Fabrication Of Metasurfaces Research Articles

Self-Assembly Hybrid Manufacture of Nanoarrays for Metasurfaces.

The development of metasurfaces necessitates the rapid fabrication of nanoarrays on diverse substrates at large scales, the preparation of patterned nanoarrays on both planar and curved surfaces, and even the creation of nanoarrays on prefabricated structures to form multiscale metastructures. However, conventional fabrication methods fall short of these rigorous requirements. In this work, a novel self-assembly hybrid manufacturing (SAHM) method is introduced for the rapid and scalable fabrication of shape-controllable nanoarrays on various rigid and flexible substrates. This method can be easily integrated with other fabrication techniques, such as lithography and screen printing, to produce patterned nanoarrays on both planar and non-developable surfaces. Utilizing the SAHM method, nanoarrays are fabricated on prefabricated micropillars to create multiscale pillar-nanoarray metastructures. Measurements indicate that these multiscale metastructures can manipulate electromagnetic waves across a range of wavelengths. Therefore, the SAHM method demonstrates the potential of multiscale structures as a new paradigm for the design and fabrication of metasurfaces.

Enhancement of second-harmonic generation in a lithium niobate metasurface by exploring the bound states in the continuum

The nonlinear lithium niobate (LiNbO3), characterized by transparency across a broad spectral range from ultraviolet to mid-infrared, stands out as an ideal material for second-harmonic generation (SHG). The concept of bound states in the continuum (BIC) represents a non-radiative mode embedded within the radiation continuum, offering the capability to confine the electromagnetic field within the nanostructure. Here, we propose the design of a LiNbO3 metasurface utilizing the BIC mechanism to enhance SHG at fundamental wavelengths above 2 µm, which injects new thoughts into the field of integrated optics and on-chip photonics. Notably, we rigorously accounted for the influence of the side-wall angle θ and the corner rounding radius R of the LiNbO3 metasurface, which arises from fabrication tolerances. Considering those influences in the simulation, we achieved a quasi-BIC (q-BIC) with a quality factor (Q-factor) up to 1.44 × 105. Moreover, by considering the depleted pump model, the absolute efficiency of SHG reached 4.09% with a corresponding normalized efficiency of 8.19 × 10−10m2/W under a radiation intensity of 5 kW/cm2. Our research aims to establish a predictive framework through numerical simulations, specifically addressing realistic fabrication problems. This approach is intended to optimize the parameters for LiNbO3 metasurface fabrication, ensuring that the subsequent experiment efforts are efficient. Our findings provide an approach to predicting the optical response in actual structures and inspire new applications in photonics.

Designer spin-orbit superlattices: symmetry-protected Dirac cones and spin Berry curvature in two-dimensional van der Waals metamaterials

The emergence of strong relativistic spin-orbit effects in low-dimensional systems provides a rich opportunity for exploring unconventional states of matter. Here, we present a route to realise tunable relativistic band structures based on the lateral patterning of proximity-induced spin-orbit coupling. The concept is illustrated on a patterned graphene–transition metal dichalcogenide heterostructure, where the spatially periodic spin-orbit coupling induces a rich mini-band structure featuring massless and massive Dirac bands carrying large spin Berry curvature. The envisaged systems support robust and gate-tunable spin Hall responses driven by the quantum geometry of mini-bands, which can be tailored through metasurface fabrication methods and twisting effects. These findings open pathways to two-dimensional quantum material design and low-power spintronic applications.

Facile fabrication of THz metasurfaces by a spatially shaped femtosecond laser printing system

Terahertz (THz) metasurfaces provide unprecedented abilities to realize versatile THz wavefronts manipulations. Nevertheless, these high degree of freedom, non-periodic, densely arranged subwavelength unit cells pose numerous extreme parameter requirements for the fabrication of metasurfaces, presenting significant challenges to their practical application. Herein, a spatial shaping femtosecond laser printing system, based on spatial light modulation (SLM), is proposed for the creation of THz metasurfaces. Through programming the SLM with a sequence of computer-generated holograms (CGH) corresponding to C-shaped Bessel beams with varying opening angles and orientation angles, the C-shaped slit resonant rings with different geometric parameters—fundamental units of the metasurface—were precisely printed onto a gold film. To validate this technique, a THz metalens based on a phased gradient design and a THz holographic plate employing simultaneous phase and amplitude modulation were meticulously fabricated, displaying outstanding performance. Owing to the simple processing flow, high reproducibility, and wide applicability of materials, this technique stands out as a versatile and efficient approach for fabricating THz metasurfaces, with the potential to promote the commercialization of terahertz metasurfaces.

