A high-quality alpha-Ga2O3 thin film was grown on an Al2O3 single-crystal thin-wall channel structure. Alpha-Ga2O3 crystals are grown with a 3-fold symmetry template provided by the Al2O3 surface, which forms domain boundaries from the small rotation of the mosaic structure. The anti-phase domain (APD) was confirmed by convergent-beam electron diffraction (CBED), and it is believed to be developed at the stage of nucleation based on the unstable, or uneven Al-O bonding on the Al2O3 surface. The in-phase domain and the APD boundaries exhibit bright contrast in ADF, which originates from a local strain of crystallographic rotation and not from the local elemental fluctuations of gallium. As confirmed by CL measurement in TEM, the bandgap energy of alpha-Ga2O3 is inferred to be 5.56 eV with a near band edge transition of ~ 223 nm. Even though the heights and positions of peaks vary slightly from area to area, 4 distinct luminescence peaks and a long tail of wavelength are commonly observed throughout the crystal. 2-dimensional mapping with the specific wavelength window reveals a clear difference between the inside domain, in-phase domain boundary, and APD boundary. A luminescence peak of distinct 350 nm was observed at the APD boundary. Misorientation between domains was found, which leads to an in-plane mismatch in crystallographic lattices at the boundary when the two misoriented domains grow and the growth front merges. The imperfect lattice structure at the boundary is believed to create strain and intermediate states.
Read full abstract