Surface Acoustic Wave Propagation Research Articles

Generation of surface acoustic waves on doped semiconductor substrates

We report on the electrical generation of surface acoustic waves (SAWs) on doped semiconductor substrates. This is implemented by using interdigital transducers (IDTs) placed on piezoelectric ZnO films sputtered onto evaporated thin metal layers. Two material systems are investigated, namely ZnO/Au/GaAs and ZnO/Ni/InP. The rf-field applied to the transducer is electrically screened by the highly conductive metal film underneath the ZnO film without any extra ohmic losses. As a result, absorption of the rf-field by the mobile carriers in the lossy doped region underneath the IDT is avoided, ensuring efficient SAW generation. We find that the growth temperature of the ZnO film on the metal layer affects its structure and, thus, the efficiency of SAW generation. With this technique, the SAW active layers can be placed close to doped layers, expanding the application range of SAWs in semiconductor devices.

Anisotropic propagation imaging of elastic waves in oriented columnar thin films

We report on the observation of strongly anisotropic surface acoustic wave propagation on nanostructured thin films. Two kinds of tungsten samples were prepared by sputtering on a silicon substrate: a conventional thin film with columns normal to the substrate surface, and an oriented columnar architecture using the glancing angle deposition (GLAD) process. Pseudo-Rayleigh waves (PRWs) were imaged as a function of time in x and y directions for both films thanks to a femtosecond heterodyne pump-probe setup. A strong anisotropic propagation as well as a high velocity reduction of the PRWs were exhibited for the GLAD sample. For the wavevector k/2π = 3 × 105 m−1 the measured group velocities vx and vy equal 2220 m s−1 for the sample prepared with conventional sputtering, whereas a strong anisotropy appears (vx = 1600 m s−1 and vy = 870 m s−1) for the sample prepared with the GLAD process. Using the finite element method, the anisotropy is related to the structural anisotropy of the thin film’s architecture. The drop of PRWs group velocities is mainly assigned to the porous microstructure, especially favored by atomic shadowing effects which appear during the growth of the inclined columns. Such GLAD thin films constitute a new tool for the control of the propagation of surface elastic waves and for the design of new devices with useful properties.

Acousto-electric transport in MgO/ZnO-covered graphene on SiC

We investigate the acousto-electric transport induced by surface acoustic waves (SAWs) in epitaxial graphene (EG) coated by a MgO/ZnO film. The deposition of a thin MgO layer protects the EG during the sputtering of a piezoelectric ZnO film for the efficient generation of SAWs. We demonstrate by Raman and electric measurements that the coating does not harm the EG structural and electronic properties. We report the generation of two SAW modes with frequencies around 2 GHz. For both modes, we measure acousto-electric currents in EG devices placed in the SAW propagation path. The currents increase linearly with the SAW power, reaching values up to almost two orders of magnitude higher than in previous reports for acousto-electric transport in EG on SiC. Our results agree with the predictions from the classical relaxation model of the interaction between SAWs and a two dimensional electron gas.

Characterization of RF sputtered zinc oxide thin films on silicon using scanning acoustic microscopy

Zinc oxide (ZnO) thin films were grown on silicon (100) substrate using radio frequency (RF) sputtering under various processing parameters including deposition time and annealing temperature. A series of characterization techniques including X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM) and scanning acoustic microscopy (SAM) have been used to analyze the crystallinity and crystal orientation, structural morphology, surface roughness, and acoustic properties of these films. In particular, quantitative analysis of elastic wave propagation in ZnO thin films by scanning acoustic microscopy has been performed for the first time in the present work. It has been shown that the propagation properties of acoustic waves on the surface of ZnO thin films strongly depend on film thickness, crystallinity, and surface roughness. The dispersion properties of surface acoustic waves (SAWs) are observed as a function of ZnO film thickness. The velocities of SAWs range from 5328.3 m/s to 4245.7 m/s with increasing film thickness from 32.5 nm to 2.04 μm, while smoother surface contributes to faster propagation of SAWs.

Investigation of surface acoustic wave propagation in composite pillar based phononic crystals within both local resonance and Bragg scattering mechanism regimes

We investigate the propagation of surface acoustic wave through phononic crystals (PCs) that consist of composite pillars, comprising of a cap metallic pillar and a bottom epoxy pillar on the semi-infinite substrate. The computation of band structures, together with measured transmission spectra, shows the important role of the bottom pillar in engineering the band structures for its Young’s modulus one order of magnitude smaller than that of the cap pillar. We also discuss the conditions of ignoring the influences of the bottom pillar in PCs featuring extremely high cap pillars. We finally modify the height of the bottom pillar to engineer the band structures of PCs, leading to, in both the simulation and experiment, Fano resonance-like transmission in the long wavelength regime.

