Specimen of Fe-18Cr(-10Ni) (wt.-%) were isothermally oxidized in dry and wet high p(O2) gas at 900°C. The morphology and microstructural evolution of the chromia scales formed were analysed by SEM-EBSD. At high pO2 test gas containing O2 and H2O, the pO2 is independent of the H2O content of the test gas. However, both types of oxygen species, i.e. O2 as well as H2O contribute to the chromia scaling reaction. The effect of specimen thickness on chromia scaling allows the change of the concentration of the intrinsic defects and their diffusivities in thermally grown chromia scales independently from the test gas applied. Chromia scales are under pressure during scale growth. For thermodynamic reasons the concentration and diffusivity of the intrinsic, native defects in oxides under hydro-static pressure varies with the amount of pressure applied. Ion beam polished oxide cross-sections were analysed in terms of oxide grain growth and nucleation rates of new oxide at the oxide-gas interface. Chromia scales formed on the various substrates at high p(O2) test gas grew at different rates, and microstructures formed on Fe18Cr(-10Ni) differ in grain shape and size. The chromia growth kinetic was found to be depending on the thickness of the specimens used, the H2O content of the gas, and its Ni content. The scale growth mechanism consists of two interlinked levels. At the meta-level oxide nucleation and oxide grain growth are affected by the cation flux in the oxide scale formed and the nature of the oxygen species in the gas. This fixes the number, size and shape of the oxide grains as well as the number of oxide grain boundaries available as short-circuit diffusion paths. The lattice level denotes the atomic level. Hereby the cation flux in the single grain by lattice diffusion and cation vacancy condensation are linked. The defect structure in the oxide lattice is important. The factors affecting it are the Cr diffusion in the substrate and the presence of Ni in the alloy, local p(O2), H-defects and oxide growth stress. The experimental findings will be discussed with strong focus on the oxide growth mechanism, the chromia microstructure of the scales formed under the various conditions and the concentration and mobility of the native defects in the chromia scales and its interactions with H-containing species originating from water vapour in the test gas. Furthermore, the role of Fe as base and Ni as alloying element in the metal substrate will be discussed. This is done by considering the differences between the Ni-Cr-O and Fe-Cr-O phase diagrams and the consequence of the existence of the Fe3+ ion on the miscibility of the oxides formed by the various cations.