High-performance Surface Acoustic Wave Research Articles

A high-performance surface acoustic wave sensing technique.

We present a superheterodyne-scheme demodulation system that can detect the amplitude and phase shift of weak radio frequency signals with extraordinarily high stability and resolution. As a demonstration, we introduce a process to measure the velocity of the surface acoustic wave using a delay-line device from 30K to room temperature, which can resolve <0.1 ppm velocity shift. Furthermore, we investigate the possibility of using this surface acoustic wave device as a calibration-free, high sensitivity, and fast response thermometer.

Experimental Study of Transverse Mode Suppression on Wideband Hetero Acoustic Layer Surface Acoustic Wave Resonator.

Transverse mode suppression is a great challenge for high-performance surface acoustic wave (SAW) resonators. Conventional methods work well on narrowband resonators, but their performances on wideband resonator have not been demonstrated. In this article, we give an in-depth study on the transverse mode suppression of wideband resonators using 11° YX-LiNbO3 (LN)/70 °Y90°X -quartz (Qz) hetero acoustic layer structure as a platform. Two groups of design, including new dummy electrode and zigzag shape apodization, are proposed. The measured results show that the shape of the dummy electrode is not the dominant factor to affect the transverse mode. The proposed zigzag shape apodization can effectively suppress the transverse, at the same time maintain the quality ( Q ) factor at the same level with the normal type. Additionally, stronger suppression ability can be realized with a tiny tradeoff of Q -factor.

Modeling for High-Frequency Spurious Responses in Incredible High-Performance Surface Acoustic Wave Devices.

To ensure that surface acoustic wave (SAW) filters fulfill the requirements of Carrier Aggregation (CA) applications, the development of modeling tools that can forecast and simulate high-frequency spurious responses has been necessary. This paper presents an advanced methodology for extending the coupling-of-modes (COM) model to obtain precise modeling of the high-frequency spurious responses of incredible high-performance surface acoustic wave (I.H.P. SAW) devices. The extended COM (ECOM) model is derived by modifying the conventional COM model and extending it accordingly. The parameters used in this model are determined through numerical fitting. For validation, firstly, the ECOM model is applied to a one-port synchronous I.H.P. SAW resonator, and the simulation and measurement results match. Then, the structural parameters of the ECOM model are varied, and the accuracy of the model after the structural parameters are varied is verified. It is demonstrated that this model can be applied to the design work of SAW filters. Finally, the ECOM model is applied to the design of the I.H.P. SAW filter based on a 42°YX-LiTaO3 (LT)/SiO2/AlN/Si structure. By using this method, the I.H.P. SAW filter's high-frequency spurious response can be predicted more accurately.

High performance SAW resonator with spurious mode suppression using double-layer electrode transverse modulation

This work aims to solve the problem of tradeoff between various properties and spurious mode suppression in surface acoustic wave (SAW) resonators. A high-angle rotated Y-cut LiNbO3 (LN)/SiO2/Si multilayered structure was proposed to balance the electromechanical coupling coefficient (K 2) and temperature coefficient of frequency (TCF), and the propagation characteristics of Rayleigh mode were simulated by the finite element method. For the widely existing spurious modes, the shear-horizontal wave and longitudinal modes were eliminated by optimizing the cut angle of LN and electrode thickness, and a method of double-layer electrode transverse modulation was proposed to suppress the transverse modes. This method reduces the mass loading effect by replacing the electrode from Cu to Cu/Al. Moreover, the Al thicknesses in different regions are changed to perform the transverse modulation, and thus a widespread suppression of transverse modes is achieved by exciting the piston mode and enhancing the energy constraint, with a significant improvement on quality factor at the resonance frequency. Eventually, the spurious-free SAW resonator has the K 2 of 9.5% and the TCF close to zero. This work provides a feasible scheme for the design of high performance SAW resonators with spurious mode suppression.

Designed Structures of Interdigital Electrodes for Thin Film SAW Devices.

