AbstractAn approximate solution of the inverse problem of the theory of elasticity is considered in terms of distortions for a crystalline plate with a one‐dimensional inhomogeneous distribution of point defects. It is shown that near the plate surface the distribution function of quasi‐plastic strains can be represented as a linear combination of distortion tensor components, up to second‐order infinitesimals. The errors of determining the distribution function using various approximations to a solution of the corresponding direct boundary‐value problem are evaluated. The stability of the solution is demonstrated by reconstruction of the distribution function using a set of simulated topographic images.