For Focused Electron Beam Induced Deposition Research Articles

Electron-induced deposition using Fe(CO)4MA and Fe(CO)5 - effect of MA ligand and process conditions.

The electron-induced decomposition of Fe(CO)4MA (MA = methyl acrylate), which is a potential new precursor for focused electron beam-induced deposition (FEBID), was investigated by surface science experiments under UHV conditions. Auger electron spectroscopy was used to monitor deposit formation. The comparison between Fe(CO)4MA and Fe(CO)5 revealed the effect of the modified ligand architecture on the deposit formation in electron irradiation experiments that mimic FEBID and cryo-FEBID processes. Electron-stimulated desorption and post-irradiation thermal desorption spectrometry were used to obtain insight into the fate of the ligands upon electron irradiation. As a key finding, the deposits obtained from Fe(CO)4MA and Fe(CO)5 were surprisingly similar, and the relative amount of carbon in deposits prepared from Fe(CO)4MA was considerably less than the amount of carbon in the MA ligand. This demonstrates that electron irradiation efficiently cleaves the neutral MA ligand from the precursor. In addition to deposit formation by electron irradiation, the thermal decomposition of Fe(CO)4MA and Fe(CO)5 on an Fe seed layer prepared by EBID was compared. While Fe(CO)5 sustains autocatalytic growth of the deposit, the MA ligand hinders the thermal decomposition in the case of Fe(CO)4MA. The heteroleptic precursor Fe(CO)4MA, thus, offers the possibility to suppress contributions of thermal reactions, which can compromise control over the deposit shape and size in FEBID processes.

Direct Writing of Cobalt Silicide Nanostructures Using Single-Source Precursors.

Two new precursors for focused electron beam-induced deposition (FEBID) of cobalt silicides have been synthesized and evaluated. The H3SiCo(CO)4 and H2Si(Co(CO)4)2 single-source precursors retain the initial metal ratios and show low sensitivity to changes in the FEBID parameters such as acceleration voltage, beam current, and precursor pressure. The precursors allow the direct writing of material containing ∼55 to 60 at % total metal/metalloid content combined with high growth rates. During the deposition process an average of ∼80% of the carbonyl ligands are cleaved off in these planar deposits. Postgrowth electron curing does not change the deposits' composition, but resistivities decrease after the curing procedure. Temperature-dependent electrical properties indicate the presence of a granular metal for both cured samples and the as-grown Co2Si deposit, while the as-grown CoSi material is on the insulating side of the metal-insulator transition. The observed magnetoresistance behavior is indicative of tunneling magnetoresistance and is substantially reduced upon postgrowth irradiation treatment.

Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition.

Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or iPr), and of the ancillary ligand X (Cl, Br, I, or CF3). The seven complexes were tested as FEBID precursors in an on-substrate custom setup. The effect of the substitutions on deposit composition and growth rate indicates that the most suitable organic ligand for the gold precursor is triazole-based, with the best deposit composition of 15 atom % gold, while the most suitable anionic ligand is the trifluoromethyl group, leading to a growth rate of 1 × 10−2 nm3/e−.

Electron beam-induced deposition of platinum from Pt(CO)2Cl2 and Pt(CO)2Br2.

Two platinum precursors, Pt(CO)2Cl2 and Pt(CO)2Br2, were designed for focused electron beam-induced deposition (FEBID) with the aim of producing platinum deposits of higher purity than those deposited from commercially available precursors. In this work, we present the first deposition experiments in a scanning electron microscope (SEM), wherein series of pillars were successfully grown from both precursors. The growth of the pillars was studied as a function of the electron dose and compared to deposits grown from the commercially available precursor MeCpPtMe3. The composition of the deposits was determined using energy-dispersive X-ray spectroscopy (EDX) and compared to the composition of deposits from MeCpPtMe3, as well as deposits made in an ultrahigh-vacuum (UHV) environment. A slight increase in metal content and a higher growth rate are achieved in the SEM for deposits from Pt(CO)2Cl2 compared to MeCpPtMe3. However, deposits made from Pt(CO)2Br2 show slightly less metal content and a lower growth rate compared to MeCpPtMe3. With both Pt(CO)2Cl2 and Pt(CO)2Br2, a marked difference in composition was found between deposits made in the SEM and deposits made in UHV. In addition to Pt, the UHV deposits contained halogen species and little or no carbon, while the SEM deposits contained only small amounts of halogen species but high carbon content. Results from this study highlight the effect that deposition conditions can have on the composition of deposits created by FEBID.

