This paper presents the experimental and modeling results on microwave (∼37 GHz) investigations of SrTiO3 and (Ba,Sr)TiO3 ferroelectric films at high levels of microwave power. The ferroelectric film planar varactors were incorporated into the fin-line. The threshold microwave power leading to the appreciable variation in the microwave response of the tunable structure was determined. Thermal conditions of the varactors under test were analyzed. Thermal time constant and overheating of the ferroelectric films were estimated. The dependence of the varactor overheating on geometry was studied. Design optimization possibilities for the varactors in high microwave power applications are discussed.