A possibility of synthesizing the SnO 2–Au nanocomposite by the successive ionic layer deposition (SILD) method is demonstrated in this article. It is shown that as a result of successive treatments in solutions of Sn(OH) x F y Cl z and HAuCl 4 the SnO 2–Au nanocomposite with a Sn/Au ratio varying from 1:1 to 6:1 can be formed on the surface of substrates. It is found that the value of this ratio depends on the concentration of F ions in solution. The gold in the indicated composite is in the metallic state. The growth of the SnO 2–Au composite takes place through the formation of 3-D precipitates, which form a continuous film after 13 deposition cycles. As a result, a layer with averaged thickness of up to 20 nm is formed on the surface. Nanocomposite films, even after treatment at an annealing temperature T an ∼ 600 ° C, have finely dispersed structure. The size of the Au clusters incorporated in the SnO 2 matrix is in the range from 3 to 15 nm. Gas sensing characteristics of SnO 2 films modified by SnO 2–Au nanocomposites are discussed as well. It is shown that surface modification by SnO 2–Au nanocomposites can be used for improving operating characteristics of conductometric SnO 2-based gas sensors.
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