Reaction-bonded silicon carbide (RB-SiC) ceramics have been produced using advanced technology for the production of space mirrors. Changing the volume content of SiC (from 78 to 93 %) in the ceramic's composition allows for improved the mechanical properties, which is achieved by a combination of the SiC and Si phases properties. In this work, a thorough study of the structure and micromechanical properties of individual SiC and Si phases for RB-SiC ceramics (with a SiC content of 78–93 vol%) was carried out at the micro- and nanolevel using atomic force microscopy and nanoindentation. The studies have shown the crack resistance limit each phase (an important factor for RB-SiC space mirrors) under mechanical loads, after which microcracks appear (sources of further degradation and destruction). The surface morphology, deformation area and crack propagation in each phase after exposure to mechanical load during indentation were studied using atomic force microscopy. Nanomechanical mapping of elastic modulus and microhardness on the surface, analysis of boundaries between phases (SiC and Si), assessment of mutual influence of phases and determination of micromechanical properties were carried out using the nanoindentation method. The fracture toughness KIC was determined using an improved indentation method with visualization of the deformation areas using atomic force microscopy. The highest values of microhardness H, elastic modulus E and fracture toughness KIC on the SiC and Si phases were obtained on a ceramic sample with 93 vol % SiC: for the SiC phase – E=486 GPa, H=35.6 GPa, KIC=5.03 MPa m1/2, for the Si phase – E=205 GPa, H=12.2 GPa, KIC=2.73 MPa m1/2. This study demonstrated the efficiency and possibility of using the atomic force microscopy and nanoindentation to determine the micromechanical properties of ceramics at the micro- and nanolevel.