Hypersound waves at the surface of CdZnTe crystals: The role of surface orientation and scattering at twin boundaries

The patterns of propagation of gigahertz surface acoustic waves (SAWs) are obtained for cuts of CdZnTe single crystals with different crystallographic orientations. By comparing the experimental patterns with the calculated ones, the existence of at least two SAW modes, one of which is a Rayleigh mode, is demonstrated. It is shown that the anisotropy of propagation of different SAW modes makes it possible to determine the local crystallographic orientation of the CdZnTe surface and detect local imperfections of the crystal structure. Strong anisotropic scattering of the Rayleigh wave by coherent twin boundaries is found.

Measurement of surface acoustic wave resonances in ferroelectric domains by microwave microscopy

Surface Acoustic Wave (SAW) resonances were imaged within a closed domain in the ferroelectric LiTaO3 via scanning Microwave Impedance Microscopy (MIM). The MIM probe is used for both SAW generation and measurement, allowing the contact-less measurement within a mesoscopic structure. Measurements taken over a range of microwave frequencies are consistent with a constant acoustic velocity, demonstrating the acoustic nature of the measurement.

A highly attenuating and frequency tailorable annular hole phononic crystal for surface acoustic waves

Surface acoustic wave (SAW) devices are widely used for signal processing, sensing and increasingly for lab-on-a-chip applications. Phononic crystals can control the propagation of SAW, analogous to photonic crystals, enabling components such as waveguides and cavities. Here we present an approach for the realisation of robust, tailorable SAW phononic crystals, based on annular holes patterned in a SAW substrate. Using simulations and experiments, we show that this geometry supports local resonances which create highly attenuating phononic bandgaps at frequencies with negligible coupling of SAWs into other modes, even for relatively shallow features. The enormous bandgap attenuation is up to an order-of-magnitude larger than that achieved with a pillar phononic crystal of the same size, enabling effective phononic crystals to be made up of smaller numbers of elements. This work transforms the ability to exploit phononic crystals for developing novel SAW device concepts, mirroring contemporary progress in photonic crystals.

Development of a Magnetostrictive FeNi Coated Surface Acoustic Wave Current Sensor

A magnetostrictive FeNi-coated surface acoustic wave (SAW)-based current sensor was proposed in this work. The weak remanence and hysteresis effect of the FeNi itself contributes to suppress the asymmetry in sensor response at increasing and decreasing current. The sensor response was simulated by solving the coupled electromechanical field equation in layered structure considering the magnetostrictive effect and an approach of effective dielectric constant. The effects from the aspect ratio and thickness of the FeNi film on sensor response were analyzed to determine the optimal design parameters. Differential oscillation structure was used to form the sensor, in which, the FeNi thin film was deposited along the SAW propagation of the sensor chip by using RF magnetron sputtering. The magnetostrictive effect of the FeNi coating induced by the magnetic loading generates the perturbation in SAW velocity, and corresponding oscillation frequency. High sensitivity of 10.7 KHz/A, good linearity and repeatability, lower hysteresis error of 0.97% were obtained from the developed prototype 150 MHz SAW FeNi coated current sensor.

Passive Downhole Pressure Sensor Based on Surface Acoustic Wave Technology.

A passive surface acoustic wave (SAW) pressure sensor was developed for real-time pressure monitoring in downhole application. The passive pressure sensor consists of a SAW resonator, which is attached to a circular metal diaphragm used as a pressure transducer. While the membrane deflects as a function of pressure applied, the frequency response changes due to the variation of the SAW propagation parameters. The sensitivity and linearity of the SAW pressure sensor were measured to be 8.3 kHz/bar and 0.999, respectively. The experimental results were validated with a hybrid analytical–numerical analysis. The good results combined with the robust design and packaging for harsh environment demonstrated it to be a promising sensor for industrial applications.

Measurement of surface acoustic waves in high-frequency ultrasound: Preliminary results.

Skin lesions change elastic properties near the surface. In the last decades, several non-invasive elastography techniques have been developed for detecting the mechanical properties of tissue. In particular, harmonic elastography is characterized for inducing shear wave propagation by an external vibrator in order to estimate shear modulus. However, near the boundary region, propagation is governed by surface acoustic waves (SAW). This paper combines crawling waves elastography with a high-frequency ultrasound (HFUS) system for the estimation of the SAW-to-shear compensation factor when ultrasound (US) gel is used as coupling interface. Experiments explore the SAWspeed in a homogeneous phantom with a solid-water interface in order to corroborate theoretical findings. Subsequently, experiments in a solid-US gel interface are conducted in order to find the correct compensation factor. Preliminary results suggest that SAW propagation can be detected using HFUS, and shear velocity maps can be generated by applying the estimated empirical correction factor. This study will potentially avoid the underestimation of shear modulus when using SAW-based HFUS elastography which is promising for the better diagnosis of skin diseases.