Theoretical Analysis of Fe K-Edge XANES on Iron Pentacarbonyl.

Iron pentacarbonyl (Fe(CO)5) is a versatile material that is utilized as an inhibitor of flame, shows soot suppressibility, and is used as a precursor for focused electron-beam-induced deposition (FEBID). X-ray absorption near-edge structure (XANES) of the K edge, which is a powerful technique for monitoring the oxidation states and coordination environment of metal sites, can be used to gain insight into Fe(CO)5-related reaction mechanisms in in situ experiments. We use a finite difference method (FDM) and molecular-orbital-based time-dependent density functional theory (TDDFT) calculations to clarify the Fe K-edge XANES features of Fe(CO)5. The two pre-edge peaks P1 and P2 are mainly the Fe(1s) → Fe–C(σ*) and Fe(1s) → Fe–C(π*) transitions, respectively. When the geometry transformed from D3h to C4v symmetry, a ∼30% decrease of the pre-edge P2 intensity was observed in the simulated spectra. This implies that the π bonding of Fe and CO is sensitive to changes in geometry. The following rising edge and white line regions are assigned to the Fe(1s) → Fe(4p)(mixing C(2p)) transitions. Our results may provide useful information to interpret XANES spectra variations of in situ reactions of metal–CO or similar compounds with π acceptor ligandlike metal–CN complexes.

Design, Synthesis, and Evaluation of CF3AuCNR Precursors for Focused Electron Beam-Induced Deposition of Gold.

The Au(I) complexes CF3AuCNMe (1a) and CF3AuCN tBu (1b) were investigated as Au(I) precursors for focused electron beam-induced deposition (FEBID) of metallic gold. Both 1a and 1b are sufficiently volatile for sublimation at 125 ± 1 mTorr in the temperature range of roughly 40-50 °C. Electron impact mass spectra of 1a-b show gold-containing ions resulting from fragmenting the CF3 group and the CNR ligand, whereas in negative chemical ionization of 1a-b, the major fragment results from dealkylation of the CNR ligand. Steady-state depositions from 1a in an Auger spectrometer produce deposits with a similar gold content to the commercial precursor Me2Au(acac) (3) deposited under the same conditions, while the gold content from 1b is less. These results enable us to suggest the likely fate of the CF3 and CNR ligands during FEBID.

A novel copper precursor for electron beam induced deposition.

A fluorine free copper precursor, Cu(tbaoac)2 with the chemical sum formula CuC16O6H26 is introduced for focused electron beam induced deposition (FEBID). FEBID with 15 keV and 7 nA results in deposits with an atomic composition of Cu:O:C of approximately 1:1:2. Transmission electron microscopy proved that pure copper nanocrystals with sizes of up to around 15 nm were dispersed inside the carbonaceous matrix. Raman investigations revealed a high degree of amorphization of the carbonaceous matrix and showed hints for partial copper oxidation taking place selectively on the surfaces of the deposits. Optical transmission/reflection measurements of deposited pads showed a dielectric behavior of the material in the optical spectral range. The general behavior of the permittivity could be described by applying the Maxwell–Garnett mixing model to amorphous carbon and copper. The dielectric function measured from deposited pads was used to simulate the optical response of tip arrays fabricated out of the same precursor and showed good agreement with measurements. This paves the way for future plasmonic applications with copper-FEBID.

