Large Range Of Motion Research Articles

Simultaneous damping and tracking control of a normal-stressed electromagnetic actuated nano-positioning stage

Normal-stressed electromagnetic actuated (NSEA) nano-positioning stage has become more and more promising in various fields due to its high actuation force density and large motion range. However, the intrinsic hysteresis of the actuator and the lightly-damped resonance of the mechanism hinder the stage for the high-accuracy and high-speed applications. To handle these two problems, the damping and tracking controllers are commonly adopted, as the inner and outer loops, respectively, to design a dual-loop controller. However, the existing sequential design approach limits the achievable performance of the controller. This paper proposes a simultaneous optimization approach for a dual-loop controller with the inner loop positive acceleration, velocity, and position feedback (PAVPF) damping controller and the outer loop proportional-integral (PI) tracking controller. The objective is to obtain a flat closed-loop frequency response with a large control bandwidth, and the parameters of the inner and outer loops are tuned simultaneously. Both the damping ratio and stiffness of the vibration mode are improved, and the obtained ± 3 dB control bandwidth exceeds the first resonant frequency of the open-loop system. Experiments are carried out on a custom designed NSEA nano-positioning stage. The tested bandwidth of the simultaneously optimized system agrees well with the theoretical one, and is 188.9% higher than that of the sequentially designed system. Step response tests, triangular wave tracking tests, and hysteresis reduction tests also demonstrate the effectiveness and advancement of the proposed approach.

Development of a cross-scale 2-DOF piezoelectric rotary platform based on active friction switching

In order to overcome the typical cross-scale motion contradiction between the large motion range (radian scale) and high displacement resolution (microradian scale) in single actuation device, we proposed a novel two degrees of freedom (2-DOF) piezoelectric rotary platform (PERP) to implement cross-scale rotary motions based on active friction switching. A longitudinal-bending-bending (LBB) piezoelectric actuator (PEA) was developed to realize 2D lateral bending motions and 1D longitudinal motion. The former was used to drive rotor, while the latter was employed to implement friction switching. The principles of the PERP and the switching mechanism of the working modes were illustrated systematically. The finite element method (FEM) was utilized to simulate the motions of the PEA, and a series of experimental results successfully verified the principles and the theoretical analyses. The 2-DOF cross-scale rotary motions were successfully realized, and the PERP can achieve large motion range of 2π rad, maximum rotary velocity of 817.88 mrad/s, high resolution of 23.03 μrad and low coupling motion of 4.91%. The proposed friction switching method held benefits to improve flexibility and stable frequency range (more than 10 times) of dynamic scanning motion. The developed PERP could be used to drive optical mirrors with merits of both large motion range and high resolution for multiple target tasks.

Power-Efficient Soft Pneumatic Actuator Using Spring-Frame Collateral Compression Mechanism

With the ongoing research on soft robots, the performance of soft actuators needs to be enhanced for more wide robotic applications. Currently, most soft robots based on pneumatic actuation are capable of assisting small systems, but they are not fully suited for supporting joints requiring large force and range of motion. This is due to the actuation characteristics of the pneumatic artificial muscle (PAM); they are relatively slow, inefficient, and experience a significant force reduction when the PAM contracts. Hence, we propose a novel PAM based on a spring-frame collateral compression mechanism. With only a single compressed air source, the external mesh-covered and inner spring-frame actuators of the proposed PAM operate simultaneously to generate considerable force. Additionally, the design of the internal actuator within the void space of PAM reduces the air consumption and consequently improves the actuator’s operating speed and efficiency. We experimentally confirmed that the proposed PAM exhibited 31.2% greater force, was 25.6% faster, and consumed 21.5% lower air compared to the conventional McKibben muscles. The performance enhancement of the proposed PAM improves the performance of soft robots, allowing the development of more compact robots with greater assistive range.