DNA Origami‐Directed Self‐Assembly of Gold Nanospheres for Plasmonic Metasurfaces

AbstractPlasmonic nanostructures are frequently utilized to create metasurfaces with a large variety of optical effects. Control over shape and positioning of the nanostructures is key to the function of such plasmonic metasurfaces. Next to lithographic means, directed self‐assembly is a viable route to create plasmonic structures on surfaces with the necessary precision. Here, a combined approach of DNA origami self‐assembly and electron beam lithography is presented for determinate positioning of gold nanospheres on a SiO2 surface. First, DNA origami structures bind to the electron beam‐patterned substrate and subsequently, gold nanoparticles attach to a defined binding site on the DNA origami structure via DNA hybridization. A sol‐gel reaction is then used to grow a silica layer around the DNA, thereby increasing the stability of the self‐assembled metasurface. A mean yield of 74% of single gold nanospheres is achieved located at the determinate positions with a spatial position accuracy of 9 nm. Gold nanosphere dimers and trimers are achieved with a rate of 65% and 60%, respectively. The applicability of this structuring method is demonstrated by the fabrication of metasurfaces whose optical response can be tuned by the polarization of the incoming and the scattered light.

Cryogenic Electron-Beam Writing for Perovskite Metasurface.

Halide perovskites (HPs) metasurfaces have recently attracted significant interest due to their potential to not only further enhance device performance but also reveal the unprecedented functionalities and novel photophysical properties of HPs. However, nanopatterning on HPs is critically challenging as they are readily destructed by the organic solvents in the standard lithographic processes. Here, we present a novel, subtle, and fully nondestructive HPs metasurface fabrication strategy based on cryogenic electron-beam writing. This technique allows for high-precision patterning and in situ imaging of HPs with excellent compatibility. As a proof-of-concept, broadband absorption enhanced metasurfaces were realized by patterning nanopillar arrays on CH3NH3PbI3 film, which results in photodetectors with approximately 14-times improvement on responsivity and excellent stability. Our findings highlight the great feasibility of cryogenic electron-beam writing for producing perovskite metasurface and unlocking the unprecedented photoelectronic properties of HPs.

Colloidal Self-Assembly of Silver Nanoparticle Clusters for Optical Metasurfaces.

Optical metasurfaces are two-dimensional assemblies of nanoscale optical resonators and could constitute the next generation of ultrathin optical components. The development of methods to manufacture these nanostructures on a large scale is still a challenge, while most performance demonstrations were obtained with lithographically fabricated metasurfaces that are restricted to small scales. Self-assembly fabrication routes are promising alternatives and have been used to produce original nanoresonators. Reports of self-assembled metasurface fabrication, however, are still scarce. Here, we show that an emulsion-based formulation approach can be used both for the fabrication of complex colloidal resonators, presenting a strong interaction with light, in particular due to simultaneous magnetic and electric modes of resonance, and for their deposition in homogeneous films. This fabrication technique involves emulsification of an aqueous suspension of silver nanoparticles in an oil phase, followed by controlled drying of the emulsion, and produces silver colloidal clusters. We show that the drying process can be controlled in a liquid emulsion, producing a metafluid, as well as in a sedimented emulsion, producing a metasurface. The structural control of the synthesized colloidal clusters is demonstrated with electron microscopy and X-ray scattering techniques. Using a polarization-resolved multiangle light scattering setup in the visible wavelength range, we conduct a comprehensive angular and spectroscopic study of the optical resonant scattering of the nanoresonators in a metafluid and show that they present strong optical magnetic resonances and directional forward-scattering patterns, with scattering efficiencies of up to 4. The metasurfaces consist of homogeneous films, of variable surface density, of colloidal clusters that have the same extinction properties on the surface and in the fluid. This experimental approach allows for large-scale production of metasurfaces.

Giant Ultrafast All-Optical Modulation Based on Exceptional Points in Exciton-Polariton Perovskite Metasurfaces.

