A piezoelectric linear ultrasonic motor is proposed, with a cylindrical stator and sliderstructure. The length and diameter of the motor are about 10 and 1.5 mm, respectively. Thestator consists of two piezoelectric ceramic (PZT) tubes connected by a thinfilm metallic glass (TFMG) pipe. The stator is designed based on theoreticalanalyses and finite element method (FEM) simulation. The traveling wavepropagation is obtained in the FEM simulation under the proper geometricalsizes, suitable boundary conditions and driving voltage signals. The trajectoriesof particles on the TFMG pipe are elliptical motion. In the experiment, a 25 µm thick TFMG pipe is fabricated using the rotating magnetron sputtering technique and thevibration characteristics of the stator are measured by a laser Doppler vibrometer (LDV) system.Bidirectional motion of the slider is observed around 600 kHz, the maximum velocity is near to 40 mm s − 1 at 50 Vp–p for the loose slider and the maximum output force is 6 mN at 70 Vp–p for thetight slider.
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