presented, which revealed that the Ta2O5/SiO2 coating exhibits the highest resistance to laser damage, at the expense of lower bandwidth compared to the TiO2/SiO2 and Nb2O5/SiO2 coatings.

Analysis of laser damage tests on coatings designed for broad bandwidth high reflection of femtosecond pulses

We designed an optical coating based on TiO2/SiO2 layer pairs for broad bandwidth high reflection (BBHR) at 45-deg angle of incidence (AOI), P polarization of femtosecond (fs) laser pulses of 900-nm center wavelength, and produced the coatings in Sandia’s large optics coater by reactive, ion-assisted e-beam evaporation. This paper reports on laser-induced damage threshold (LIDT) tests of these coatings. The broad HR bands of BBHR coatings pose challenges to LIDT tests. An ideal test would be in a vacuum environment appropriate to a high energy, fs-pulse, petawatt-class laser, with pulses identical to its fs pulses. Short of this would be tests over portions of the HR band using nanosecond or sub-picosecond pulses produced by tunable lasers. Such tests could, e.g., sample 10-nm-wide wavelength intervals with center wavelengths tunable over the broad HR band. Alternatively, the coating’s HR band could be adjusted by means of wavelength shifts due to changing the AOI of the LIDT tests or due to the coating absorbing moisture under ambient conditions. We had LIDT tests performed on the BBHR coatings at selected AOIs to gain insight into their laser damage properties and analyze how the results of the different LIDT tests compare.

Determination of ultra-short laser induced damage threshold of KH2PO4 crystal: Numerical calculation and experimental verification

Rapid growth and ultra-precision machining of large-size KDP (KH2PO4) crystals with high laser damage resistance are tough challenges in the development of large laser systems. It is of high interest and practical significance to have theoretical models for scientists and manufacturers to determine the laser-induced damage threshold (LIDT) of actually prepared KDP optics. Here, we numerically and experimentally investigate the laser-induced damage on KDP crystals in ultra-short pulse laser regime. On basis of the rate equation for free electron generation, a model dedicated to predicting the LIDT is developed by considering the synergistic effect of photoionization, impact ionization and decay of electrons. Laser damage tests are performed to measure the single-pulse LIDT with several testing protocols. The testing results combined with previously reported experimental data agree well with those calculated by the model. By taking the light intensification into consideration, the model is successfully applied to quantitatively evaluate the effect of surface flaws inevitably introduced in the preparation processes on the laser damage resistance of KDP crystals. This work can not only contribute to further understanding of the laser damage mechanisms of optical materials, but also provide available models for evaluating the laser damage resistance of exquisitely prepared optical components used in high power laser systems.

Subsurface defect characterization and laser-induced damage performance of fused silica optics polished with colloidal silica and ceria

This paper mainly focuses on the influence of colloidal silica polishing on the damage performance of fused silica optics. In this paper, nanometer sized colloidal silica and micron sized ceria are used to polish fused silica optics. The colloidal silica polished samples and ceria polished samples exhibit that the root-mean-squared (RMS) average surface roughness values are 0.7 nm and 1.0 nm, respectively. The subsurface defects and damage performance of the polished optics are analyzed and discussed. It is revealed that colloidal silica polishing will introduce much fewer absorptive contaminant elements and subsurface damages especially no trailing indentation fracture. The 355-nm laser damage test reveals that each of the fused silica samples polished with colloidal silica has a much higher damage threshold and lower damage density than ceria polished samples. Colloidal silica polishing is potential in manufacturing high power laser optics.

Role of tool marks inside spherical mitigation pit fabricated by micro-milling on repairing quality of damaged KH2PO4 crystal

Repairing initial slight damage site into stable structures by engineering techniques is the leading strategy to mitigate the damage growth on large-size components used in laser-driven fusion facilities. For KH2PO4 crystals, serving as frequency converter and optoelectronic switch-Pockels cell, micro-milling has been proven the most promising method to fabricate these stable structures. However, tool marks inside repairing pit would be unavoidably introduced due to the wearing of milling cutter in actual repairing process. Here we quantitatively investigate the effect of tool marks on repairing quality of damaged crystal components by simulating its induced light intensification and testing the laser-induced damage threshold. We found that due to the formation of focusing hot spots and interference ripples, the light intensity is strongly enhanced with the presence of tool marks, especially for those on rear surfaces. Besides, the negative effect of tool marks is mark density dependent and multiple tool marks would aggravate the light intensification. Laser damage tests verified the role of tool marks as weak points, reducing the repairing quality. This work offers new criterion to comprehensively evaluate the quality of repaired optical surfaces to alleviate the bottleneck issue of low laser damage threshold for optical components in laser-driven fusion facilities.

Modeling the effect of nanosecond laser conditioning on the femtosecond laser-induced damage of optical films.

The effect of nanosecond laser conditioning on the femtosecond laser-induced damage behaviors of Al2O3, HfO2, SiO2 single layers and Al2O3/SiO2 high reflectors (HR) are explored. During femtosecond laser damage test, negative effects on enhancing the femtosecond laser-induced damage threshold (LIDT) of optical films after the nanosecond laser conditioning is found, which is opposite to the LIDT improvement in the nanosecond range. To explain the mechanism after nanosecond laser conditioning, a theoretical model including multiphoton ionization (MPI), avalanche ionization (AI) and decays of electrons with one defect state is built to simulate the evolution of electron density in the conduction band. A permanent mid-gap defect state resulting from the process of laser conditioning is introduced in our model, which is found to contribute seed electrons to conduction band and hence accelerate the final breakdown. Both the experimental result and theoretical calculation agree very well with each other.

Laser-induced damage of multilayer dielectric gratings with picosecond laser pulses under vacuum and air

Abstract In this study, laser damage tests of multilayer dielectric gratings (MDGs) are performed in vacuum (5×10 −4 Pa) and in air at a wavelength of 1053 nm with pulse widths of 0.56 ps ~9.7 ps. The laser-induced damage threshold (LIDT) of MDGs in vacuum/air ranges from 2.1/2.2 J/cm 2 to 4.4/4.8 J/cm 2 for laser beams of normal incidence. The LIDT of MDGs follows a τ 0.26 scaling in the pulse width regime considered. The typical damage morphologies in the two environments caused by the near threshold pulse were observed using a scanning electron microscope (SEM); the results indicate that the damage features of MDGs in vacuum are the same as those in air. The testing results reveal that a clean vacuum environment neither changes the laser damage mechanism nor lowers the LIDT of MDGs.