Abstract
Extraction of Coupling of Modes (COM) parameters is important in the design of modern high-performance surface acoustic wave (SAW) devices. In this study, we established an effective connection between the COM parameters and the results of stationary and eigenfrequency studies based on the finite element method. Based on this connection, we proposed an approach for fast and full extraction of the COM parameters including the phases of coupling reflection and transduction coefficient. The COM parameters of the commonly used electrode width controlled single-phase unidirectional transducer and bidirectional interdigital transducer cells are computed and compared. It shows that this is a fast, accurate, general, and full extraction of the COM parameters for Rayleigh type SAW.
Highlights
Surface acoustic wave (SAW) devices are widely used for signal processing in modern telecommunication systems.1 In the available techniques for the analysis and design of the SAW devices, the coupling of modes (COM) model is a useful modeling approach because it is the most adequate for the phenomena being considered: excitation, propagation, and scattering of surface acoustic waves.2 the accuracy of the simulation is critically dependent on the parameters used in the modeling
Hartmann and Plessky applied the same structure to measure the leaky Rayleigh type SAW devices.4. Such an approach is both time-consuming and expensive when performing real physical experiments because of many degrees of freedom of SAW structures, such as the relative electrode thickness, the metallization ratio, and the electrode profile. Some numerical methods, such as a combination of the Finite Element Method (FEM) and the boundary element method (BEM),5,6 a full FEM,7,8 and the Finite Element Method–Spectral Domain Analysis (FEM/SDA),9,10 have been employed for the COM parameters extraction
In this paper, based on a full FEM analysis for the periodic structure and the COM theory, we developed an approach to extract all the COM parameters
Summary
Surface acoustic wave (SAW) devices are widely used for signal processing in modern telecommunication systems. In the available techniques for the analysis and design of the SAW devices, the coupling of modes (COM) model is a useful modeling approach because it is the most adequate for the phenomena being considered: excitation, propagation, and scattering of surface acoustic waves. the accuracy of the simulation is critically dependent on the parameters used in the modeling. Such an approach is both time-consuming and expensive when performing real physical experiments because of many degrees of freedom of SAW structures, such as the relative electrode thickness, the metallization ratio, and the electrode profile Some numerical methods, such as a combination of the Finite Element Method (FEM) and the boundary element method (BEM), a full FEM, and the Finite Element Method–Spectral Domain Analysis (FEM/SDA), have been employed for the COM parameters extraction. Our calculated parameters include the phases of the coupling reflection and the transduction coefficient These results are compared with those of well-known researchers in the field of surface acoustic waves (SAW) and show that this approach is powerful to fully extract the COM parameters of the Rayleigh type SAW for all kinds of IDT structures on arbitrary materials
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