Lamb Wave Resonators Research Articles

High electromechanical coupling factor Lamb wave resonator

Lamb wave resonators (LWRs) based on lithium niobate on insulator (LNOI) substrates operating in an A1 mode at frequencies above 5 GHz typically exhibit high electromechanical coupling coefficients (K2) ranging from 20% to 30%. This makes them promising candidates to replace current bulk acoustic wave technology in next-generation broadband RF filters. However, the K2 of conventional LWRs still struggles to meet application requirements for bandwidths exceeding 1 GHz, such as WiFi-6E. This paper presents an analytical optimization approach for rapid and comprehensive scanning of the full 3D Euler space to find the maximum effective K2 of LWR devices. Such a full scan is difficult to achieve by the conventional time-consuming finite element method (FEM). The K2 results for a selected subset of Euler angles obtained through this analytical approach align with FEM simulation results. The optimized results show that LWRs on LNOI can achieve the highest K2 of 59.92% at Euler angles of (0, −151°, −60°), providing bandwidths exceeding 1 GHz at 5 GHz. To validate this optimization approach, LWRs with various orientations were fabricated on both 41° YX-cut and Z-cut LNOI wafers, with measured K2 values at different Euler angles agreeing well with both analytical and FEM results. The proposed K2 optimization method serves as a valuable guideline for selecting substrate cuts and device orientations in the design of ultra-broadband filters for next-generation telecommunications.

Near-zero TCF 11.6-GHz lamb wave resonator based on 128°Y-cut LiNbO3

In this paper, a high-frequency lamb wave resonator (LWR) with near zero temperature coefficient of frequency (TCF) is designed, fabricated, and measured. The reported resonator is of a bi-layer structure consisting of lithium niobate (LiNbO3 or LN) and silicon dioxide (SiO2), and lithographically patterned aluminum (Al) inter-digitated electrode fingers on top of the bi-layer structure. By adjusting the thickness ratio of LN and SiO2 layers, both the electromechanical coupling (k2) and the TCF, including both TCF at resonant frequency (TCFr) and TCF at anti-resonant frequency (TCFa), of the thickness shear (TS) type LWR are optimized. Experimental results, which are in excellent agreement with theoretical analysis, show that the fabricated 11.6-GHz LWR achieves a k2 of 12.2%, with TCFr and TCFa being −4.2 and −5.4 ppm/K over a temperature range from 30 °C to 85 °C, respectively, demonstrating huge potential in applications for future wireless communication systems above 10 GHz.

6 GHz lamb wave acoustic filters based on A1-mode lithium niobate thin film resonators with checker-shaped electrodes

The first-order antisymmetric (A1) mode lamb wave resonator (LWR) based on Z-cut LiNbO3 thin films has attracted significant attention and is widely believed to be a candidate for next-generation reconfigurable filters with high frequency and large bandwidth (BW). However, it is challenging for traditional interdigitated electrodes (IDTs) based LWR filters to meet the requirement of a clean frequency spectrum response and enough out-of-band (OoB) rejection. To solve the problem, we propose LWRs with checker-shaped IDTs for the design of filters that meet the Wi-Fi 6E standard. By taking advantage of checker-shaped IDTs with unparalleled boundaries, the fabricated 6-GHz resonators successfully suppress higher-order A1 spurious modes, demonstrating a spurious-free impedance response and a high figure-of-merit (FOM) up to 104. Based on the demonstrated checker-shaped electrode design, the filter features a center frequency (f0) of more than 6 GHz, a 3 dB BW exceeding 620 MHz, and an excellent OoB rejection >25 dB, consistent with the acoustic-electric-electromagnetic (EM) multi-physics simulations. Furthermore, through the capacitance-inductance matching network technology, the filter’s voltage standing wave ratio (VSWR) is successfully reduced below 2, showing an excellent 50 Ω impedance matching. This study lays a foundation for ultra-high-frequency and ultra-wideband filters for the Wi-Fi 6/6E application.

AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient

AlN/ScAlN composite films-based spurious free A1 mode lamb wave resonator with adjustable effective electromechanical coupling coefficient

Ultracoherent Gigahertz Diamond Spin-Mechanical Lamb Wave Resonators.

