The technique of GaAs ionic sputtering in the ammonia environment using crossed electrical and magnetic fields for gallium nitride structures formation on the GaSe substrates, with an aim to create sensors of ultraviolet radiation, is proposed. The optimization of reactor linear dimensions resulting in homogenous gallium nitride films production have been performed. The results of X-ray phase analysis of GaSe GaN heterostructures revealed polycrystalline hexagonal gallium nitride film on the samples surface. In particular the (110) plane peak is present at the patterns which corresponds to hexagonal GaN. The cathodoluminescent properties of GaSe GaN heterostructures have been studied.
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