Gray Level Co-occurrence Matrix Method Research Articles

IDENTIFICATION OF POTATO LEAF DISEASES USING ARTIFICIAL NEURAL NETWORKS WITH EXTREME LEARNING MACHINE ALGORITHM

Potato plants have an important role in providing a source of carbohydrates for society. However, potato production is often threatened by various plant diseases, such as leaf disease, which can cause a decrease in yields. Identification of diseases on potato leaves is currently mostly done by farmers manually, so it is not always efficient and accurate. So the aim of this research is to identify diseases on potato leaves with artificial neural networks using the ELM (Extreme Learning Machine) approach and the GLCM (Gray Level Co-Occurrence Matrix) method for feature extraction. The GLCM approach functions to obtain texture features on objects by measuring how often certain pairs of pixel intensities appear together at various distances and directions in the image. Meanwhile, the ELM algorithm is used for image identification by adopting a one-time training method without iteration, which involves randomly determining weights and biases in hidden layers, thus allowing training to be carried out quickly and efficiently. Evaluation of the model by looking for the level of accuracy produces a value of 84.667%. The results show that the model developed is capable of accurate identification.

Boosting enabled efficient machine learning technique for accurate prediction of crop yield towards precision agriculture

Due to the limited availability of natural resources, it is essential that agricultural productivity keep pace with population growth. Despite unfavorable weather circumstances, this project's major objective is to boost production. As a consequence of technological advancements in agriculture, precision farming as a way for enhancing crop yields is gaining appeal and becoming more prevalent. When it comes to predicting future data, machine learning employs a number of methods, including the creation of models and the acquisition of prediction rules based on past data. In this manuscript, we examine various techniques to machine learning, as well as an automated agricultural yield projection model based on selecting the most relevant features. For the purpose of selecting features, the Grey Level Co-occurrence Matrix method is utilised. For classification, we make use of the AdaBoost Decision Tree, Artificial Neural Network (ANN), and K-Nearest Neighbour (KNN) algorithms. The data set that was used in this study is simply a compilation of information about a variety of topics, including yield, pesticide use, rainfall, and average temperature. This data collection consists of 33 characteristics or qualities in total. The crops soya beans, maze, potato, rice, paddy, wheat, and sorghum are included in this data collection. This data collection was made possible through the collaboration of the Food and Agriculture Organisation (FAO) and the World Data Bank, both of which make their data available to the public. The AdaBoost decision tree has achieved the highest level of accuracy possible when used to anticipate agricultural yield. Both the accuracy rate and the recall rate are quite high at 99 percent.

Batik Classification using Microstructure Co-occurrence Histogram

Batik Nitik is a distinctive form of batik originating from the culturally rich region of Yogyakarta, Indonesia. What sets it apart from other batik styles is its remarkable motif similarity, a characteristic that often poses a considerable challenge when attempting to distinguish one design from another. To address this challenge, extensive research has been conducted with the primary objective of classifying Batik Nitik, and this research leverages an innovative approach combining the microstructure histogram and gray level co-occurrence matrix (GLCM) techniques, collectively referred to as the Microstructure Co-occurrence Histogram (MCH).The MCH method offers a multi-faceted approach to feature extraction, simultaneously capturing color, texture, and shape attributes, thereby generating a set of local features that faithfully represent the intricate details found in Batik Nitik imagery. In parallel, the GLCM method excels at extracting robust texture features by employing statistical measures to portray the subtle nuances within these batik patterns. Nevertheless, the mere fusion of microstructure and GLCM features doesn't inherently guarantee superior classification performance. This research paper has meticulously examined many feature fusion scenarios between microstructure and GLCM to pinpoint the optimal configuration that would yield the most accurate results. The dataset used consists of 960 Batik Nitik samples, comprising 60 categories. The classifiers employed in this study are K-Nearest Neighbor (KNN), Support Vector Machine (SVM), Decision Tree (DT), Naïve Bayes (NB), and Linear Discriminant Analysis (LDA). Based on the experimental results, the fusion of microstructure and GLCM features with the (LDA) classifier yields the best performance compared to other scenarios and classifiers.