Ultrafast all-optical modulation with optically resonant nanostructures is an essential technology for high-speed signal processing on a compact optical chip. Key challenges that exist in this field are relatively low and slow modulations in the visible range as well as the use of expensive materials. Here we develop an ultrafast all-optical modulator based on MAPbBr3 perovskite metasurface supporting exciton-polariton states with exceptional points. The additional angular and spectral filtering of the modulated light transmitted through the designed metasurface allows us to achieve 2500% optical signal modulation with the shortest modulation time of 440 fs at the pump fluence of ∼40 μJ/cm2. Such a value of the modulation depth is record-high among the existing modulators in the visible range, while the main physical effect behind it is polariton condensation. Scalable and cheap metasurface fabrication via nanoimprint lithography along with the simplicity of perovskite synthesis and deposition make the developed approach promising for real-life applications.

Microsphere photolithography with dynamic angular spectra control for metasurface fabrication.

Microsphere photolithography (MPL) is a promising technique for cost-effective fabrication of large-scale metasurfaces. This approach generates an array of photonic jets by the collimated illumination of self-assembled microspheres. The photonic jets can be precisely steered within the unit cell defined by each microsphere by changing the angle of incidence. This allows for the creation of complex metasurface element geometries. Computer controlled articulation of the substrate relative to a static UV source allows the direct-write of different metasurface elements. However, this is time-consuming and requires registration between each exposure for complex features. This paper investigates a single exposure method with the dynamic continuous angle of incidence control provided by a Digital Micromirror Device (DMD) in the front Fourier plane of the projection system. The grayscale values of the DMD pixels can be adjusted to provide optical proximity correction. Larger patterns can be achieved by scanning the substrate relative to the exposure beam. This approach is demonstrated with the creation of hierarchical patterns. This work greatly simplifies the MPL exposure process for complex resonators and provides potential for full light field control.

Visible Metalenses with High Focusing Efficiency Fabricated Using Nanoimprint Lithography

AbstractMetasurfaces enable precise control over the properties of light and hold promise for commercial applications. However, fabricating visible metasurfaces suitable for high‐volume production is challenging and requires scalable processes. Nanoimprint lithography is a cost‐effective and high‐throughput technique that can meet this scalability requirement. This work presents a mask‐templating nanoimprint lithography process for fabricating metasurfaces with varying fill factors and negligible wavefront aberrations using composite stamps. As a proof‐of‐concept, a 6 mm diameter metalens formed of silicon nitride nano‐posts with a numerical aperture of 0.2 that operates at 550 nm is demonstrated. The nanoimprinted metalens achieves a peak focusing efficiency of (81 ± 1)%, comparable to the control metalens made with electron beam lithography with a focusing efficiency of (89 ± 1)%. Spatially resolved deflection efficiency and wavefront data, which informs design and process optimization, is also presented. These results highlight nanoimprint lithography as a cost‐effective, scalable method for visible metasurface fabrication that has potential for widespread adoption in consumer electronics and imaging systems.

Dielectric optical waveguide fabricated on a transparent substrate

Transparent glass substrates are routinely used in the fabrication of metasurfaces, augmented reality (AR), virtual reality (VR), and holographic devices. While readily compatible with photolithographic patterning methods, when electron beam (E-Beam) techniques are used, field distortion and stitching errors can result due to the buildup of charge. A common approach to overcome this issue is to deposit a thin conductive polymer layer (E-Spacer). However, if high-voltage E-Beam is used to achieve nano-features, the polymer conductivity is not sufficient. We have shown that by using chromium (Cr) as an overcoating conductive layer on the resist, we can achieve accurate and seamless patterning in multiple writing fields and used the method to fabricate on-chip Si3N4 waveguides on SiO2. This technique has the potential to enable the fabrication of large-scale integrated photonic systems on transparent or dielectric substrates.

Cost-Effective Nanophotonic Metasurfaces with Spatially Gradient Structures for Ultrasensitive Imaging-Based Refractometric Sensing.