This paper studied the impact of the microstructure of interdigital electrodes on the performance of surface acoustic wave (SAW) resonators and proposed an innovative piston, dummy finger and tilt (PDT) structure, which was then applied to the GLONASS L3 band filters. Through the adoption of 3D finite element simulation (FEM), photolithography, and testing on an incredible high-performance surface acoustic wave (I.H.P. SAW) substrate, it is concluded that the total aperture length is 20T (T is period), resulting in a more optimal resonator performance; changing the width and length of the piston can suppress transverse modes spurious, but it does not enhance impedance ratio; to further improve the quality of the SAW resonator, the proposed PDT structure has been experimentally proven to not only effectively suppress transverse modes spurious but also possess a high impedance ratio. By utilizing a PDT structure within a "T + π" topology circuit, we successfully designed and manufactured a GLONASS L3 band filter with a bandwidth of 8 MHz and an insertion loss of 3.73 dB. The design of these resonators and filters can be applied to the construction of SAW filters in similar frequency bands such as BeiDou B2 band or GPS L2/L5 band.

Phononic crystals for Love waves based on thin-film lithium niobate

This paper presents a type of surface acoustic wave (SAW) phononic crystals based on thin-film lithium niobate (LN). They are created by forming micro-pillar or micro-well structures on the LN, resulting in significant Rayleigh and Love SAW bandgaps. Especially for Love waves, they offer an irreplaceable advantage because they overcome the inability of conventional electrodes to reflect Love waves effectively. This enables the creation of high-quality, compact, high electromechanical coupling coefficient, stable and power-resistant acoustic resonators based on Love waves, potentially leading to a new generation of high-performance SAW filters and sensors. In this paper, we demonstrate the feasibility of such phononic crystals using xy-cut LN-on-SiC. However, it is worth noting that other piezoelectric materials such as lithium tantalate can also be used instead of LN, and high acoustic velocity substrates such as sapphire and diamond can be substituted for SiC.

LiNbO3 Surface Acoustic Wave Resonators with Large Effective Electromechanical Coupling

This paper reports an LNO surface acoustic wave (SAW) resonator based on a shear horizontal mode with high operating frequency over 3 GHz, large electromechanical coupling of 33.54%, Q factor of 380, and a relatively good figure of merit (FOM) of 127. Combing crystal-ion-slicing (CIS) technology with a room temperature bonding method, a 4-inch single crystalline LNO thin film on silicon is prepared successfully. The influence of damaged LNO film on crystalline quality and SAW performance is comprehensively analyzed. After totally removing the damaged layer, the electromechanical coupling and Q factor is significantly improved. The high-performance SAW resonator possesses the potential to meet the requirements of SAW filters for the fifth-generation (5G) communication in terms of high frequency, large bandwidth, and a high-quality factor.

Dual-Passband SAW Filter Based on a 32°YX-LN/SiO2/SiC Multilayered Substrate.

To meet the demands of highly integrated and miniaturized radio frequency front-end (RFFE) modules, multi-passband filters which support multi-channel compounding come to the foreground. In this work, we proposed a new design of a dual-passband surface acoustic wave (SAW) filter based on a 32°YX-LiNbO3 (LN)/SiO2/SiC multilayered structure. The filter is of a standalone ladder topology and comprises dual-mode resonators, in which the shear horizontal (SH) mode and high-order SH mode are simultaneously excited through electrode thickness modulation. The impact of electrode thickness on the performance of the dual-mode resonator was systematically investigated by the finite element method (FEM), and resonators were prepared and verified the simulation results. The electromechanical coupling coefficients (K2) of the SH modes are 15.1% and 17.0%, while the maximum Bode-Q (Qmax) values are 150 and 247, respectively, for the fabricated resonators with wavelengths of 1 μm and 1.1 μm. In terms of the high-order SH modes in these resonators, the K2 values are 9.8% and 8.4%, and Qmax values are 190 and 262, respectively. The fabricated dual-band filter shows the center frequencies (fc) of 3065 MHz and 4808 MHz as two bands, with 3-dB fractional bandwidths (FBW) of 5.1% and 5.9%, respectively. Such a dual-band SAW filter based on a conventional ladder topology is meaningful in terms of its compact layout and diminished area occupancy. This work provides a promising avenue to constitute a high-performance dual-passband SAW filter for sub-6 GHz RF application.

