High figure-of-merit A1-mode lamb wave resonators operating around 6 GHz based on the LiNbO3 thin film

Abstract

The first asymmetric mode (A1 mode) lamb wave resonator (LWR) with a resonant frequency of 6 GHz based on Z-cut lithium niobate (LN) films is presented. An asymmetric electrode structure with different-sized electrode pads in the center and edged regions has been proposed, which can be used to optimize the distribution of the electric field and decrease acoustic impedance mismatch to improve the target mode. Experiment results reveal that LWRs with an asymmetric electrode structure can successfully enhance the A1 mode, achieving a high effective electromechanical coefficient ( keff2 ) of 26%, a quality factor (Q) of 1123, and an excellent figure-of-merit (FOM = keff2 ∙Q) of 262. It demonstrates that asymmetric electrode structure provides a new way to suppress the spurious modes for LWRs and shows a great application prospect in wide-bandwidth and low-loss filters used in the sub-6 G frequency range.