An ideal alignment method based on the external anatomical surface of the patient should consider the entire region of interest. However, optical-camera-based systems cannot blindly monitor such areas as the patient’s back, for example. Furthermore, collecting enough information to correct the associated deformation error is impossible. The study aim is to propose a new patient alignment method using tactile array sensors that can measure the distributed pressure profiles along the contact surface. The TactArray system includes one sensor, a signal-conditioning device (USB drive/interface electronics, power supply, and cables), and a PC. The tactile array sensor was placed between the patient’s back and the treatment couch, and the deformations at different location on the patient’s back were evaluated. Three healthy male volunteers were enrolled in this study, and pressure profile distributions (PPDs) were obtained with and without immobilization. After the initial pretreatment setup using the laser alignment system, the PPD of the patient’s back was acquired. The results were obtained at four different times and included a reference PPD dataset. The contact area and the center-of-pressure value were also acquired based on the PPD data for a more elaborate quantitative data analysis. To evaluate the clinical feasibility of using the proposed alignment method for reducing the deformation error, we implemented a real-time self-correction procedure. Despite the initial alignment, we confirmed that PPD variations existed in both cases of the volunteer studies (with and without the use of the immobilization tool). Additionally, we confirmed that the contact area and the center of pressure varied in both cases, and those variations were observed in all three volunteers. With the proposed alignment method and the real-time selfcorrection procedure, the deformation error was significantly reduced. The proposed alignment method can be used to account for the limitation of the camera-based system and to improve the accuracy of the external surface-based patient setup.