Ion Focusing Effect Research Articles

TOF-ICISS study of surface damage formed by Ar ion bombardment on Si(100)

The surface damage formed on a clean Si(100)-2 × 1 surface by low-energy Ar ion bombardment has been studied in situ using the impact collision ion scattering spectroscopy (ICISS) method and the time-of-flight (TOF) technique. The Ar ion energy was 1 keV and the ion doses were in the range of 10 14-10 15ions/cm 2. Channeling and focusing effects were observed very clearly on a clean and well-ordered surface. With the increase of the Ar ion dose, such channeling and focusing effects gradually disappear. The annealing process of the surface damage was also investigated.

Molecular ion reflection from single crystals: Orientation dependence

Abstract Reflection of 30 keV molecular ions N2 + from a copper single crystal was studied experimentally in a series of experiments performed at the Moscow State University in 1982–1987. A good correspondence between maxima (minima) of probability of nondissociative reflection and presence of surface semichannels (infinite deeps) on the crystal face is found. In the paper present state of the theory of molecular ion interaction with solids as well as relevance of the orientation dependence regularities to the molecular ion focusing effects and to experiments with polycrystalline targets are also discussed.

Effect of surface semichanneling on energy distributions of molecular ions reflected from single-crystal surface

Regularities in the energy distributions of molecular nitrogen ions reflected from (100)Cu crystal face are studied. The half-widths (FWHM) of the energy distributions of the reflected ions have been found to vary strongly near aligned orientations of the target with respect to the bombarding ion beam. A relationship has been found between the survival fraction of reflected molecular ions and the effect of ion focusing in surface semichanneling.

Effect of surface semichanneling on energy distributions of molecular ions reflected from single-crystal surface

Regularities in the energy distributions of molecular nitrogen ions reflected from (100)Cu crystal face are studied. The half-widths (FWHM) of the energy distributions of the reflected ions have been found to vary strongly near aligned orientations of the target with respect to the bombarding ion beam. A relationship has been found between the survival fraction of reflected molecular ions and the effect of ion focusing in surface semichanneling.

Ion focusing and blocking effects of surface scattering at a grazing angle

The effects of ion focusing and blocking on surface scattering at a grazing angle is investigated by computer simulation, where primary ions are bombarded along the semichannel direction. When varying the angle of incidence, the ion focusing effect is clearly observed in reflection coefficients at the specular reflection.

Ion focusing effects on total reflection coefficient near the semichannel direction

Abstract A simple analytical treatment of trajectory focusings of semichanneled ions is developed. and a new semichanneling effect in the azimuthal angle-dependence of the reflection coefficient is theoretically predicted.