The influence of annealing treatment of molybdenum (Mo) film on the growth of CuInSe 2 (CIS) thin film has been studied. We show that Mo film is with much better electrical conductivity and adhesion after being annealed in vacuum. It is found that annealing of Mo film not only modifies the orientation of In 2 Se 3 (IS) precursor, but also the texture of CIS crystal. Thermally treated Mo film favors the growth of (220/204) oriented CIS film. CIS solar cell grown on annealed Mo film is found to be with higher device efficiency, which is attributed to the increased fill factor ( FF ). • After being annealed in vacuum, the electrical conductivity and mechanical stability of Mo film are much better. • Annealing of Mo film modifies the orientation of In 2 Se 3 precursor. • Annealing of Mo film modifies the orientation of CIS crystal. • We improve performance of the CuInSe 2 solar cell by annealing Mo film substrate.
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