Automatic crimping state classification in X-ray images of crimped tension clamp

ABSTRACT The crimping states of the tension clamp can typically be recognised by using X-ray radiography. However, it is challenging to process X-ray images directly for inspection, especially when the crimping state and position of the groove are unclear. To address this problem, this paper firstly adopted the Beta greyscale stretching algorithm to enhance the X-ray images by increasing the contrast and reducing the noise. Subsequently, the Canny algorithm was implemented to locate and segment the groove region. Finally, the Grey-Level Co-occurrence Matrix (GLCM) method was applied to extract the texture features of the groove region, and identify the groove crimping state using support vector machine (SVM) classifier. Three types of the crimping states were utilised as test objects for classification. The results of the experiments demonstrated that the Beta enhancement algorithm, GLCM features used in this paper can effectively improve the accuracy rate of SVM classifier up to 99.51%. This study applies image processing technology towards the crimping states classification of tension clamp with accurate detection results enabling early-stage detection of abnormal crimping states leading to timely repairs.

Prediction of milling surface roughness based on DGLCM and neural network

With the manufacturing industry’s increasingly automated and intelligent development, traditional workpiece roughness measurement methods can no longer meet the requirements for short time, high efficiency, and online measurement. Therefore, this article proposes a roughness evaluation model for vertical milling workpiece roughness measurement and improves upon the traditional Gray Level Co-occurrence Matrix (GLCM) method to achieve high accuracy and robustness in measuring milling surface roughness. First, the milled surface is illuminated by a coaxial light source, and an image is captured using an industrial camera and a telecentric lens. Then, four features of the image are extracted using the Direction Measure-based Gray Level Co-occurrence Matrix (DGLCM) to construct a feature descriptor. Finally, Finally, create an RBF network to predict surface roughness. Through experimental comparison with traditional GLCM feature extraction methods, our proposed feature extraction method has a prediction error of only 2.01%, which is superior to traditional methods.

Klasifikasi Batik Pekalongan Berdasarkan Citra dengan Metode GLCM dan JST Backpropagation

Batik is an Indonesian cultural heritage that is internationally recognized by UNESCO. However, knowledge about the types of batik, especially traditional Pekalongan batik, is increasingly forgotten due to globalization. This research aims to create a Pekalongan traditional batik image classification system through Gray Level Co-Occurrence Matrix (GLCM) feature extraction and Artificial Neural Network (ANN) classification method. This system aims to make it easier for people to identify Pekalongan batik motifs without requiring special skills. The results showed that the GLCM and JST methods can be used to classify Pekalongan batik can predict correctly. The use of JST Backpropagation architecture with 3 hidden layers resulted in train data accuracy of 46.6% and test data accuracy of 55.5%. This system is expected to help preserve the cultural heritage of batik and increase public understanding of Pekalongan batik motifs.

Deteksi Mata Katarak Berdasarkan Tekstur Gray Gray Level Co-Ocurrence Matrix Dengan Metode Self Organizing Map

Cataracts are a common eye problem in Indonesia. Untreated cataracts are the main cause of blindness and the most dominant vision impairment in Indonesia among people over 50 years old, with a proportion reaching 77.7%. Regular eye examinations are necessary to prevent cataracts, but there are obstacles due to the availability of equipment and the cost of eye examinations. Therefore, an efficient and effective cataract detection system is needed. This study aims to detect cataracts in the eyes by utilizing a dataset of eyes from the internet. This research uses RGB and HSV feature extraction combined with the GLCM extraction method. The Gray Level Co-occurrence Matrix (GLCM) method describes the spatial relationship between pixel intensities in an image. With the GLCM matrix, texture information can be extracted from eye images. The Self Organizing Map (SOM) method performs learning based on feature extraction obtained from previously labeled eye images. Based on the test results, this study successfully detects cataract and normal eyes. With the greatest accuracy achieved in the comparison of 80% training data and 20% test data with dimension size = [2 2] and maximum iterations of 100, the highest accuracy of 90% was obtained.

Predicting of diabetic retinopathy development stages of fundus images using deep learning based on combined features.

