It has been indicated by the LEED studies that the atomic arrangement of the W{001} surface at low temperatures is the c(2 × 2) structure rather than a simple (1 × 1) structure and the different models have been proposed. A field ion microscope has demonstrated that its atomically high resolution can clearly depict the arrangements of Ga and Sn atoms deposited on W and Mo surfaces replicating the arrangements of the substrate atoms. Therefore, it has been realized that the direct observation of the arrangement of the deposited atoms may provide new information on the atomic arrangement of the w{001} planes. Ga showed the (1 × 1) structure on the {001} planes indicating that the arrangement of the deposited Ga atoms is the pseudomorphic layer replicating the underneath W and Mo surface. The (1 × 1) Ga structure was retained even if the field evaporation of the Ga layer proceeded reducing the size of the planes. Sn also formed a pseudomorphic layer on a W surface but the arrangement changed to the c(2 × 2) structure as the field evaporation of the deposited Sn layer proceeded. The observed arrangement change is surprisingly similar to that of W atoms on the {001} planes which has been explained as the result of the preferential field evaporation of alternate surface atoms possibly caused by the periodic perpendicular shifts of the alternate surface atoms. The atomic shifts parallel to the W {001} planes were not resolved in the present field ion images. The stable Ga arrangement and the arrangement change of Sn and W indicate that the arrangement of surface atoms observed by the field ion microscopy may be a faithful reflection of the small difference in a minute atom shift due to the difference in the binding states of the surface atoms.