High Frequency Capacitive Discharge Research Articles

Electron heating mode transition observed in a very high frequency capacitive discharge

The effect of excitation frequency in the 13.56–60 MHz range on the electron energy distribution function (EDF) of capacitively coupled plasma is investigated. Under a fixed rf voltage (50–130 V peak-to-peak) and argon pressure (100 mTorr), a remarkable change in the EDF is observed: a Druyvesteyn type at low frequencies (≃13.56 MHz) evolves into a bi-Maxwellian type in a very high frequency (VHF) above 30 MHz. The transition frequency decreases with increasing the rf voltage. The observed frequency effect on the EDF is tentatively explained in terms of the transition of electron heating mode from the collisional ohmic heating at low frequencies into the plasma surface heating in the VHF range.

Features of particle excitation in high-frequency capacitive discharge

The efficiencies of excitation of different atomic and molecular levels of a gaseous medium by a low-current high-frequency capacitive discharge (HFCD) and a dc discharge are compared theoretically. It is shown that for transitions between lower vibrational levels of molecules an increase in spectral line intensity by a factor of 1.2–1.6 is observed, and for neon transitions from high-lying levels, by a factor of 1.5–3.0. The stability of low-current HFCD is experimentally investigated for different configurations of gas-discharge gaps. The results of these investigations are used in developing compact planar and coaxial HFCD lasers.

Selective etching of epoxy rubber by high frequency capacitive discharge plasma

Etching of epoxy rubber by the oxygen plasma of high frequency capacitive discharge and in its afterglow leads to the development of the microrelief of the surface the character of which is close to that obtained on chemical etching in solutions. Etching is ensured by the action of oxygen activated in the plasma, the rate of etching and its selectivity depending in opposed fashion on the temperature of the material treated.