The number of diabetic retinopathy (DR) patients is increasing every year, and this causes a public health problem. Therefore, regular diagnosis of diabetes patients is necessary to avoid the progression of DR stages to advanced stages that lead to blindness. Manual diagnosis requires effort and expertise and is prone to errors and differing expert diagnoses. Therefore, artificial intelligence techniques help doctors make a proper diagnosis and resolve different opinions. This study developed three approaches, each with two systems, for early diagnosis of DR disease progression. All colour fundus images have been subjected to image enhancement and increasing contrast ROI through filters. All features extracted by the DenseNet-121 and AlexNet (Dense-121 and Alex) were fed to the Principal Component Analysis (PCA) method to select important features and reduce their dimensions. The first approach is to DR image analysis for early prediction of DR disease progression by Artificial Neural Network (ANN) with selected, low-dimensional features of Dense-121 and Alex models. The second approach is to DR image analysis for early prediction of DR disease progression is by integrating important and low-dimensional features of Dense-121 and Alex models before and after PCA. The third approach is to DR image analysis for early prediction of DR disease progression by ANN with the radiomic features. The radiomic features are a combination of the features of the CNN models (Dense-121 and Alex) separately with the handcrafted features extracted by Discrete Wavelet Transform (DWT), Local Binary Pattern (LBP), Fuzzy colour histogram (FCH), and Gray Level Co-occurrence Matrix (GLCM) methods. With the radiomic features of the Alex model and the handcrafted features, ANN reached a sensitivity of 97.92%, an AUC of 99.56%, an accuracy of 99.1%, a specificity of 99.4% and a precision of 99.06%.

Sintigrafik Görüntülerden Tiroid Nodülleri için Bilgisayar Destekli Tanı Sistemi

In modern medicine, image recognition via segmentation of anatomical regions and automatic classification of diseases using medical images has a growing potential role in diagnosis of various diseases. Scintigraphy of thyroid is one of the established imaging modalities for diagnosis of thyroid gland disorders. In our study, the speckle noise was reduced in the scintigraphy images with the optimized Bayesian nonlocal mean filter. The thyroid gland was automatically segmented by local based active contour method and the thyroid gland pathologies were classified with convolutional neural networks (CNN). The proposed computer aided diagnosis (CAD) system was compared with Pyramid of Histograms of Orientation Gradients (PHOG), Gray Level Co occurrence Matrix (GLCM), Local Configuration Pattern (LCP) and Bag of Feature (BoF) methods. The common pathological patterns of scintigraphic images of the thyroid gland were successfully classified by CNN with an overall success rate of 91.19%. The comparative methods were PHOG, GLCM, LCP and BoF methods which provided overall success rates of 7.61%, 86.04%, 88.91% and 85.72% respectively. The proposed CNN based automatic diagnosis system provided promising results compared to handcrafted methods.

Identification of Condition of Corn Plant Based on Leaf Image Features Using Gray Level Co-Occurrence Matrix and Backpropagation Neural Network

This study aims to identify the condition of corn plants based on imagery leaf using the gray level co-occurrence matrix (GLCM) method and artificial neural network (ANN) backpropagation. The GLCM method is used for extracting features from image leaf corn, whereas ANN backpropagation is used for classification condition plant corn based on features. The classification was done using a dataset of corn leaves with four conditions: healthy, leaf spot, blight, and leaf rust. Next, the leaf features are extracted using method GLCM and training on model ANN backpropagation to classify conditions of corn plants. After training on the model, the next step is model evaluation using the confusion matrix method. The research results show that the technique can produce accuracy, which is tall enough to identify condition corn plants, with an accuracy of 95%. This indicates that the use of GLCM and ANN backpropagation can be a good alternative in determining the condition of corn plants. This research provides benefits in facilitating the identification of the state of corn plants quickly and accurately.

Klasifikasi Citra Daging Babi dan Daging Kerbau Menggunakan Histogram Citra dan GLCM

Due to high consumer demand, some traders use the high price of meat to make a profit by mixing pork and buffalo meat. Some consumers are not aware of this, because in plain view buffalo meat with pork meat is difficult to distinguish, especially for some ordinary people. This action is very detrimental and disturbing the local community, especially Muslims. At present, technological advances in the field of digital image processing are increasing rapidly, especially in food products. In general, this research was conducted in 2 (three) stages. The first stage, namely the stage of image data collection of pork and buffalo meat. The second stage, namely the classification of pork and buffalo meat images using image histogram analysis and the Gray Level Co-occurrence Matrix (GLCM) method based on the color and texture of the meat. In this study using the Red Green Blue (RGB) color image method and GLCM texture extraction, namely contrast, homogeneity, energy, and correlation. The study was conducted using 20 samples of meat images (10 images of pork and 10 images of buffalo meat, respectively). Based on the results of the research that has been done, it was found that the image of buffalo meat has a higher percentage value of the Red (R) color component when compared to the pork image, whereas the percentage value of the Green (G) and Blue (B) color components is lower when compared to the image pork. Then, if the value between pixels is not homogeneous (small homogeneity value), then the contrast value is large, and vice versa if the value between pixels is homogeneous (large homogeneity value) then the contrast value is small. The image of buffalo meat has a small homogeneity value compared to the image of pork, so the variation in intensity (contrast) in the image of buffalo meat is high.