We report the development of an all-optical approach that excites the fundamental compression mode in a diamond Lamb wave resonator with an optical gradient force and detects the induced vibrations via strain coupling to a silicon vacancy center, specifically, via phonon sidebands in the optical excitation spectrum of the silicon vacancy. Sideband optical interferometry has also been used for the detection of in-plane mechanical vibrations, for which conventional optical interferometry is not effective. These experiments demonstrate a gigahertz fundamental compression mode with a Q factor of >107 at temperatures near 7 K, providing a promising platform for reaching the quantum regime of spin mechanics, especially phononic cavity quantum electrodynamics of electron spins.

A High Q Lamb Wave Resonator with Dummy Toes Based on 20% ScAlN Film

Abstract The lamb wave resonator (LWR) based on aluminum nitride (AlN) films are preferred strategy for high-frequency filters in 5G communication due to the tunable electromechanical coupling and high Q value. However, since the low electromechanical coupling and piezoelectric coefficient of AlN films, conventional lamb filters are difficult to meet the requirements of high bandwidth and low loss. This work proposes a lamb wave resonator with dummy toes (DT-LWR) based on scandium-doped aluminum nitride (ScAlN) film to improve the quality factor(Q) meanwhile suppress the spurious modes. The processed DT-LWR was tested using a vector network analyser (VNA, Keysight N5222B), and the MBVD model was used to fit the Z parameters. The Q value of DT-LWR is 1437.23, while that of LWR is 1250.09. It is increased by 14.97%. The enhancements make the DT-IWR as an ideal for filters with minimal insertion loss.

A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al0.72Sc0.28N Lamb Wave Resonators and Filters

A Comprehensive Approach for Total Suppression of In-Band Spurious Modes in UHF Al_0.72Sc_0.28N Lamb Wave Resonators and Filters

Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers

The lithographically tunable and small size features of Lamb wave resonators (LWRs) take a bright future for their use in high frequency narrow band filters. Resonant frequency drift due to temperature variation has a large impact on the narrower passband and a temperature coefficient of frequency (TCF) closer to 0 can broaden the stable temperature range of the resonator. This paper proposes a method of etching grooves in the area of the piezoelectric layer not covered by the Interdigital transducer (IDT) electrodes to improve the temperature stability of the Lamb resonator. Through the finite element method and theoretical analysis, the phase velocity, group velocity, and TCF dispersion curve of different modes of the resonator with groove structure were determined. The reason for the change of TCF under different normalized thicknesses of AlN was explained through the conversion of the LWR from a contour mode resonator (CMR) to a Cross-Sectional Lamé Mode Resonator. Simulation and test have shown that etching grooves have the effect of reducing TCF by adjusting the electromechanical coupling coefficient. The test shows that 205 nm-depth grooves can lower the TCF of the S0 mode IDT-Open LWR from −13.3 to −5.1 ppm/°C and S1 mode from −36.8 to −9.0 ppm/°C, respectively. The TCF of S0 and S1 mode LWRs decreased by 61.7% and 75.5%, respectively, after 205 nm groove etching. The groove etching method greatly raises the temperature stability of the LWR, enabling Lamb wave filters to operate stably over a wider temperature range.

AlScN-on-SiC microelectromechanical Lamb wave resonators operating at high temperature up to 800 °C

We report on the experimental demonstration of aluminum scandium nitride (AlScN)-on-cubic silicon carbide (3C-SiC) Lamb wave resonators (LWRs) realized via microelectromechanical systems (MEMS) technology, operating at high temperature (T) up to T = 800 °C, while retaining robust electromechanical resonances at ∼27 MHz and good quality factor of Q ≈ 900 even at 800 °C. Measured resonances exhibit clear consistency and stability during heating and cooling processes, validating the AlScN-on-SiC LWRs can operate at high T up to 800 °C without noticeable degradation in moderate vacuum (∼20 mTorr). Even after undergoing four complete thermal cycles (heating from 23 to 800 °C and then cooling down to 23 °C), the devices exhibit robust resonance behavior, suggesting excellent stability and suitability for high-temperature applications. Q starts to decline as the temperature exceeds 400 °C, which can be attributed to energy dissipation mechanisms stemming from thermoelastic damping and intrinsic material loss originating from phonon–phonon interactions.

