The patterned FeNi nanoparticle films with strip width 60µm were prepared by electric field-assisted deposition technique. Application of electric field drove the accelerating deposition of the condensed nanoparticles, promoting the formation of the films with high stacking density. Besides the excellent soft magnetic characteristics, the samples showed an obvious enhancement of in-plane uniaxial magnetic anisotropy when they were annealed in vacuum environment at proper temperatures. The increase of in-plane uniaxial magnetic anisotropy, which is due to the release of stress with increasing temperature, is also confirmed by scanning microwave permeability spectra in GHz range. The experimental results imply that optimization of in-plane uniaxial magnetic anisotropy is particularly attractive for the application of electric field deposited soft magnetic nanoparticle films in the high-temperature processing electromagnetic devices.