Using active carbon-silica gel as adsorbent and sodium diethyldithiocarbamate (NaDDTC) as chelating reagent in a flow injection system, an ICP-AES method has been developed for preconcentration and determination of trace metallic elements in high purity rare earth oxides. The experimental parameters such as pH, flow rate, amount of adsorbent, length of reaction coil and eluent acidity were optimized. At pH 4.6 Al,Cr,Cu,Fe,Pb,V,Zn could be preconcentrated, and subsequently determined by ICP-AES. This method can eliminate matrix effects. Its enrichment factors were 8.1–12.6 with detection limits in the ng/mL range and RSD of 2.3–5.0. This method was applied to the analysis of high purity of La2O3 and Eu2O3 with satisfactory results.