Abstract
Co61Fe26Si13 (CoFeSi) thin films were deposited on MgO(0 0 1) substrates by magnetron sputtering and were annealed at different temperatures (Ta). X-ray diffraction revealed that the crystal structure varies from the as-deposited amorphous phase to the cubic phase when Ta = 800 °C, indicating the re-crystallization process after annealing treatment. The static magnetic property measurements show a gradually four-fold cubic anisotropy dominating the magnetic anisotropy with the increasing Ta. The ferromagnetic resonance technique based on vector network analyzer was utilized to analyze the dynamic magnetic properties. CoFeSi film annealed at 600 °C presents an obvious in-plane uniaxial magnetic anisotropy, and it presents a low effective damping constant of around 0.011 with a natural resonance frequency of around 3.4 GHz. However, the CoFeSi film annealed at 800 °C showed a strong cubic magnetocrystalline anisotropy and full-in-plane-direction workable natural resonance frequency at around 2.5 GHz.
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