Comparative study of different methods for the assessment of print nonuniformity and their correlation with the human visual system

AbstractPrint nonuniformity is the variation of optical density (reflection) on the print and can occur in several different types that can be classified into two basic groups: random and systematic variations. This article examines two types from each group of variations that are most commonly found in digital printing systems: blotches and streaks, where amplitude and size were varied. Three most commonly used methods for measuring the print nonuniformity were used: Grey Level Co‐occurrence Matrix (GLCM), ISO 13660 and Integration (also Improved Integration) method. The results obtained by measuring were compared with a visual assessment to find the link between objective and subjective analysis and to define and determine which method/parameter is the best for the measurement of which type of print (non)uniformity. The obtained results indicate the possibility of selecting the measurement parameter, but that the choice of the parameter depends on the type of nonuniformity. It is concluded that in the case of the GLCM method, the entropy and energy parameters are strongly related to the visual assessment for all three sets of samples. These parameters can be used regardless of the type of nonuniformity. The ISO G parameter can be used to measure both graininess and mottling, while the ISO M parameter is only suitable for measuring mottling. Integration method could be used to measure systematic error. On the basis of conclusions of the research, it is possible to propose the development of an industrially applicable solution for measuring print nonuniformity of digitally printed samples.

Monitoring of the glazing state of the pitch polishing lap by an image texture analysis method in full-aperture continuous polishing.

Full-aperture continuous polishing using a pitch lap is one of the key processes in finishing large flat optical elements. The pitch lap has relief lines cutting into the surface to increase its surface roughness and to improve the polishing results. During polishing, the pitch lap surface is glazed due to the transverse rheologic flow and creep of the pitch lap by the element and conditioner, which has significant influence on the polishing results. In this study, an image texture analysis method is proposed to monitor the glazing state of the pitch lap. The images of the pitch lap surface are captured online, and the image textures are analyzed with the gray level co-occurrence matrix (GLCM) method. The experiments revealed that the GLCM eigenvalues of the surface image are strongly correlative with the glazing state of the pitch lap, which has a linear impact on the material removal rate and material removal uniformity. To the best of our knowledge, this study provides a novel and useful method to monitor the surface glazing state of the pitch lap.

Analyzing Histological Images Using Hybrid Techniques for Early Detection of Multi-Class Breast Cancer Based on Fusion Features of CNN and Handcrafted.

Breast cancer is the second most common type of cancer among women, and it can threaten women's lives if it is not diagnosed early. There are many methods for detecting breast cancer, but they cannot distinguish between benign and malignant tumors. Therefore, a biopsy taken from the patient's abnormal tissue is an effective way to distinguish between malignant and benign breast cancer tumors. There are many challenges facing pathologists and experts in diagnosing breast cancer, including the addition of some medical fluids of various colors, the direction of the sample, the small number of doctors and their differing opinions. Thus, artificial intelligence techniques solve these challenges and help clinicians resolve their diagnostic differences. In this study, three techniques, each with three systems, were developed to diagnose multi and binary classes of breast cancer datasets and distinguish between benign and malignant types with 40× and 400× factors. The first technique for diagnosing a breast cancer dataset is using an artificial neural network (ANN) with selected features from VGG-19 and ResNet-18. The second technique for diagnosing breast cancer dataset is by ANN with combined features for VGG-19 and ResNet-18 before and after principal component analysis (PCA). The third technique for analyzing breast cancer dataset is by ANN with hybrid features. The hybrid features are a hybrid between VGG-19 and handcrafted; and a hybrid between ResNet-18 and handcrafted. The handcrafted features are mixed features extracted using Fuzzy color histogram (FCH), local binary pattern (LBP), discrete wavelet transform (DWT) and gray level co-occurrence matrix (GLCM) methods. With the multi classes data set, ANN with the hybrid features of the VGG-19 and handcrafted reached a precision of 95.86%, an accuracy of 97.3%, sensitivity of 96.75%, AUC of 99.37%, and specificity of 99.81% with images at magnification factor 400×. Whereas with the binary classes data set, ANN with the hybrid features of the VGG-19 and handcrafted reached a precision of 99.74%, an accuracy of 99.7%, sensitivity of 100%, AUC of 99.85%, and specificity of 100% with images at a magnification factor 400×.

Automatic Analysis of MRI Images for Early Prediction of Alzheimer's Disease Stages Based on Hybrid Features of CNN and Handcrafted Features.

