Advanced CMOS device technology for a high-performance system-on-a-chip (SoC) LSI is firstly discussed by using benchmarking of published data [1-6], mainly-highlighted by a FinFET and beyond, as shown in Fig. 1. To enhance the performance of FinFET devices, a low-voltage operation less than 0.7 V with smaller variability of characteristics is highly required rather than an enlargement of channel width (Weff / Wfootprint). Here, Weff and Wfootprint mean effective and footprint channel widths. After that, higher-mobility channel devices are strongly needed with superimposed manner having an InGaAs high-electron mobility transistor (HEMT), InGaAs quantum well (QW), InAs QW, and InGaAs MISFET having an appropriate smaller bandgap. In this case, smooth thin-channel is promising to suppress the variability of characteristics. Therefore, an atomically-consistent semiconductor material such as a graphene and transition-metal di-chalcogenide (TMDC) are favorable candidates. Although the graphene has a zero band-gap, the TMDCs have superior properties such as an appropriate bandgap, for example, 1.2 eV in single-layer MoS2 film. Furthermore, they also yield higher mobility, transparent and mechanical robustness. In our experiments, a higher Hall mobility of electron with 28 cm2/Vs in 10-nm-thick MoS2 film is achieved even by using a magnetron sputtering process with MoS2 target for channel formation [7]. This might be caused by a suppression of carrier scattering due to contaminations such as alkali metals of sodium and potassium, impurities, crystal defects, and film roughness in the MoS2 film. In conclusion, the TMDC-channel MISFET could be suitable for high-performance SoC LSIs as not only advanced CMOS devices but also monolithic transistor to enhance the functionalities per chip area. Furthermore, it has a strong possibility achieving not only more-Moore and more-than-Moore but also more-comfort properties for high-performance human-interface (I/F) devices such as a transparent and flexible display. Acknowledgements This work was partially supported by JSPS Grant-in-Aid for Scientific Research on Innovative Areas: Grant Number 26105014, and the Center of Innovation Program from Japan Science and Technology Agency, JST.
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