Low-cost electrothermally actuated MEMS mirrors for high-speed linear raster scanning

Electrothermally actuated MEMS mirrors are significantly lower in cost than their electrostatically actuated counterparts, largely due to their ability to perform well without hermetic packaging. However, their typical slower speeds, higher power requirement, and non-linear drive limit their widespread use. In this work, we address these limitations and achieve an electrothermally actuated MEMS mirror capable of reliable linear raster scanning at speeds up to 300 Hz with a large angular range of motion ( ± 40 ∘ optical). A simple pulse design technique is used to achieve ∼ 99 % scan linearity and correct for artifacts like overshoot and ringing. Furthermore, segmented polysilicon microheaters along the actuators are used for impedance matching to low-voltage electronics, resulting in lower power consumption and improved scan speed and angular range. These mirrors serve as an attractive option for low-cost and compact integrated beam-steering optical devices, and we demonstrate one such use case in an optical coherence tomography (OCT) system.

Association Between the Amount of Limb Lengthening and Hip Range of Motion After Total Hip Arthroplasty.

The relationship between prosthetic position and range of motion (ROM) after total hip arthroplasty (THA) has been rigorously examined. However, the effects of limb lengthening on postoperative hip ROM remain unclarified. We aimed to examine the effect of limb lengthening on hip ROM after THA. We retrospectively reviewed the data from 120 patients who underwent unilateral THA. Univariate and multivariate regression models were used to evaluate the effects of the following patient- and surgery-related covariates on hip flexion ROM at 3, 6, and 12 months after THA: age, sex, body mass index, diagnosis, preoperative University of California Los Angeles activity score, preoperative Oxford Hip Score, preoperative flexion ROM, amount of leg lengthening, cup inclination, and cup anteversion. A large preoperative hip flexion ROM was the strongest predictor of a large hip flexion ROM at 12 months after THA (standardized coefficient: 0.519, P < 0.0001). A larger amount of leg lengthening was associated with a smaller postoperative hip flexion ROM (standardized coefficient: -0.159, P = 0.039), and male sex was another predictor of a smaller postoperative hip flexion ROM (standardized coefficient: -0.204, P = 0.014). Cup inclination (P = 0.99) and anteversion (P = 0.18) were not significantly associated with hip flexion ROM at 12 months after THA. A large amount of limb lengthening was associated with decreased hip flexion ROM after THA. In THA, minimizing the leg length discrepancy is important; however, the postoperative improvement in hip flexion ROM may be limited when a large amount of leg lengthening is needed.

Effects of aging on whole-body center of mass movement and lower limb joint kinematics and kinetics during deep-squat movement

Deep-squat movement is one of the most important activities for independent living. Although a large range of motion of lower extremity joints in the sagittal plane is required for deep-squat movement, older individuals exhibit reduced mobility of lower limb joints. However, the effect of aging on deep-squat movement remains unclear. The purpose of this study was to investigate the age-related changes in the whole-body movement and lower extremity joint kinematics and kinetics during deep-squat movement. Twelve older and nineteen younger individuals performed the deep-squat movement, with knee flexion exceeding 100 degrees, and a motion analysis system and force plates collected their motion data. The median (interquartile range) age of older and younger individuals was 76.5 (3.3) and 30.0 (9.0) years, respectively. The deep-squat depth was significantly shallower in older individuals than in younger individuals (P < 0.05). Furthermore, older individuals exhibited smaller ankle dorsiflexion and knee flexion angles, larger trunk flexion angles, and greater forward displacement of the whole-body center of mass during deep-squat movement (P < 0.05). In terms of kinetic variables, older individuals exhibited smaller contributions of knee extension moment and larger contributions of hip extension moment to the support moment in the timing of the maximum support moment during deep-squat movement (P < 0.05). Our results indicated that older individuals have greater difficulty with deeper-squat movement and smaller contribution of knee extension moment to support body weight using trunk, hip, and ankle movements during deep-squat movement.

Integration modeling and control of a 12-degree-of-freedom macro–micro dual parallel manipulator

Parallel manipulator systems with large workspace and high-accuracy positioning are attractive for a variety of accuracy engineering applications. In this article, a new 12-DOF macro–micro dual parallel manipulator is presented, which comprises a 6-PSU macro symmetrical parallel manipulator and a 6-SPS micro orthogonal parallel manipulator. This novel mechanism can not only realize a large range of movement but also accurate positioning. To achieve high-accuracy control, a macro–micro integrated model of the macro–micro dual parallel mechanism is proposed, including a mechanical system model and drive system model. Aiming at the trajectory planning for a multi-degree-of-freedom (DOF) manipulator, a smooth optimization trajectory planner for the 12-DOF macro–micro dual parallel manipulator is presented to realize smooth trajectory generation. A high-accuracy motion controller combining feedback and feedforward is developed based on the drive system model. Finally, the experiment well validates the correctness of the integrated model and motion control algorithm and reveals that the proposed mechanism is expected to be adopted into micro scale manipulations.