Adjustable effective electromechanical coupling of Lamb wave resonator using AlN/Sc0.096Al0.904N composite films

With the rapid development of fifth-generation communication technology, there are more and more 5 G frequency bands and their bandwidths differ. Therefore, many researchers devote themselves to the study of resonators with adjustable electromechanical coupling coefficient. In this paper, we apply composite films to the Lamb wave resonator with a double-IDT configuration to achieve adjustable effective electromechanical coupling coefficient (Keff 2) of the first symmetric mode. The experimental results show that with the increase of the thickness ratio, the series resonant frequency ( fs ) of the resonator decreases from 2.567 GHz to 2.333 GHz; and the parallel resonant frequency ( fp ) of the resonator decreases from 2.608 GHz to 2.396 GHz. The Keff 2 is adjusted from 3.82% to 6.32% and the Δf ( fp−fs ) is adjusted from 41 to 63 MHz by using the AlN/Sc0.096Al0.904N composite films with different thickness ratios. This method may be an efficient way to adjust the bandwidth of the filter to meet the needs of different frequency bands.

Concentration of Microparticles/Cells Based on an Ultra-Fast Centrifuge Virtual Tunnel Driven by a Novel Lamb Wave Resonator Array.

The µTAS/LOC, a highly integrated microsystem, consolidates multiple bioanalytical functions within a single chip, enhancing efficiency and precision in bioanalysis and biomedical operations. Microfluidic centrifugation, a key component of LOC devices, enables rapid capture and enrichment of tiny objects in samples, improving sensitivity and accuracy of detection and diagnosis. However, microfluidic systems face challenges due to viscosity dominance and difficulty in vortex formation. Acoustic-based centrifugation, particularly those using surface acoustic waves (SAWs), have shown promise in applications such as particle concentration, separation, and droplet mixing. However, challenges include accurate droplet placement, energy loss from off-axis positioning, and limited energy transfer from low-frequency SAW resonators, restricting centrifugal speed and sample volume. In this work, we introduce a novel ring array composed of eight Lamb wave resonators (LWRs), forming an Ultra-Fast Centrifuge Tunnel (UFCT) in a microfluidic system. The UFCT eliminates secondary vortices, concentrating energy in the main vortex and maximizing acoustic-to-streaming energy conversion. It enables ultra-fast centrifugation with a larger liquid capacity (50 μL), reduced power usage (50 mW) that is one order of magnitude smaller than existing devices, and greater linear speed (62 mm/s), surpassing the limitations of prior methods. We demonstrate successful high-fold enrichment of 2 μm and 10 μm particles and explore the UFCT's potential in tissue engineering by encapsulating cells in a hydrogel-based micro-organ with a ring structure, which is of great significance for building more complex manipulation platforms for particles and cells in a bio-compatible and contactless manner.

High figure-of-merit A1-mode lamb wave resonators operating around 6 GHz based on the LiNbO3 thin film

The first asymmetric mode (A1 mode) lamb wave resonator (LWR) with a resonant frequency of 6 GHz based on Z-cut lithium niobate (LN) films is presented. An asymmetric electrode structure with different-sized electrode pads in the center and edged regions has been proposed, which can be used to optimize the distribution of the electric field and decrease acoustic impedance mismatch to improve the target mode. Experiment results reveal that LWRs with an asymmetric electrode structure can successfully enhance the A1 mode, achieving a high effective electromechanical coefficient ( keff2 ) of 26%, a quality factor (Q) of 1123, and an excellent figure-of-merit (FOM = keff2 ∙Q) of 262. It demonstrates that asymmetric electrode structure provides a new way to suppress the spurious modes for LWRs and shows a great application prospect in wide-bandwidth and low-loss filters used in the sub-6 G frequency range.

The effect of busbar structure on Q factor enhancement and spurious mode suppression in Lamb wave resonators

Lamb wave resonators (LWRs) exhibiting high-quality factors and clean spectra demonstrate promising applications in RF communication and sensing. This paper discusses the relationship between the spurious mode, the quality factor, and the effective electromechanical coupling factor of resonators. When the resonant frequency of the spurious mode is slightly below the parallel resonant frequency (fp), the quality factor at fp (Qp) decreases dramatically. To enhance Qp and suppress the spurious mode, the LWRs with busbars including only the top electrode (non-overlap busbars) and the LWRs with busbars incorporating both top and bottom electrodes (overlap busbars) are designed and fabricated. The LWR with 12 μm-wide overlap busbars exhibits a notable enhancement in Qp, elevating it from 553.76 to 1488.17 and suppresses the spurious mode simultaneously. This research introduces a promising approach to suppress the spurious mode and enhance the quality factor of Lamb wave resonators, thereby holding great potential for applications in sensors and mobile communication.

