The effect of atmosphere after polymerization on dielectric properties of plasma polymerized ethylene (PPE) is studied. ESCA and ESR measurements show that the PPE sample traps oxygen rapidly when it is exposed to air after polymerization. They also show that heat treatment in argon or in hydrogen can reduce the number of residual free radicals. The change in dielectric properties of tan δ and conduction current with atmosphere after polymerization can be explained if dielectric properties are closely related with residual free radicals and carbonyl groups formed in the sample.