Design and Analysis of Ultra-Precise Large Range Linear Motion Platforms Using Compliant Mechanism

Double parallelogram compliant mechanism (DPCM) is extensively used to obtain precise straight-line motion. Symmetric DPCMs, used previously, traverse a straight-line path without parasitic error when gravity vector is perpendicular to the plane of bending of beams. However, when gravity vector is either in line with beams (orientation B) or in the plane of bending of beams (orientation C), asymmetry in the loading causes undesired deviation from a straight-line path. This undesired deviation called parasitic error increases, especially in beams with relatively low flexural rigidity required to obtain larger displacements with low power actuators. This paper first characterizes parasitic error, in such cases, using large deformation analysis and further proposes novel ways to minimize it. A recently developed, chained beam constraint method is used to model, characterize, and optimize DPCMs. Optimized parameters are further validated by FEA and experiments. In orientation B, after implementing the proposed method, numerical analysis and experimental results show that the undesired parasitic error of 123 &#x03BC;m is drastically reduced to 2 &#x03BC;m and 6 &#x03BC;m, respectively. Moreover, systematic design procedure with corresponding graphs is presented to avoid modeling and optimization steps for a user-specific case. The proposed methods pave pathways to reducing the parasitic error during large-range motion using multiple orientations of DPCMs and thus make DPCMs more employable in several precision motion applications such as 3D optical scanners, 3D micro-printers, CMM probes, and microscopy stages.

A Novel Clinical-Driven Design for Robotic Hand Rehabilitation: Combining Sensory Training, Effortless Setup, and Large Range of Motion in a Palmar Device.

Neurorehabilitation research suggests that not only high training intensity, but also somatosensory information plays a fundamental role in the recovery of stroke patients. Yet, there is currently a lack of easy-to-use robotic solutions for sensorimotor hand rehabilitation. We addressed this shortcoming by developing a novel clinical-driven robotic hand rehabilitation device, which is capable of fine haptic rendering, and that supports physiological full flexion/extension of the fingers while offering an effortless setup. Our palmar design, based on a parallelogram coupled to a principal revolute joint, introduces the following novelties: (1) While allowing for an effortless installation of the user's hand, it offers large range of motion of the fingers (full extension to 180° flexion). (2) The kinematic design ensures that all fingers are supported through the full range of motion and that the little finger does not lose contact with the finger support in extension. (3) We took into consideration that a handle is usually comfortably grasped such that its longitudinal axis runs obliquely from the metacarpophalangeal joint of the index finger to the base of the hypothenar eminence. (4) The fingertip path was optimized to guarantee physiologically correct finger movements for a large variety of hand sizes. Moreover, the device possesses a high mechanical transparency, which was achieved using a backdrivable cable transmission. The transparency was further improved with the implementation of friction and gravity compensation. In a test with six healthy participants, the root mean square of the human-robot interaction force was found to remain as low as 1.37 N in a dynamic task. With its clinical-driven design and easy-to-use setup, our robotic device for hand sensorimotor rehabilitation has the potential for high clinical acceptance, applicability and effectiveness.

Bio-inspired origamic pouch motors with a high contraction ratio and enhanced force output

The range of motion and force output of soft actuators are important characteristics that determine the capacities of soft robots. Pouch motors are a family of soft fluidic actuators featuring a simple mechanical structure and easy fabrication process, but their relatively small contraction ratio constrains their potential applications. Inspired by the origami membrane in the lobster leg joint, we propose two types of origamic pouch motors in which origami structures are integrated into the longitudinal edges of traditional pouches. As a uniform and large degree of transverse expansion can be facilitated by unfolding the origami structures, a significantly larger contraction ratio and enhanced force output can be achieved. The complete workflow of origamic pouch motors is presented including the design principles, fabrication process, theoretical modeling, and experimental characterization, and multiple pouches can be conveniently assembled to realize different motion profiles with a larger range of motion as well. For application demonstrations, we develop different grippers based on origamic pouch motors for safe and forceful grasping. The results of this study can provide guidance for the development of robotic systems featuring easy fabrication, safe actuation, lightweight, a large motion range, and high force output.