Particle distributions in Lamb wave based acoustofluidics

Acoustic streaming enabled by a Lamb wave resonator (LWR) is efficient for particle trapping and enrichment in microfluidic channels. However, because Lamb waves combine the features of bulk acoustic waves and surface acoustic waves, the resulting acoustic streaming in the LWR occurs in multiple planes, and the particle flow behavior in this acoustofluidic system is largely unknown. Reported here are numerical simulations and laboratory experiments conducted to investigate the boundary conditions for particle motion inside a microvortex induced by an LWR. Upon dynamic capture, the particles’ trajectories become orbital paths within an acoustic vortex. The suspended particles encounter two distinct acoustic phenomena, i.e., the drag force resulting from acoustic streaming and the acoustic radiation force, which exert forces in various directions on the particles. When the acoustic radiation force and the fluid drag force are dominant for large and small particles in a mixed solution, respectively, the large particles reside within the vortex while the small particles remain at its periphery. Conversely, when the acoustic radiation force is dominant for both types of particles, the distribution pattern is reversed.

Acoustoelastic characterization of aluminum plates using zero group velocity Lamb modes

Acoustoelasticity, a characteristic of material anharmonicity, gives rise to a link between wave propagation velocity and the stress state in materials. Ultrasonic techniques to monitor this coupling, particularly with high sensitivity and in a noncontact manner, can have widespread application both in the quantification of applied and residual stress and in the characterization of nonlinear material behavior through measurement of higher order elastic constants. Here, we use a laser ultrasonic technique to excite and detect zero group velocity (ZGV) Lamb wave resonances in aluminum plates under uniaxial loading. A laser line source is used to excite these resonances at different orientations with respect to the applied load and the signals are detected using an interferometer. The effects of stress and source orientation on ZGV resonance frequencies are validated using the theory of acoustoelastic Lamb wave propagation. In addition, a model-based inversion technique is used to extract Murnaghan’s third-order elastic constants from measurements of the stress dependence of the first two ZGV modes generated parallel and perpendicular to the applied load. Laser generation and detection of ZGV resonances is shown to be an effective and powerful approach for the noncontact and nondestructive acoustoelastic characterization of elastic waveguides.

SONAR target classification with complex-valued neural networks

Popular acoustic signal processing techniques analyze acoustic color, which is a magnitude representation of a frequency spectrum. This paradigm allows for easy visualization of results and simpler models at the cost of throwing out phase information. Analysis and modeling of complex-valued data does have inherent difficulty from the nature of complex numbers. Optimization on the complex field requires alternate partial derivative definitions to circumvent consequences of the Cauchy–Riemann equations regarding holomorphic functions. To make use of phase information, we demonstrate classifier model optimization with complex-valued parameters on data with both magnitude and phase components and show how complex neural networks yield marked improvements over similarly shaped real-valued networks in both classification accuracy and generalization ability. We apply these techniques to small target SONAR with simulated Lamb wave resonance signals for hollow spheres, differentiating between different material classes. [Research funded by the DoD Navy (NEEC) Grant No. N001742010016.]

Acoustoelastic characterization of plates using zero group velocity Lamb modes

Acoustoelasticity, a characteristic of material anharmonicity, gives rise to a link between wave propagation velocity and the stress state in materials. Ultrasonic techniques to monitor this coupling, particularly with high sensitivity and in a noncontact manner, can have widespread application both in the quantification of applied and residual stress and in the characterization of nonlinear material behavior through measurement of higher order elastic constants. Here, we use a laser ultrasonic technique to excite and detect zero group velocity (ZGV) Lamb wave resonances in aluminum plates under uniaxial loading. A laser line source is used to excite these resonances at different orientations with respect to the applied load, and the signals are detected using an interferometer. The effects of stress and source orientation on ZGV resonance frequencies are validated using the theory of acoustoelastic Lamb wave propagation. In addition, a model-based inversion technique is used to extract Murnaghan's third-order elastic constants from measurements of the stress dependence of the first two ZGV modes generated parallel and perpendicular to the applied load. Laser generation and detection of ZGV resonances is shown to be an effective and powerful approach for the noncontact and nondestructive acoustoelastic characterization of elastic waveguides.