Generation of broadband surface acoustic waves using a dual temporal-spatial chirp method

Wideband surface acoustic wave (SAW) generation with a spatial chirp-based interdigital transducer was optimized for non-destructive characterization and testing of coatings and thin layers. The use of impulse temporal excitation (Dirac-type negative pulse) leads to a wide band emitter excitation but with significantly limited SAW output amplitudes due to the piezoelectric crystal breakdown voltage. This limitation can be circumvented by applying a temporal chirp excitation corresponding in terms of frequency band and duration to the spatial chirp transducer configuration. This dual temporal-spatial chirp method was studied in the 20 to 125 MHz frequency range and allowed to obtain higher SAW displacement amplitudes with an excitation voltage lower than that of the impulse excitation.

Evaluation of piezoelectric Ta2O5 thin films deposited on SrTiO3 substrates

Tantalum pentoxide (Ta2O5) piezoelectric thin films were deposited on (100) and (110) planes of strontium titanate (SrTiO3) substrates using an RF magnetron sputtering system. The crystallinity and Rayleigh-type surface acoustic wave propagation properties of the thin films were evaluated. The possibility that the Ta2O5 thin films were crystallized to orthorhombic Ta2O5 on SrTiO3 substrates by providing a buffer layer deposited without applying O2 radical power was demonstrated. From measured pole figures, it is considered that the crystalline Ta2O5/SrTiO3(100) sample has two lattice arrangements orthogonal to each other, and the crystalline Ta2O5/SrTiO3(110) sample has a single lattice arrangement. For a normalized film thickness h/λ of 0.45, the propagation loss for the deposition on SrTiO3(110) was 0.02 dB/λ, whereas that for the X-axis-oriented Ta2O5 thin film on SiO2 substrate was 0.21 dB/λ. Unfortunately, the coupling factor of the crystalline thin film was less than 0.3% for h/λ ranging from 0.29 to 0.45.

Influence of coupling with shear horizontal surface acoustic wave on lateral propagation of Rayleigh surface acoustic wave on 128°YX-LiNbO3

In this paper, we investigate the impact of the coupling with shear horizontal (SH) surface acoustic wave (SAW) on the propagation of Rayleigh SAW in periodic grating structures on 128°YX-LiNbO3. First, the frequency dispersion behavior with longitudinal and lateral wavenumbers of Rayleigh SAW is calculated using the finite element method (FEM) software COMSOL. It is shown that the coupling causes (1) the satellite stopband and (2) variation of the anisotropy factor. It is also shown these phenomena remain even when the electromechanical coupling factor of SH SAW is zero. Then, the extended thin plate model which can take coupling between two SAWs into account, is applied to simulate the result of FEM. Good agreement between these results indicated that the mechanical coupling is responsible for these two phenomena. Finally, including electrical excitation and detection, the model is applied to the infinitely long interdigital transducer (IDT) structure and the calculated result is compared with that obtained by the three-dimensional FEM. The excellent agreement of both results confirms the effectiveness of the extended thin plate model.

Extra two new piezoelectromagnetic SH-SAWs with dramatic dependence on small electromagnetic constant

It is expected that this theoretical report finalizes the research regarding to the shear-horizontal surface acoustic wave (SH-SAW) propagation along the suitable surface of the transversely isotropic (6mm) piezoelectromagnetics. This report examines extra two new SH-SAWs, the existence of which dramatically depends on the small electromagnetic constant that is responsible for the magnetoelectric effect. This study also provides some comparison with the previously obtained theoretical results and the phenomenon called the Goldstone excitation. The obtained results can be useful for educational purposes, creation of novel technical devices based on the magnetoelectric effect that can find applications in spintronics, further theoretical treatments of the SH-wave propagation in plates, nondestructive testing and evaluation of apt surfaces and plates, etc.

Modeling and Analysis of Lateral Propagation of Surface Acoustic Waves Including Coupling Between Different Waves.