Heterogeneous integration of lithium tantalate thin film on quartz for high performance surface acoustic wave resonator

Surface acoustic wave (SAW) resonator based on the piezo film on a foreign substrate is promising to enhance the performance of radio frequency filters. In this work, the 4 inch wafer-scale lithium tantalate thin film on quartz (LTOQ) heterogenous substrate was fabricated by ion-cut process. The cut angle of quartz was optimized to achieve high-quality factor (Q) based on finite element analysis. The average film thickness and the film nonuniformity for the whole wafer are 602 nm and ±2.2%, respectively. The lithium tantalate film exhibits single-crystalline quality where the full width at half-maximum of high-resolution X-ray diffraction rocking curve is 47.4 arcsec. The shear horizonal surface acoustic wave resonator based on the LTOQ structure exhibits a maximum Bode-Q exceeding 3000 and the electromechanical coupling coefficient of 10.26%. The temperature coefficient of frequency at resonant frequency and anti-resonant frequency are −25.21 ppm °C−1 and −35.22 ppm °C−1, respectively.

High-Performance SAW Low Temperature Sensors with Double Electrode Transducers Based on 128° YX LiNbO3.

Low temperature measurement is crucial in deep space exploration. Surface acoustic wave (SAW) sensors can measure temperature wirelessly, making them ideal in extreme situations when wired sensors are not applicable. In this study, 128° YX LiNbO3 was first introduced into low temperature measurements for its little creep or hysteresis in cryogenic environments and affordable price. The finite element method was utilized to raise the design efficiency and optimize the performance of SAW sensors by comparing the performance with different interdigital transducer (IDT) structure parameters, including the height of electrodes, pairs of IDTs, reflecting grid logarithm and acoustic aperture. Once the parameters were changed, a novel design of high-performance SAW temperature sensors based on 128° YX LiNbO3 with double electrode transducers was obtained, of which the Q value could reach up to 5757.18, 4.2-times higher than originally reported. Low temperature tests were conducted, and the frequency responsiveness of SAW sensors was almost linear from -100 °C to 150 °C, which is in good agreement with the simulation results. All results demonstrate that double electrode transducers are considerably efficient for performance enhancement, especially for high-Q SAW sensors, and indicate that LiNbO3 substrate can be a potential high-performance substitute for cryogenic temperature measurements.

High-Performance SAW Device Based on Zinc-Oxide Substrate With Electric Field Regulating Graphene Film Conductivity for Signal Amplifier

In this study, a high-performance surface acoustic wave (SAW) device based on a multi-layer graphene amplifier is proposed, which is mainly composed of a zinc-oxide (ZnO) substrate, an interdigital transducer (IDT) input, a graphene sensing layer, metal electrodes and a fork finger transducer output. The sensor uses graphene’s unique band structure and the electron transport properties of the high mobility of the carrier with extremely small temperature influence to amplify the signal of the SAW caused by the sensing signal, thereby improving the sensitivity of the SAW sensor. The influence of graphene variable conductivity controlled by the uniform electric field on SAW amplifier devices in the near field is studied and analyzed. A small size surface acoustic wave device is fabricated with microelectromechanical system (MEMS) technology. The results show that the resonant frequency of the sensor is about 72 MHz, and the maximum amplification performance is 36 dB/cm. It is found that the SAW amplifier proposed in ZnO piezoelectric crystals exhibits superior performance in graphene-based SAW amplifiers.

Single-mode and ultra-broadband gigahertz surface acoustic waveguides on AlN-on-SiC substrates

This paper proposes a class of high-performance surface acoustic wave (SAW) waveguides based on AlN-on-SiC substrates. Under the existing crystal growth and processing technology, these SAW waveguides offer excellent performance in single mode, low loss, ultra-broadband, operating at gigahertz frequencies. Quasi-Rayleigh SAWs can be excited by traditional interdigital transducers and guided freely with excellent efficiency. Based on these SAW waveguides, we further demonstrate SAW splitters and ring cavities with ultra-high qualities up to 107. These SAW components complement future integrated phononic circuits for high-frequency and compact acoustic manipulating, signal processing, sensing, computing, etc.

