This research investigates the optimization of the performance of a capacitive-based microelectromechanical systems (MEMS) shaft monitoring accelerometer using a porous soft dielectric material with high polarization capability and low Young’s modulus. The nonlinear governing equations of a microbeam with a proof mass coupled with the squeeze motion equation of the polymeric dielectric material excited by shaft vibrations are extracted and solved in both the spatial and temporal domains. The studied model considers the stiffness, dissipative, and inertial effects of the polymeric material and incorporates porosity as a displacement-dependent variable, which introduces an additional nonlinearity. After discretizing the coupled nonlinear differential equations using the Galerkin method, the response in the frequency domain is obtained by applying an energy balance method, where the coefficients of the Fourier expansion of the response are found by arc-length continuation through a physical gradient descent learning-based approach method. The occurrence of secondary and primary resonances in different harmonic responses is studied for different harmonic acceleration inputs. The equivalent rigidity of the design is investigated for different shaft frequency magnitudes and different proof mass geometries. The effect of the initial porosity volume fraction of the elastomeric dielectric material on the dynamic response of the accelerometer is also examined. The sensor’s sensitivity is dependent on its geometry and properties and can vary based on the structure’s material parameters. Consequently, the selection of different geometries and materials may result in either an improvement or a deterioration of the sensor’s performance.