Study on the impact of the resonant cavity and lateral acoustic edge reflector for AlSc0.095N-based S0 mode Lamb-wave resonators

In this paper, the impact of the resonant cavity and lateral acoustic edge reflector on the performance of the S0 mode Lamb-wave resonators based on Aluminum nitride film doped with scandium concentration of 9.5 % (AlSc0.095N) were systematically studied. Through the theoretical analysis and experimental verification, we found that the Q value of the resonator can be improved by defining a miniaturized resonant cavity due to the enhanced acoustic reflection effect at the anchor boundary. The effect of lateral reflection boundary width on the spurious modes, Q values, and electromechanical coupling coefficient (k2eff) of the resonators was analyzed. In addition, the k2eff and Q values of the interdigitated transducer (IDT)-IDT resonators are higher than those of the IDT-Floating resonators, due to the larger electromechanical conversion efficiency and smaller interface loss. The experimental results show that the Q and k2eff values of the optimized IDT-Floating and IDT-IDT resonators reach 853, 1.70 % and 1362, 2.69 %, respectively, meanwhile, they have clean spectrums.

Contribution of Ribbon-Structured SiO2 Films to AlN-Based and AlN/Diamond-Based Lamb Wave Resonators.

New designs based on S0 Lamb modes in AlN thin layer resonating structures coupled with the implementation of structural elements in SiO2, are theoretically analyzed by the Finite Element Method (FEM). This study compares the typical characteristics of different interdigital transducer (IDTs) configurations, involving either a continuous SiO2 cap layer, or structured SiO2 elements, showing their performance in the usual terms of electromechanical coupling coefficient (K2), phase velocity, and temperature coefficient of frequency (TCF), by varying structural parameters and boundary conditions. This paper shows how to reach temperature-compensated, high-performance resonator structures based on ribbon-structured SiO2 capping. The addition of a thin diamond layer can also improve the velocity and electromechanical coupling coefficient, while keeping zero TCF and increasing the solidity of the membranes. Beyond the increase in performance allowed by such resonator configurations, their inherent structure shows additional benefits in terms of passivation, which makes them particularly relevant for sensing applications in stern environments.

Lamb Wave Resonator for UV Photodetection and Impact of Induced Piezopotential on Schottky Barrier Height Toward Enhanced Sensitivity

In the present work, a Lamb wave resonator based UV photodetector is fabricated using ZnO thin film grown on SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si membrane. Electrical studies of the fabricated ZnO/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si Lamb wave resonator device reveals a change in current (I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">ON</sub> /I <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">OFF</sub> ~ 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</sup> ) upon UV illumination (λ = 365 nm, Intensity = 0.2 mW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) with a responsivity (56.34 A/W), detectivity (6.5×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">12</sup> Jones) and response and recovery time of 280 ms and 25 ms respectively. Frequency response of the fabricated Lamb wave device demonstrates the presence of multiple modes corresponding to symmetric and anti-symmetric modes and their higher harmonics. It is observed that the highest mode (A <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> ) of Lamb wave resonator (192.27 MHz) shows maximum frequency shift (535 kHz(mW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> ) and very high sensitivity of 2.78 × 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> ppm(mW/cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> ) <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> . In addition, various mechanism involved in the photodetection are being discussed. Especially, the effect of induced piezo-potential on Schottky barrier height in the acoustic device and corresponding enhancement in the photodetector performance is discussed. It is observed that Lamb wave device with Schottky contact type IDTs shows higher UV detection performance as compared to the that with Ohmic type IDTs contact. This effect can be explained using effect of induced piezo-potential on Schottky barrier height while acoustic wave is propagating in the piezoelectric substrate of the SAW devices. Thus, the study demonstrates the high potential of indigenously developed Lamb wave resonator based UV photodetector (ZnO/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /Si) for civil and military field applications.