<p class="lead">The objective of this research is to design ultra-low power Hybrid Micro Energy Harvester (HMEH) circuit using hybrid inputs of radio frequency (RF), thermal and vibration for biomedical devices. In the HMEH architecture, three input sources (RF, thermal and vibration) are combined in parallel to solve the limitation issue of a single source energy harvester and to improve the system performance. Energy will be scavenged from the human body for thermal and vibration sources by converting directly temperature difference and human movement to electrical energy. The inputs are set to 0.02V and 0.5V for thermal and vibration respectively with the frequency of 1 kHz. Meanwhile, RF source is absorbed from radio wave propagation in our surrounding. For this work, the frequency is set to 915MHz and the output voltages for input ranges of-20dBm to 5dBm are recorded. The performance analysis of the HMEH is divided into two; thermal and vibration harvester circuit and RF harvester circuit. These proposed HMEH circuits are modeled, designed and simulated using PSPICE software. Vibration produces AC input and will be converted to DC using a rectifier. A comparator is used to compare the two sources (thermal and vibration) and boost converter is proposed to step-up these small input sources. Meanwhile, due to RF large frequency, the voltage multiplier is practical for both rectify and step up the input instead of the boost converter. LC resonant network is used to amplify low ambient input of RF passively before it goes to 4–stages voltage multiplier. The proposed HMEH able to achieve the output ranges of 2.0 to 4.0V with 1MΩ load. The results obtained in this research work shows that the proposed design able to produce sufficient voltage for biomedical application requirement which lies between 2.0–4.0 V from the ambient input of 0.02 to 0.5V for thermal and vibration while-9dBm for RF signal.</p>