Electron Induced Surface Reactions of HFeCo3(CO)12, a Bimetallic Precursor for Focused Electron Beam Induced Deposition (FEBID)

The use of bimetallic precursors in focused electron beam induced deposition (FEBID) allows mixed metal nanostructures with well-defined metal ratios to be generated in a single step process. HFeCo3(CO)12 is an example of one such bimetallic precursor that has previously been shown to form deposits with unusually high metal content (>80%) as compared to that of typical FEBID deposits (<30% metal content). To better understand the elementary bond breaking steps involved in FEBID of HFeCo3(CO)12, we have employed a UHV surface science approach to study the effect of electron irradiation on nanometer thick films of HFeCo3(CO)12 molecules. Using a combination of in situ X-ray photoelectron spectroscopy and mass spectrometry, we observed that the initial step of electron induced HFeCo3(CO)12 dissociation is accompanied by desorption of ∼75% of the CO ligands from the precursor. A comparison with recent gas phase studies of HFeCo3(CO)12 indicates that this process is consistent with a dissociative ionization pr...

Response under low-energy electron irradiation of a thin film of a potential copper precursor for focused electron beam induced deposition (FEBID).

Background: Focused electron beam induced deposition (FEBID) allows for the deposition of free standing material within nanometre sizes. The improvement of the technique needs a combination of new precursors and optimized irradiation strategies to achieve a controlled fragmentation of the precursor for leaving deposited material of desired composition. Here a new class of copper precursors is studied following an approach that probes some surface processes involved in the fragmentation of precursors. We use complexes of copper(II) with amines and perfluorinated carboxylate ligands that are solid and stable under ambient conditions. They are directly deposited on the surface for studying the fragmentation with surface science tools.Results: Infrared spectroscopy and high-resolution electron energy loss spectroscopy (HREELS) are combined to show that the precursor is able to spontaneously lose amine ligands under vacuum. This loss can be enhanced by mild heating. The combination of mass spectrometry and low-energy electron irradiation (0–15 eV) shows that full amine ligands can be released upon irradiation, and that fragmentation of the perfluorinated ligands is induced by electrons of energy as low as 1.5 eV. Finally, the cross section for this process is estimated from the temporal evolution in the experiments on electron-stimulated desorption (ESD).Conclusion: The release of full ligands under high vacuum and by electron irradiation, and the cross section measured here for ligands fragmentation allow one to envisage the use of the two precursors for FEBID studies.

Electron induced surface reactions of (η5-C5H5)Fe(CO)2Mn(CO)5, a potential heterobimetallic precursor for focused electron beam induced deposition (FEBID).

Electron-induced surface reactions of (η5-C5H5)Fe(CO)2Mn(CO)5 were explored in situ under ultra-high vacuum conditions using X-ray photoelectron spectroscopy and mass spectrometry. The initial step involves electron-stimulated decomposition of adsorbed (η5-C5H5)Fe(CO)2Mn(CO)5 molecules, accompanied by the desorption of an average of five CO ligands. A comparison with recent gas phase studies suggests that this precursor decomposition step occurs by a dissociative ionization (DI) process. Further electron irradiation decomposes the residual CO groups and (η5-C5H5, Cp) ligand, in the absence of any ligand desorption. The decomposition of CO ligands leads to Mn oxidation, while electron stimulated Cp decomposition causes all of the associated carbon atoms to be retained in the deposit. The lack of any Fe oxidation is ascribed to either the presence of a protective carbonaceous matrix around the Fe atoms created by the decomposition of the Cp ligand, or to desorption of both CO ligands bound to Fe in the initial decomposition step. The selective oxidation of Mn in the absence of any Fe oxidation suggests that the fate of metal atoms in mixed-metal precursors for focused electron beam induced deposition (FEBID) will be sensitive to the nature and number of ligands in the immediate coordination sphere. In related studies, the composition of deposits created from (η5-C5H5)Fe(CO)2Mn(CO)5 under steady state deposition conditions, representative of those used to create nanostructures in electron microscopes, were measured and found to be qualitatively consistent with predictions from the UHV surface science studies.