Kinematic Optimization of a Flexible Wing Undergoing Flapping and Pitching

In recent years, there has been widespread interest in the design of microair vehicles (MAVs) for flapping flight with high-aspect ratio wings due to their high efficiency and energy savings. However, the flexibility of a flapping wing causes the aeroelastic effect, which remains a subject of investigation. Generally, existing research simulates active bending and twisting of flexible wings under the assumption of neglecting flapping inertia. In this research, the kinematic optimization of a bionic wing with passive deformation in forward flight while undergoing flapping and pitching is considered. To this end, a computational aeroelasticity framework, which includes the three-dimensional unsteady vortex lattice method (UVLM) and the Newmark-β method, is constructed for flapping flight. Under the assumption of linear elastic deformation, this tool is capable of simulating attached flows over a thin wing and capturing unsteady effects of wakes. A bionic numerical wing with an aspect ratio of 6.5, chord Reynolds number of 1.9 × 105, and reduced frequency less than 0.1 is investigated in kinematic optimization. The computational aeroelasticity framework is combined with a global optimization algorithm to identify the optimal kinematics that maximize the propulsive efficiency under the minimum average lift constraint. Two types of numerical wings, rigid wing and flexible wing, are considered here to compare the influence of deformation on the aerodynamics of the flapping wing. The results show that the aeroelastic effect, which increases the flapping amplitude, yields a significant improvement in terms of propulsive efficiency. In addition, the optimization algorithm maximizes the thrust efficiency while satisfying the required lift. Moreover, the optimal kinematics of both the rigid wing and the flexible wing reach the maximum flapping angle, which indicates that a larger range of motions is needed for optimal kinetics when loosening the boundary conditions.

Design and analysis of a novel large-range 3-DOF compliant parallel micromanipulator

Compared with the traditional rigid mechanism, the flexible mechanism has more advantages, which play an important role in critical situations such as microsurgery, IC (integrated circuit) fabrication/detection, and some precision operating environment. Especially, there is an increasing need for 3-DOF (degrees-of-freedom) compliant translational micro-platform (CTMP) providing good performance characteristics with large motion range, low cross coupling, and high spatial density. Decoupled topology design of the CTMP can easily realize these merits without increasing the difficulty of controlling. This paper proposes a new three DOF compliant hybrid micromanipulator which have large range of motion up to 100 μm × 100 μm × 100 μm in the direction in the dimension of 90 mm × 90 mm × 50 mm, smaller cross-axis coupling (the max coupling only 2.5%) than the initial XY compliant platform in XY axial.

Three-dimensional lower-limb kinematics during undulatory underwater swimming

ABSTRACT The three-dimensional (3D) motion of lower-limb joints is evaluated during various sports. However, few studies have reported the 3D lower-limb joint movement during undulatory underwater swimming (UUS). This study aimed to investigate the relationship between 3D lower-limb kinematics and forward-swimming velocity during UUS at maximal velocity. A total of 26 male international- and national-level swimmers were assessed during UUS using a motion-capture system. The 3D angle and angular velocity of the lower-limb joints were calculated and relationships between forward-swimming velocity, angle, and angular velocity were investigated using correlation analysis. The peak angular velocities of hip internal and external rotation were significantly correlated with forward-swimming velocity (r = .48, p = .01 and r =.74, p < .01, respectively). Peak hip internal rotation was observed at the middle of down-kicking (25% kick cycle, 243/s), whereas peak external rotation was observed at the terminal of down-kicking (50% kick cycle, −351/s). The swimmers showed a higher peak angular velocity of hip internal/external rotation with a large active range of motion for hip rotation. The swimmers moved their lower-limb joints three-dimensionally, and aside from flexion/extension movements, and hip rotation may increase UUS proficiency.

