IEEE Control Systems Research Articles

IEEE Control Systems Society and IFAC [President's Message

IEEE Control Systems Society and IFAC [President's Message

IEEE Control Systems Society Enrollment [From the Editor

IEEE Control Systems Society Enrollment [From the Editor

Iron Ring [From the Editor

The author uses his memory of the University of Toronto held 'iron ring' ceremony held for his graduating class as a basis to reflect on the responsibilities associated with this profession. Called the Ritual of the Calling of an Engineer, the ceremony, which dates back to 1922, was originally authored by Rudyard Kipling. The ceremony "was instituted with the simple end of directing newly qualified Canadian engineers toward a consciousness of their profession and its social significance, and indicating to more experienced engineers their responsibilities in welcoming and supporting the newer engineers when they are ready to enter the profession." The passing of the 30th anniversary of the US space shuttle Challenger accident might act as a similar reminder for all engineers to again reflect on the responsibilities associated with this profession. This reflection might be especially important for members of the IEEE Control Systems Society, given the importance of feedback control and autonomy in ensuring the performance and safety of the critical infrastructure and systems that are used routinely. For others in the field, this obligation might just simply be a reminder to do our job well and correctly, check your work and the work of others, speak up if there is a problem, and consider that just because we can do something, it doesn't mean we should. These issues are becoming increasingly important given the complexity of systems that are being created, the mixtures of hardware and embedded software with numerous possible hidden modes/behaviors, and the competitive environment in which many engineers work. Something to consider is that when an application crashes on your phone, you might have to reboot, but there is usually not much harm done. But if a safety-critical system is rolled out too early to meet deadlines without sufficient testing, then the results of a failure could be much more catastrophic. Thus, it is the duty and responsibility of all practicing engineers to recognize the importance of these consequences and to uphold these standards.

Minutes of the IEEE Control Systems Society Board of Governors Meeting [CSS Business

Minutes of the IEEE Control Systems Society Board of Governors Meeting [CSS Business

Control and Biology [President's Message

The author's research interests lie at the intersection of life sciences and control systems. This column reflects on the very broad and growing participation of the IEEE Control Systems Society (CSS) at this intersection of disciplines. The author discusses how this interface is of mutual benefit to both disciplines (much as the author's colleague Jorg Stelling and he did, more extensively, in a review paper a few years ago [F.J. Doyle III, and Stelling, "Systems interface biology," J. Roy. Soc. Interface, vol. 3, pp. 603–616, 2006.]).

The Evolving Landscape of IEEE Control Systems Society Publishing [President's Message

The Evolving Landscape of IEEE Control Systems Society Publishing [President's Message

Updates on Technical Activities [Technical Activities

This report was presented to the IEEE Control Systems Society (CSS) Board of Governors (BoG) meeting. The following technical activities in 2016 were assisted by CSS funding

Minutes of the IEEE Control Systems Society Board of Governors Meeting [CSS Business

Minutes of the IEEE Control Systems Society Board of Governors Meeting [CSS Business

New Members of the Editorial Board [Publication Activities

Lists new members of the IEEE Control Systems editorial board.

IEEE Control Systems Technical Field Award Acceptance Speech [Awards

Presents the acceptance speech for the recipient of the CS Society IEEE Field Award in Control.

Modeling for Control [About This Issue

Summarizes the articles included in this issue of the publication.

The Improvement Magnet Plate on a Reticle Stage of Lithography Equipment through Analyzing Adhesive and Roughness of Plate

Semiconductor lithography scanners are extremely complex equipment which is used to manufacture IC(Intergrated Circuit). Moore's law, which states that the computing power per chip doubles every one and a half to two years, has consistently held for four decades. [1] The exposure system in semiconductor has been rapidly developed based on the Moore's law. Most semiconductor manufacturers have been using ASML scanner for exposure on wafers. The reticle stage of ASML scanner exists over magnet plates. The electric currents are supplied to the coil of the inside magnet，the reticle stage can move forward and backward by Fleming's left hand rule. [3] The reticle stage is synchronized with wafer stage of movement. At that time, scan speed is very fast, reticle stage scan velocity is about 2.4m/sec, in addition acceleration reaches to 9G. So the conditions are very harsh to stage. However, with current technology, we cannot manufacture the whole mass of magnet as long as long stroke of reticle stage. (approximately 2.4m) So they manufacture it on plate by attaching 600mm pieces of magnet. Over time, the magnet plates attached to the main frame are getting weak. At the end of magnet which is the weakest point can be easily cracked because it is changing of flux density in magnet plate. We analyze bonding method between magnet and plate. In addition, we tested it on a different roughness for the plate. Through the change of the material and roughness, we could improve prevent the plate from cracking. In this paper, we propose how to protect broken magnet by changing the material of adhesive and roughness of plate. As a result, we can expect to increase stability in the magnet plate on a reticle stage by more than 10%. [1] G. E. Moore, “Cramming more components onto integrated circuits,” Electron. Mag., vol. 38, no. 8, pp. 4–7, 1965.[2] Hans Butler, “Position control in lithographic equipment”, IEEE Control Systems Magazine, October 2011[3] Kenjō, Takashi, and Shigenobu Nagamori. Permanent-magnet and brushless DC motors. Vol. 18. Oxford University Press, USA, 1985. Figure 1

An Experience and a Suggestion [Historical Perspectives

This column by William S. Levine, who was president in 1990, is a continuation on a series of remembrances from former presidents of the IEEE Control Systems Society.

New Associate Editors for IEEE Control Systems Magazine [Publication Activities

Lists new associate editors for this issue of the publication.

Report to the IEEE Control Systems Society Technical Activities Board [Technical Activities

Presents an update on IEEE Control Systems Society Technical Activities Board activities.

An Update on the IEEE Control Systems Society Technical Activities Board [Technical Activities

An Update on the IEEE Control Systems Society Technical Activities Board [Technical Activities

IEEE Control Systems Magazine Operations from 2012 to 2014 [From the Editor

IEEE Control Systems Magazine Operations from 2012 to 2014 [From the Editor

Minutes of the IEEE Control Systems Society Board of Governors Meeting [CSS Business

Minutes of the IEEE Control Systems Society Board of Governors Meeting [CSS Business

Almost Six Decades in Control Engineering [Historical Perspectives

Drek P. Atherton, emeritus professor at the University of Sussex and 1995 IEEE Control Systems Society president, shares many of his experiences as a control engineer.

CSS governance: Theory and practice[President's Message

It is noted that a theory-to-practice gap exists in education and research. It also exists in the timely reporting on society governance. For example, this article appears in the August issue of IEEE Control Systems Magazine, immediately before the IFAC World Congress in South Africa; however, it is written in early April. The amount of IEEE Control Systems Society (CSS) governance that occurs in the April to August, four-month interval is quite large. In theory, I would be reporting these matters in this August message; in practice, it is not possible.