Enhancement of coupling factor in 0th to 4th mode Rayleigh surface acoustic waves on polarity inverted multilayered ScAlN film/AlN and BN substrates

The rapid development of mobile communications requires high performance surface acoustic wave (SAW) filters. ScAlN film SAW resonators have a high coupling factor (K 2) and high phase velocity, enabling them to function as effective SAW filters. We theoretically investigated high-order mode Rayleigh SAWs (RSAWs) on single-layered or polarity inverted two-layered ScAlN film/AlN or BN substrate structures to find the optimal structure to achieve a higher K 2 and higher frequency. The K 2 and phase velocity for the single-layered ScAlN film/BN substrate structure were higher than those for the corresponding AlN substrate structure. The K 2 was enhanced in the polarity inverted ScAlN film/AlN or BN substrate structure. Finite element method analysis revealed that the effective coupling factor K eff 2 for the 2nd to 4th mode RSAWs on polarity inverted multilayered ScAlN films was enhanced by setting the boundary of the polarity inverted structure at the all positions where the particle displacements were concentrated.

Single-crystalline LiNbO3 film based wideband SAW devices with spurious-free responses for future RF front-ends

This work demonstrates super-high frequency wave-guided surface acoustic wave (SAW) devices based on LiNbO3/SiO2/Si layered substrates. SAW resonators with fundamental operating frequency to the 7-GHz range were developed, and wave modes like the Rayleigh, Shear-horizontal (SH), Pseudo-Bulk, etc., were observed. Furthermore, effective coupling coefficients (k2eff) and quality factor (Q) of the devices have been investigated systematically. Specifically, spurious-free SAW resonators with the SH wave frequency over 7.40 GHz and the high k2eff value of ∼7.8% were obtained at a nanoscale wavelength of 480 nm. Finally, high-performance filters with a bandwidth over 300 MHz were achieved. The demonstrated filters show sharp roll-off and spurious-free responses within the passband with insertion loss &amp;lt;−5 dB and a small temperature coefficient of frequency of ∼−45.8 ppm/K at a super-high frequency of 7.17 GHz. Upon further optimizations, high-performance SAW devices built on a single crystalline LiNbO3 film can potentially enable the low-loss and wideband signal processing functions, promising for the next-generation radio frequency front-end system applications.

Double Busbar Structure for Transverse Energy Leakage and Resonance Suppression in Surface Acoustic Wave Resonators Using 42°YX-Lithium Tantalate Thin Plate.

This article describes a new transverse edge structure with double busbar for surface acoustic wave (SAW) devices employing a 42°YX-lithium tantalate thin plate such as incredible high-performance (I.H.P.) SAW. This design offers good energy confinement and scattering loss suppression for a wide frequency range. First, preexisting transverse edge designs are reviewed, and their difficulties are pointed out using the dispersion relation for lateral SAW propagation. Then, numerical simulations are performed using the periodic 3-D finite-element method (FEM) powered by the hierarchical cascading technique, and effectiveness of the proposed structure is revealed. In addition, we also provide a possible solution to expand the frequency range giving well energy confinement and demonstrate effectiveness of manipulating the SAW slowness curve shape for transverse mode suppression.

Analysis of Love waves propagation in a functionally graded porous piezoelectric composite structure

Propagation of Love waves in a composite structure, containing a functionally graded porous piezoelectric material layer over a dielectric elastic half space, is studied. The material properties gradually vary with the layer thickness. Constitutive equations for a functionally graded porous piezoelectric material layer are laid down and then their analytical solutions are derived by using the Wentzel-Kramers-Brillouin method. Variations in the mechanical properties and electrical properties are considered and dispersion equations are derived for both electrically short and open boundaries. The effects of porosity and grade coefficients on the phase velocity of the Love waves and on electro-mechanical coupling are discussed. Numerical computation of the phase velocity and electromechanical coupling factor is done for different levels of thickness of the layer and results, obtained, are validated by deriving earlier results as a special case of this study. This study finds application in making high-performance surface acoustic wave devices.