Alzheimer's disease (AD) is considered one of the challenges facing health care in the modern century; until now, there has been no effective treatment to cure it, but there are drugs to slow its progression. Therefore, early detection of Alzheimer's is vital to take needful measures before it develops into brain damage which cannot be treated. Magnetic resonance imaging (MRI) techniques have contributed to the diagnosis and prediction of its progression. MRI images require highly experienced doctors and radiologists, and the analysis of MRI images takes time to analyze each slice. Thus, deep learning techniques play a vital role in analyzing a huge amount of MRI images with high accuracy to detect Alzheimer's and predict its progression. Because of the similarities in the characteristics of the early stages of Alzheimer's, this study aimed to extract the features in several methods and integrate the features extracted from more than one method into the same features matrix. This study contributed to the development of three methodologies, each with two systems, with all systems aimed at achieving satisfactory accuracy for the detection of AD and predicting the stages of its progression. The first methodology is by Feed Forward Neural Network (FFNN) with the features of GoogLeNet and DenseNet-121 models separately. The second methodology is by FFNN network with combined features between GoogLeNet and Dense-121 models before and after high-dimensionality reduction of features using the Principal Component Analysis (PCA) algorithm. The third methodology is by FFNN network with combined features between GoogLeNet and Dense-121 models separately and features extracted by Discrete Wavelet Transform (DWT), Local Binary Pattern (LBP) and Gray Level Co-occurrence Matrix (GLCM) methods called handcrafted features. All systems yielded super results in detecting AD and predicting the stages of its progression. With the combined features of the DenseNet-121 and handcrafted, the FFNN achieved an accuracy of 99.7%, sensitivity of 99.64%, AUC of 99.56%, precision of 99.63%, and a specificity of 99.67%.

Naïve Bayesian Classification Based Glioma Brain Tumor Segmentation Using Grey Level Co-occurrence Matrix Method

Brain tumors vary widely in size and form, making detection and diagnosis difficult. This study's main aim is to identify abnormal brain images., classify them from normal brain images, and then segment the tumor areas from the categorised brain images. In this study, we offer a technique based on the Nave Bayesian classification approach that can efficiently identify and segment brain tumors. Noises are identified and filtered out during the preprocessing phase of tumor identification. After preprocessing the brain image, GLCM and probabilistic properties are extracted. Naive Bayesian classifier is then used to train and label the retrieved features. When the tumors in a brain picture have been categorised, the watershed segmentation approach is used to isolate the tumors. This paper's brain pictures are from the BRATS 2015 data collection. The suggested approach has a classification rate of 99.2% for MR pictures of normal brain tissue and a rate of 97.3% for MR images of aberrant Glioma brain tissue. In this study, we provide a strategy for detecting and segmenting tumors that has a 97.54% Probability of Detection (POD), a 92.18% Probability of False Detection (POFD), a 98.17% Critical Success Index (CSI), and a 98.55% Percentage of Corrects (PC). The recommended Glioma brain tumour detection technique outperforms existing state-of-the-art approaches in POD, POFD, CSI, and PC because it can identify tumour locations in abnormal brain images.

Multiparametric Quantitative Analysis of Photodamage to Skin Using Optical Coherence Tomography.

Ultraviolet (UV) irradiation causes 90% of photodamage to skin and long-term exposure to UV irradiation is the largest threat to skin health. To study the mechanism of UV-induced photodamage and the repair of sunburnt skin, the key problem to solve is how to non-destructively and continuously evaluate UV-induced photodamage to skin. In this study, a method to quantitatively analyze the structural and tissue optical parameters of artificial skin (AS) using optical coherence tomography (OCT) was proposed as a way to non-destructively and continuously evaluate the effect of photodamage. AS surface roughness was achieved based on the characteristic peaks of the intensity signal of the OCT images, and this was the basis for quantifying AS cuticle thickness using Dijkstra's algorithm. Local texture features within the AS were obtained through the gray-level co-occurrence matrix method. A modified depth-resolved algorithm was used to quantify the 3D scattering coefficient distribution within AS based on a single-scattering model. A multiparameter assessment of AS photodamage was carried out, and the results were compared with the MTT experiment results and H&E staining. The results of the UV photodamage experiments showed that the cuticle of the photodamaged model was thicker (56.5%) and had greater surface roughness (14.4%) compared with the normal cultured AS. The angular second moment was greater and the correlation was smaller, which was in agreement with the results of the H&E staining microscopy. The angular second moment and correlation showed a good linear relationship with the UV irradiation dose, illustrating the potential of OCT in measuring internal structural damage. The tissue scattering coefficient of AS correlated well with the MTT results, which can be used to quantify the damage to the bioactivity. The experimental results also demonstrate the anti-photodamage efficacy of the vitamin C factor. Quantitative analysis of structural and tissue optical parameters of AS by OCT enables the non-destructive and continuous detection of AS photodamage in multiple dimensions.