This paper discusses lateral propagation of surface acoustic waves (SAWs) in periodic grating structures when two types of SAWs exist simultaneously and are coupled. The thin plate model proposed by the authors is extended to include the coupling between two different SAW modes. First, lateral SAW propagation in an infinitely long periodic grating is modeled and discussed. Then, the model is applied to the Al-grating/42° YX-LiTaO3 (42-LT) substrate structure, and it is shown that the slowness curve shape changes from concave to convex with the Al grating thickness. The transverse responses are also analyzed on an infinitely long interdigital transducer on the structure, and good agreement is achieved between the present and the finite-element method analyses. Finally, SAW resonators are fabricated on the Cu grating/42-LT substrate structure, and it is experimentally verified that the slowness curve shape of the shear horizontal SAW changes with the Cu thickness.

A concept of wireless and passive very-high temperature sensor

There is a need for sensors capable operating at temperatures above 1000 °C. We describe an innovative sensor that might achieve this goal. The sensor comprises two main elements: a thermocouple and a surface acoustic wave (SAW) strain sensor. The cold junction of the thermocouple is electrically connected to a highly piezoelectric thin layer, deposited on top of a SAW substrate. In operation, the voltage generated by the temperature gradient between the hot (>1000 °C) and cold junction (<350 °C) generates a strain field in the layer, which is mechanically transmitted to the substrate. This modifies the SAW propagation conditions and therefore the sensors' radiofrequency response. The change depends on the applied voltage and thus on the hot junction temperature. As SAW devices are passive elements that can be remotely interrogated, it becomes possible to infer the hot junction temperature from the radiofrequency response, i.e., to remotely read temperatures above 1000 °C, without embedded electronics. In this paper, we demonstrate the feasibility of this concept, using AlN layers deposited on Y-Z Lithium Niobate (LN). The achieved sensitivity of 80 Hz/V at 400 MHz is constant over a wide voltage range. Numerical simulations were performed to compute the main properties of the demonstrators and suggest optimization strategies. Improvements are expected from the use of stronger piezoelectric layers, such as AlScN or Pb(Ti,Zr)O3 (PZT), which could increase the sensitivity by factors of 3 and 20, as estimated from their transverse piezoelectric coefficients. As a first step in this direction, thin PZT layers have been deposited on Y-Z LN.

Huygens-Fresnel Acoustic Interference and the Development of Robust Time-Averaged Patterns from Traveling Surface Acoustic Waves.

Periodic pattern generation using time-averaged acoustic forces conventionally requires the intersection of counterpropagating wave fields, where suspended micro-objects in a microfluidic system collect along force potential minimizing nodal or antinodal lines. Whereas this effect typically requires either multiple transducer elements or whole channel resonance, we report the generation of scalable periodic patterning positions without either of these conditions. A single propagating surface acoustic wave interacts with the proximal channel wall to produce a knife-edge effect according to the Huygens-Fresnel principle, where these cylindrically propagating waves interfere with classical wave fronts emanating from the substrate. We simulate these conditions and describe a model that accurately predicts the lateral spacing of these positions in a robust and novel approach to acoustic patterning.

Elasticity study of textured barium strontium titanate thin films by X-ray diffraction and laser acoustic waves

Ba0.65Sr0.35TiO3 (BST) thin films of 300 nm were deposited on Pt(111)/TiO2/SiO2/Si(001) substrates by radio frequency magnetron sputtering. Two thin films with different (111) and (001) fiber textures were prepared. X-ray diffraction was applied to measure texture. The raw pole figure data were further processed using the MTEX quantitative texture analysis software for plotting pole figures and calculating elastic constants and Young’s modulus from the orientation distribution function (ODF) for each type of textured fiber. The calculated elastic constants were used in the theoretical studies of surface acoustics waves (SAW) propagating in two types of multilayered BST systems. Theoretical dispersion curves were plotted by the application of the ordinary differential equation (ODE) and the stiffness matrix methods (SMM). A laser acoustic waves (LAW) technique was applied to generate surface acoustic waves (SAW) propagating in the BST films, and from a recursive process, the effective Young’s modulus are determined for the two samples. These methods are used to extract and compare elastic properties of two types of BST films, and quantify the influence of texture on the direction-dependent Young’s modulus.

Non-contact detection of low carbon steel using laser generated ultrasound at high temperature

Theoretical and experimental studies on non-contact detection of high temperature metal using laser ultrasound are carried out. Based on the theory of laser ultrasound, effects of high temperature on the laser generated surface acoustic wave (SAW) are discussed. Results of simulation show that the velocity and the amplitude of SAW will decrease with the increase of the temperature. An experimental system was set up, which in a non-contact mode, by utilizing a point laser source to generate the SAW, and an interferometer to detect the SAW signal. The corresponding experimental results have verified the feasibility of the numerical simulation and the achieved result of the relationship between the velocity of SAW and the temperature. The research findings provide a potential application for online monitoring of high temperature metal.