A biomechanical examination of the inclusion of active flexibility in artistic gymnastic movements requiring mobility

Background and Study Aim. The purpose of the study is a biomechanical examination of the inclusion of active flexibility in artistic gymnastic movements requiring mobility (muscles' ability to stretch), flexibility and other motor abilities such as force, power, etc.&#x0D; Material and Methods. The study included 17 girl gymnasts aged 7-9 years old, with a body height of 140.7±10.2, weight of 34.1±6.4, and a body mass index of 17.6±3.0. Data collection in the study was made by using performance tests developed by FIG such as a Forward-Backward Split, Side Spit, Arm-Trunk Angle Backward, Trunk Bent Forward, Leg Raise forward, Leg Raise Sideward, Bridge, Standing long Jump, Lift Trunk Forward-60secs, Angle Degree of the Leg Split Position in Cartwheel, and Arm-Upper Body Angle Backward in Bridge Technique. The Kinovea 0.8.15 program was used in the data analysis of the variables in the study. The SPSS 24 software program was used for the data analysis. Percentages of the angle degree calculated by the formula “%= (angle0 of the mobility in functional movement / angle0 of the active flexibility) *100” were found.&#x0D; Results. Results indicate that active flexibility was 90% functional in the leg raise sideward, 90% in the leg split during execution of the cartwheel, 17.5% in the bridge technique, and completely functional for the flexibility ratio expressed in the leg raise forward technique. In the analysis of the various elements of the similar biomechanics, the anatomic structure and similar body planes, it was concluded that active flexibility expressed in the movements required a mobility of around 65-75%.&#x0D; Conclusions.. it was determined that the functionality rate of the techniques requiring active flexibility and requiring mobility of the same biomechanical and anatomical structure was around 65-75%. Therefore, to execute 100% of the flexibility in action (during active elements) as it is in a passively or actively, it may significantly increase force, motor control, dynamic balance, coordination etc., in the large range of motion.

Finite Element Analysis of a Novel Anterior Locking Plate for Thoracolumbar Burst Fracture.

Purpose The finite element analysis method was used to explore the biomechanical stability of a novel locking plate for thoracolumbar burst fracture fusion fixation. Methods The thoracolumbar CT imaging data from a normal volunteer was imported into finite software to build a normal model and three different simulated surgical models (the traditional double-segment fixation model A, the novel double-segment fixation model B, and the novel single-segment fixation model C). An axial pressure (500 N) and a torque (10 Nm) were exerted on the end plate of T12 to simulate activity of the spine. We recorded the range of motion (ROM) and the maximum stress value of the simulated cages and internal fixations. Results Model A has a larger ROM in all directions than model B (flexion 5.63%, extension 38.21%, left rotation 46.51%, right rotation 39.76%, left bending 9.45%, and right bending 11.45%). Model C also has a larger ROM in all directions than model B (flexion 555.63%, extension 51.42%, left rotation 56.98%, right rotation 55.42%, left bending 65.67%, and right bending 59.47%). The maximum stress of the cage in model A is smaller than that in model B except for the extension direction (flexion 96.81%, left rotation 175.96%, right rotation 265.73%, left bending 73.73%, and right bending 171.28%). The maximum stress value of the internal fixation in model A is greater than that in model B when models move in flexion (20.23%), extension (117.43%), and left rotation (21.34%). Conclusion The novel locking plate has a smaller structure and better performance in biomechanical stability, which may be more compatible with minimally invasive spinal tubular technology.

Design and modeling of a compact compliant stroke amplification mechanism with completely distributed compliance for ground-mounted actuators

This paper proposes a new compliant mechanism for the stroke amplification of piezoelectric actuators. Compared with the existing ones, this compliant stroke amplification mechanism (CSAM) has several advantages including lightweight, less stress concentration, large motion range, as well as ease of manufacture in macro- and micro-scales, mainly due to the completely distributed compliance and largely reduced moving mass. Kinetostatic models of the CSAM, with consideration of the payloads applied on the output stage, are derived for quick and insightful determinate analysis, which enables optimization of the associated parameters to achieve different objectives. The results obtained from the kinetostatic models are in reasonable agreement with the FEA simulation results, with less than 3.8% difference when the input displacement is less than 10 µm. An optimization method, based on the analytical models, is introduced and employed to increase the amplification ratio of the CSAM by up to 240%. The optimized CSAM is an excellent candidate for the stroke amplification of piezoelectric actuators, which is fabricated and experimentally tested. The optimization method is able to be extended to design other compliant mechanisms with optimized size, shape and topology configuration simultaneously.

