The changes in the gap state distributions produced by light soaking in undoped a-Si:H prepared by remote-plasma chemical vapour deposition were determined from the simultaneous measurement of thermally stimulated conductivity and low-intensity photoconductivity. The temperature dependence and the changes of the product of the microscopic mobility and the recombination lifetime, μ m τ r, produced by light soaking were also determined. In the gap profiles in the energy interval between 0.2 and 0.8 eV below the conduction band edge, at least two electron traps are found at 0.30 ± 0.02 and 0.54 ± 0.02 eV. The density of the trap located at 0.54 eV due to the doubly occupied dangling bond, D −, is increased by light soaking together with a simultaneous decrease of traps located at 0.30 eV due to the weak bonds. These effects are interpreted as defect creation and annealing, respectively. The temperature dependence of the μ m τ r product is found to be due to that of μ m, and thermal quenching and light quenching of μ m τ r are mainly due to those of τ r.
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