Abstract
This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed.
Highlights
This planar machine has a circular moving range of 100 mm
In order to detect the smallest possible structures for surface imaging, scanning probe microscopy methods can be used [3,4]. This includes atomic force microscopy (AFM), in which the bending of a microcantilever provides information about the topography of the sample to be analysed [5]. Most of these tip-based methods work with high accuracy in ranges of a few micrometres and are limited in the analysis of large areas
It is possible to use them for scanning probe lithography [6,7]
Summary
The state of the art for measuring periodic structures is the use of optical measuring methods, based on the diffraction of a laser beam and the subsequent determination of the refractive angle [14]. These methods have a poor lateral resolution because of the diameter of the laser beam. This is due to the integration of the structural properties over the laser spot size and results in measuring the mean pitch for the investigated area. The approach proposed in this paper has a significantly better lateral resolution in the nanometre range based on the high-resolution AFM system
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