The Correlation between Rotational Gravity and Magnetic Field of Celestial Body

The magnetic field of the earth plays an important role in the ecosystem, and the magnetic field of celestial bodies is also important in the formation of cosmic large-scale structures, but the origin and evolution of the celestial magnetic field is still an unresolved mystery. Many hypotheses to explain the origin have been proposed, but there are some insurmountable difficulties for each one. At present, the theory widely accepted in scientific society is the dynamo model, it says that, the movement of magnetofluid inside celestial bodies, which can overcome the Ohmic dissipative effect and generate persistent weak electric current and macroscopic magnetic field. However, this model needs an initial seed magnetic field, and the true values of many physical parameters inside the celestial body are difficult to obtain, and there is no stable solution to the large range of fluid motion. These are all difficulties for the dynamo model. Furthermore, it is difficult for the dynamo to explain the correlation between the dipole magnetic field and angular momentum of a celestial body. In this paper, by calculating the interaction between spin of particles and gravity of celestial body according to Clifford algebra, we find that a rotational celestial body provides a field Ωα for spins, which is similar to the magnetic field of a dipole, and the spins of charged particles within the celestial body are arranged along the flux line of Ωα, then a macroscopic magnetic field is induced. The calculation shows that the strength of Ωα is proportional to the angular momentum of the celestial body, which explains the correlation between the magnetic intensity and angular momentum. The results of this paper suggest that further study of the effects of internal variables such as density, velocity, pressure and temperature of a celestial body on Ωα may provide some new insights into the origin and evolution of celestial magnetic field.

Whole-body phase plane analysis for standard maximum vertical jump assessment

In the present study we investigated kinematical characteristics of the knee and ankle extensors to estimate the length change properties of the contractile and the passive elements in countermovement jumps (CMJ) and drop jumps (DJ) performed with small (40°) and large (80°) range of joint motion (SRM and LRM). At SRM the accelerations at maximal muscle lengths compared with the last phase of joint flexion were greater for the gastrocnemius and the soleus (124.9% and 79.4%) and also were greater than at the beginning of joint extension, while no difference was measured at LRM. The differences suggest that at LRM the length change of the serial passive elements from the end of joint flexion to the beginning of joint extension is minimal and simultaneously the length change of the contractile elements is significant, but at SRM – especially in the plantar flexors – the length change of the contractile elements is minimal while in the passive elements significant. It can be presumed that for SRM at the end of joint flexion significant elastic energy is stored and at the beginning of joint extension reused, while for LRM elastic energy storage is not dominant.

Control of Newly-Designed Wearable Robotic Hand Exoskeleton Based on Surface Electromyographic Signals.

The human hand plays a role in a variety of daily activities. This intricate instrument is vulnerable to trauma or neuromuscular disorders. Wearable robotic exoskeletons are an advanced technology with the potential to remarkably promote the recovery of hand function. However, the still face persistent challenges in mechanical and functional integration, with real-time control of the multiactuators in accordance with the motion intentions of the user being a particular sticking point. In this study, we demonstrated a newly-designed wearable robotic hand exoskeleton with multijoints, more degrees of freedom (DOFs), and a larger range of motion (ROM). The exoskeleton hand comprises six linear actuators (two for the thumb and the other four for the fingers) and can realize both independent movements of each digit and coordinative movement involving multiple fingers for grasp and pinch. The kinematic parameters of the hand exoskeleton were analyzed by a motion capture system. The exoskeleton showed higher ROM of the proximal interphalangeal and distal interphalangeal joints compared with the other exoskeletons. Five classifiers including support vector machine (SVM), K-near neighbor (KNN), decision tree (DT), multilayer perceptron (MLP), and multichannel convolutional neural networks (multichannel CNN) were compared for the offline classification. The SVM and KNN had a higher accuracy than the others, reaching up to 99%. For the online classification, three out of the five subjects showed an accuracy of about 80%, and one subject showed an accuracy over 90%. These results suggest that the new wearable exoskeleton could facilitate hand rehabilitation for a larger ROM and higher dexterity and could be controlled according to the motion intention of the subjects.

Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control.

This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed.