To understand the characteristics of damage in Ni by low-energy deuterium-ion irradiation, TEM observation and SIMS analysis have been carried out. Because of strong binding between an interstitial and a deuterium atom, nucleation of interstitial loops by deuterium-ion irradiation (0.5 to 5.0 keV) is enhanced. The density and the size of the loops increase with irradiation and the dislocation density exceeds 10 16/m 2 in the region where deuterium ions are injected. In the irradiation at room temperature, immobile vacancies, which act as good traps for deuterium atoms, are accumulated. At 300°C, however, dislocation loops and cavities are formed. Irradiation with 0.5 keV ions produces little displacement damage but platelet-like deuterium clusters are formed due to the localization of the injected deuterium atoms.
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