A new Ti-16Zr-13Nb-2Sn superelastic film incorporating β-stabilizing and highly biocompatible elements was elaborated by magnetron sputtering. The morphological, crystallographic and microstructural characteristics of the obtained films were studied by scanning electron microscopy, atomic force microscopy, X-ray diffraction, and transmission electron microscopy. Superelastic response of the film was investigated at local scale by nanoindentation using both spherical and Berkovich indenters. The sputter-deposited film revealed nanograined β microstructure with preferential growth orientation along [110] direction and excellent superelastic recovery at room temperature. Special attention was paid to the indenter geometry influencing reliable evaluation of the superelastic nature of the film. Evolution of the deformation mechanisms during nanoindentation at increasing depths was rationalized by the calculated representative strain beneath the indenting tips and is discussed in this work.