The increase in the indium mole fraction in the quantum well of pHEMT heterostructures with donor-acceptor doping causes an increase in the 2DEG concentration from 2.2· 1012 cm-2 to 3.9· 1012 cm-2 and a decrease in mobility from 7900 cm2V-1s-1 to 7500 cm2V-1s-1 at room temperature. The temperature dependencies of 2DEG mobility show that the deformation potential scattering grows at increment of indium mole fraction in quantum well. Absolute values of the deformation potential are approximately two times smaller than the widely used values and increases with increasing of indium mole fraction.
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