Gold(I) N-heterocyclic carbene precursors for focused electron beam-induced deposition.

Cristiano Glessi,Mats Tilset,Cornelis W Hagen,Aya Mahgoub

doi:10.3762/bjnano.12.21

Abstract

Seven gold(I) N-heterocyclic carbene (NHC) complexes were synthesized, characterized, and identified as suitable precursors for focused electron beam-induced deposition (FEBID). Several variations on the core Au(NHC)X moiety were introduced, that is, variations of the NHC ring (imidazole or triazole), of the alkyl N-substituents (Me, Et, or iPr), and of the ancillary ligand X (Cl, Br, I, or CF3). The seven complexes were tested as FEBID precursors in an on-substrate custom setup. The effect of the substitutions on deposit composition and growth rate indicates that the most suitable organic ligand for the gold precursor is triazole-based, with the best deposit composition of 15 atom % gold, while the most suitable anionic ligand is the trifluoromethyl group, leading to a growth rate of 1 × 10−2 nm3/e−.

Highlights

Focused electron beam-induced deposition (FEBID) is a nanofabrication technique that allows for the growth of threedimensional free-standing nanostructures [1,2,3,4]
The properties of a FEBID precursor molecule are crucial for the deposition process
The compounds were tested as FEBID precursors on a heated substrate equipped with an on-substrate precursor reservoir

Summary

Introduction

Focused electron beam-induced deposition (FEBID) is a nanofabrication technique that allows for the growth of threedimensional free-standing nanostructures [1,2,3,4]. This mask-less nanofabrication technique uses gaseous molecules as precursors. The technique has been employed in applications such as the fabrication of nanoconnectors [5], extreme ultra-violet lithography (EUVL) mask repair [6], AFM probe tips [7,8,9], nanodevices for plasmonics [10], gas sensors [11,12], optoelectronics [13], and magnetic [14,15] and biomedical applications [16].

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