We fabricated the first solid, mechanically robust inverse opal photonic crystals that diffract in the deep ultraviolet (UV) spectral region. These photonic crystals are fabricated by self-assembling <140 nm diameter monodisperse polystyrene nanoparticles into face centered cubic 3D close-packed structures on fused silica microscope slides in the presence of tetraethyl orthosilicate via a vertical deposition method. Tetraethyl orthosilicate condenses in the nanoparticle interstices during self-assembly, immobilizing the polystyrene nanoparticles in an SiO2 matrix. Removal of the polystyrene nanoparticles using piranha solution yields a stable SiO2 inverse opal structure that Bragg diffracts in the deep UV at <245 nm. We measured the UV–vis transmission, diffraction of a collimated deep UV white light source, and diffraction of 229 nm laser light in order to characterize the deep UV optical performance of these photonic crystals. We measured a maximum light attenuation of ∼98% at the Bragg condition, calcu...