Analysis of forward bias degradation reduction of 4H-Silicon Carbide (4H-SiC) PiN diodes on bonded substrates was performed. In the analysis, cathodoluminescence (CL), photoluminescence imaging (PL imaging), and transmission electron microscope (TEM) were used. Under high forward bias stress, the Shockley-type stacking fault (SSF) does not expand into the transferred layer of the bonded substrate, while in the monocrystalline substrate, the SSF expands below the epilayer/substrate interface. The basal plane dislocation (BPD) within the transferred layer does not expand to the SSF. The transferred layer has the effect of suppressing the expansion of SSFs. This effect can be caused by hydrogen implantation for wafer splitting to produce bonded SiC substrates.
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