Modelling focused electron beam induced deposition beyond Langmuir adsorption.

In this work, the continuum model for focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion are investigated and compared under a wide range of conditions. The different growth regimes observed are fully explained by relative changes in FEBID characteristic frequencies. Additionally, we present a set of FEBID frequency maps where growth rate and surface coverage are plotted as a function of characteristic timescales. From the analysis of Langmuir, as well as homogeneous and heterogeneous multilayer maps, we infer that three types of growth regimes are possible for FEBID under no diffusion, resulting into four types of adsorption isotherms. We propose the use of these maps as a powerful tool for the analysis of FEBID processes.

Usage of cobalt oxide particles as precursor for FEBID: Ab initio study

The investigation of the fragmentation of Co18O n (n = 0–17) particles is presented with the aim to demonstrate that the mentioned particles could be used as precursors for focused electron beam induced deposition (FEBID). The shape of Co18 and Co18O n particles is confirmed. The study validates that oxygen atoms stabilize Co nanoparticles. The thermal and chemical stabilities, toxicity, hardness and softness of the particles under study are determined. It is found that the absorption of oxygen atoms could occur when the number of oxygen atoms is larger than the number of external Co atoms. A low volatility and high sticking on the surface probability of Co18O17 particles are proposed referring to the obtained results. The results of the calculated susceptibility exhibit Co18O n particles as paramagnetics with some exceptions. The value of magnetic susceptibility of Co18O12 is the largest one among the particle under investigation. Referring to the obtained results several most effective reactions of fragmentation are proposed and their appearance energy is evaluated. The obtained results also evidenced that Co18O17 nanoparticle shows great potential to be used as a precursor for FEBID.

High Purity Tungsten Nanostructures via Focused Electron Beam Induced Deposition with Carrier Gas Assisted Supersonic Jet Delivery of Organometallic Precursors

A substantially enhanced purity of tungsten nanostructures, with up to 95% of metal content relative to carbon contaminants with no postprocessing, is achieved by using a supersonic inert carrier gas jet in the continuum flow regime to deliver the organometallic precursor for focused electron beam induced deposition (FEBID). Through impact-enhanced desorption of residual organic ligands at the deposition site, high kinetic energy of the gas jet assists in completing the secondary electron induced dissociation of precursor molecules, resulting in both increased metal purity and enhanced deposit growth rate. The inert gas jet at low Knudsen numbers also serves as a carrier gas to increase precursor flux to the substrate. Operating in the continuum flow regime reduces jet spreading and allows the use of smaller diameter nozzles to increase localization of precursor delivery to the deposition site. This drastic increase in localized precursor flux to the substrate is shown to compensate for the diminished sti...

Surface excitations in the modelling of electron transport for electron-beam-induced deposition experiments.

The aim of the present overview article is to raise awareness of an essential aspect that is usually not accounted for in the modelling of electron transport for focused-electron-beam-induced deposition (FEBID) of nanostructures: Surface excitations are on the one hand responsible for a sizeable fraction of the intensity in reflection-electron-energy-loss spectra for primary electron energies of up to a few kiloelectronvolts and, on the other hand, they play a key role in the emission of secondary electrons from solids, regardless of the primary energy. In this overview work we present a general perspective of recent works on the subject of surface excitations and on low-energy electron transport, highlighting the most relevant aspects for the modelling of electron transport in FEBID simulations.

Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposure

In this work, we review the single-adsorbate time-dependent continuum model for focused electron beam-induced deposition (FEBID). The differential equation for the adsorption rate will be expressed by dimensionless parameters describing the contributions of adsorption, desorption, dissociation, and the surface diffusion of the precursor adsorbates. The contributions are individually presented in order to elucidate their influence during variations in the electron beam exposure time. The findings are condensed into three new scaling laws for pulsed exposure FEBID (or FEB-induced etching) relating the lateral resolution of deposits or etch pits to surface diffusion and electron beam exposure dwell time for a given adsorbate depletion state.