Full extraction of the COM parameters for Rayleigh type surface acoustic wave

Extraction of Coupling of Modes (COM) parameters is important in the design of modern high-performance surface acoustic wave (SAW) devices. In this study, we established an effective connection between the COM parameters and the results of stationary and eigenfrequency studies based on the finite element method. Based on this connection, we proposed an approach for fast and full extraction of the COM parameters including the phases of coupling reflection and transduction coefficient. The COM parameters of the commonly used electrode width controlled single-phase unidirectional transducer and bidirectional interdigital transducer cells are computed and compared. It shows that this is a fast, accurate, general, and full extraction of the COM parameters for Rayleigh type SAW.

FEM Simulation of a High-Performance 128°Y-X LiNbO3/SiO2/Si Functional Substrate for Surface Acoustic Wave Gyroscopes.

To obtain a high-performance surface acoustic wave (SAW) gyroscope substrate, the propagation characteristics and gyroscopic effect of Rayleigh waves in a 128°Y–X LiNbO3/SiO2/Si (LNOI) functional substrate were investigated with a three-dimensional finite element method. The influence of LNOI structural parameters on Rayleigh wave characteristics, including the phase velocity (vp), electromechanical coupling coefficient (K2) and temperature coefficient of frequency (TCF), were analyzed. The results demonstrate that the SiO2 layer compensates for the negative TCF of 128°Y–X LiNbO3 and enhances the K2 of the LNOI substrate. The Rayleigh wave velocity change of the LNOI substrate after rotations in different directions was studied. The gyroscope gain factor (η) represents the strength of the gyroscopic effect in the differential traveling wave SAW gyroscope and is defined. The ηy and ηz of the LNOI substrate with different structural parameters were investigated. Finally, an LNOI substrate with an hLN/λ of 0.2 and an hSiO2/λ of 0.05 was obtained by balancing the characteristic parameters, with a K2 of 3.96%, TCF of −18.75 ppm/°C and ηy of 0.26. The LNOI substrate has a better gyroscopic effect and temperature stability than the 128°Y–X LiNbO3 crystal. The LNOI substrate meets device miniaturization and integration needs.

Scattering Matrix Approach to Design of One-Port Surface Acoustic Wave Resonator Sensors Utilizing Reflectors as Sensing Element.

It has been recently demonstrated that one-port surface acoustic wave (SAW) resonators known for their high Q value and relatively small device footprint could be utilized for in-liquid mass loading sensing applications where only the reflectors of the device are coated with the sensing film, while the interdigital transducer (IDT) is isolated from the sensing environment. The sensor relies on changes induced in reflectivity and phase velocity of SAW in the region of the reflectors upon detection of the measurand and is particularly advantageous for SAW resonator-type sensors as any contact of the sensing film with the IDT could change its static capacitance during sensing and thereby introduce serious instability in the sensor response. Accordingly, in the present work, the existing scattering matrix approach to the design of one-port SAW resonator filters, which does not cater to the integration of sensing film on the resonator surface, is adapted to develop a method to design one-port SAW resonator sensors utilizing reflectors as sensing element. The reflector block of the one-port SAW resonator is readily split into sensing-active and sensing-inactive parts using the SAW grating transmission matrix in order to study the changes introduced in input admittance of the device for varying level of coverage of the sensing film. The theoretical design approach presented in this work could be used to fabricate high-performance one-port SAW resonator sensors operating at its point of highest sensitivity while utilizing one of the device reflectors as sensing element, without the use of additional impedance matching circuit elements.

Velocity reduction of incredible high-performance surface acoustic wave using heavy metal electrodes

In this work, a technique to reduce the acoustic velocity of incredible high-performance surface acoustic wave (I.H.P. SAW) using Al/Pt electrodes keeping other important characteristics such as fractional bandwidth and quality factor is proposed. First, using a finite element method simulator, variations of the acoustic velocity and the fractional bandwidth of the I.H.P. SAW with the Pt electrode thickness, thicknesses of LiTaO3 (LT) and SiO2 layers in a substrate, and the cut angle of a LT layer are estimated. And then, to confirm the validity of the estimation results, several one-port SAW resonators with various thickness combinations of Al, Pt, LT, and SiO2 layers are fabricated and their characteristics are evaluated. The evaluation results show that the acoustic velocity of the I.H.P. SAW is successfully reduced keeping the bandwidth, the quality factor, and the temperature characteristics.