The integral equation method is one of the most successful computational models for microwave devices or integrated circuits in planar layered media. However, the efficient and accurate evaluation of the associated Green’s function consisting of Sommerfeld integrals (SIs) is still a remaining challenge. To mitigate this difficulty, this work proposes a spatial domain rational function fitting technique (RFFT) for SIs so that the approximation accuracy is controllable. In conjunction with an adaptive sampling strategy, the proposed RFFT minimizes the orders of rational functions, and the resultant SI evaluation efficiency is optimized. In addition, we investigate the semi-analytical singularity treatment for the rational expression of SIs in method of moment (MoM) implementation. Extensive simulation of representative planar devices validates the correctness of the proposed method and demonstrates its superior performance over conventional SI approximation methods.