Solid lubricants are crucial for industries operating at temperatures beyond 300 ºC, where liquid lubricants encounter limitations. Diamond-like carbon (DLC) films, known for exceptional solid lubrication and mechanical properties, need higher thermal stability for effective use in high-temperature applications. This study focuses on developing DLC films with the required thermal stability and solid lubricating properties. Hydrogen-free and hydrogenated DLC films were deposited utilizing deep oscillation magnetron sputtering (DOMS). Thermal characterizations revealed both films surpassed 500 ºC in thermal stability, rendering them suitable for high-temperature tribological applications. However, the hydrogenated DLC film exhibited superior solid lubricating properties, achieving an ultra-low friction coefficient below 0.05 at elevated temperatures, along with enhanced wear resistance, while effectively protecting its counterpart up to 500 ºC.