Gray level co-occurrence matrix and wavelet analyses reveal discrete changes in proximal tubule cell nuclei after mild acute kidney injury

Acute kidney injury (AKI) relates to an abrupt reduction in renal function resulting from numerous conditions. Morbidity, mortality, and treatment costs related to AKI are relatively high. This condition is strongly associated with damage to proximal tubule cells (PTCs), generating distinct patterns of transcriptional and epigenetic alterations that result in structural changes in the nuclei of this epithelium. To this date, AKI-related nuclear chromatin redistribution in PTCs is poorly understood, and it is unclear whether changes in PTC chromatin patterns can be detected using conventional microscopy during mild AKI, which can progress to more debilitating forms of injury. In recent years, gray level co-occurrence matrix (GLCM) analysis and discrete wavelet transform (DWT) have emerged as potentially valuable methods for identifying discrete structural changes in nuclear chromatin architecture that are not visible during the conventional histopathological exam. Here we present findings indicating that GLCM and DWT methods can be successfully used in nephrology to detect subtle nuclear morphological alterations associated with mild tissue injury demonstrated in rodents by inducing a mild form of AKI through ischemia–reperfusion injury. Our results show that mild ischemic AKI is associated with the reduction of local textural homogeneity of PTC nuclei quantified by GLCM and the increase of nuclear structural heterogeneity indirectly assessed with DWT energy coefficients. This rodent model allowed us to show that mild ischemic AKI is associated with the significant reduction of textural homogeneity of PTC nuclei, indirectly assessed by GLCM indicators and DWT energy coefficients.

Klasifikasi Data Menggunakan Algoritma K-Means Clustering Dan Naive Bayes Classifier Berdasarkan Analisa Tekstur Metode Gray Level Co-Occurrence Matrix (GLCM)

ABSTRACT
 
 Data classification in the system is widely used in various fields of information technology, data classification is obtained by analyzing objects based on the level of similarity and mapping the characteristics that are protected in the object based on the specified cluster. The use of classification in this study by use texture patterns contained in data by use K-Means Clustering algorithm and Naive Bayes Classifier. The K-Means Clustering algorithm is the process of grouping data based on the same characteristics, while Naive Bayes Classifier use probability and statistic calculations. This study aims to analyze data through texture patterns and the level of accuracy generated through K-Means Clustering algorithms and naïve bayes classifiers. Testing data on textures based on extract parameters with contrast and correlation classifications in GLCM (Gray-Level Co-Occurrence Matrix) methods and calculating the distance expressed in pixels with angle intervals of 0º, 45º, 90º, and 135º. Texture imagery is classified into three clusters by comparing accuracy values obtained. The accuracy value resulting from testing using the K-means Classifier algorithm is very good with an accuracy value of 100% and the accuracy value resulting from testing using the Naive Bayes Classifier method is very good with an accuracy value of 100%.
 
 Keywords: K-Means Clustering, Naive Bayes, and Classifier

Structural and Mechanical Properties of CrN Thin Films Deposited on Si Substrate by Using Magnetron Techniques

Chromium nitride thin films are known for their good mechanical properties. We present the characteristics of ultrathin chromium nitride films under 400 nm thickness deposited on silicon substrates by direct current and high-power impulse magnetron sputtering techniques. The methods of investigation of the CrN films were scanning electron microscopy, atomic force microscopy, and nanoindentation. Qualitative and quantitative analyses were performed using AFM and SEM images by fractal dimension, surface roughness and gray-level co-occurrence matrix methods. Our results show that using magnetron techniques, ultrathin CrN films with excellent mechanical properties were obtained, characterized by values of Young’s modulus between 140 GPa and 250 GPa for the samples obtained using high-power impulse magneton sputtering (HiPIMS) and between 240 GPa and 370 GPa for the samples obtained using direct current sputtering (DC). Stiffness measurements also reveal the excellent mechanical properties of the investigated samples, where the samples obtained using HiPIMS sputtering had stiffness values between 125 N/m and 132 N/m and the samples obtained using DC sputtering had stiffness values between 110 N/m and 119 N/m.