Nanophotonic metasurfaces are widely utilized in various domains, such as biomedical, healthcare, and environmental monitoring, benefiting from their unique advantages of label-free, noninvasive, and real-time response. However, nanophotonic metasurfaces usually rely on sophisticated instruments, and expensive and time-consuming fabrication processes, which severely restricts their practical applications. Herein, a spatially gradient metasurface is integrated with an imaging-based sensing scheme, waiving the requirement of spectrometers and achieving an ultrahigh imaging-based sensitivity of 3321 pixels/refractive index unitsuperior to that characterized using conventional compact spectrometers. The metasurface is fabricated by nanoimprint lithography using a reusable cyclic olefin copolymer template featuring millions of unique nanostructures. Under the illumination of monochromatic light, the transmittance of different nanostructures on the metasurface differs, resulting in grayscale images with varied intensity distributions. Analyzing the intensity change of the metasurface's recorded image can obtain the covering medium's refractive index. Furthermore, through theory and experimentation, the high reliability of the proposed reusable and flexible template has been verified for nanophotonic metasurface fabrication which further reduces the fabrication cost of core sensing elements. Finally, with proper optimization of the metasurface structure and imaging system, this setup is expected to be applied to many emerging areas of point-of-care, real-time, and on-site biosensing.

Seven-channel nanoprinting and meta-holography based on metasurface-space and angular multiplexing

Metasurfaces have emerged as crucial materials for optical information encryption and storage, lauded for their ease of operation and high programmability. However, the inherent inflexibility following metasurface fabrication leaves room for improvement in terms of information storage capacity. Incorporating multiplexed channels in metasurface boasts independent coding degrees of freedom, which bolsters the utility of metasurfaces for optical information storage and encryption. Most multiplexed metasurfaces conventionally rely on optical variables that can be controlled, such as wavelength, orbital angular momentum (OAM), forward/backward incidence of light, and polarization state, etc. However, there has been limited attention given to the inherent spatial properties of metasurfaces, let alone to combine these spatial properties with optical variables for multiplexing. To address this gap, we proposes a combined approach to develop a nanoprinting and meta-holography metasurface, which harnesses both metasurface-space and angular multiplexing to store seven independent holographic and nanoprinted images. This work not only unlocks new avenues for advanced optical information storage and encryption, but also pushes the boundaries of metasurface technology.

Color Printing and Encryption with Polarization-Switchable Structural Colors on All-Dielectric Metasurfaces.

Metasurface-based structural color with high resolution is promising for color printing and encryption. However, achieving tunable structural colors in practical applications is challenging owing to the immutability after the fabrication of metasurfaces. Herein, we proposed the polarization-switchable dielectric metasurfaces with full colors. The colorful images can be switched on/off by controlling the polarization of incident light. For the nanorods metasurfaces, all colors turned to black in the "off" mode because of the near-zero reflection, and the uniform black was advantageous for designing encryption applications. For the nanocrosses metasurfaces, colors reversed in two different "on" modes and images hidden in the "off" mode. With the polarization-sensitive metasurfaces, a fish-bird image, an overlapped dual-channel image, and a green-red heart image were obtained, respectively. The demonstrations can be applied to dynamic displays, optical cryptography, multichannel imaging, and optical data storage.

Terahertz Beam Steering with Curved Metasurfaces

Considerable recent research interest has focused on the possibility of using metasurfaces for manipulation of terahertz wavefronts. For example, metasurfaces allow a beam to be targeted in any desired direction using strategically placed meta-elements. With rapid prototyping techniques, metasurfaces can be fabricated quickly and at a low cost. These techniques also permit the fabrication of metasurfaces on flexible substrates which can be bent easily. This opens the possibility of employing such devices as conformable arrays on non-flat surfaces. To explore this idea, we experimentally and numerically analyze the performance of a terahertz metasurface printed on paper, as a function of its radius of curvature. We observe that when the metasurface is bent, the direction of the refracted beam is minimally impacted and the performance of the metasurface remains very similar to when it is flat. This conclusion will simplify the design and modeling criteria for conformable metasurfaces.

Numerical Analysis of the Influence of Fabrication Process Uncertainty on Terahertz Metasurface Quality

The purpose of this paper was to investigate the influence of fabrication process uncertainty on terahertz metasurface quality. The focus was on the effect of metasurface fabrication inaccuracy on resonances. To the best of our knowledge, this is the first paper to study the effect of the metasurface fabrication process on its resonant frequency. The terahertz split ring resonator-based metasurface is under consideration. Using a numerical model, the influence of the uncertainty of various geometrical parameters obtained during the fabrication process (mainly layer deposition, photolithography, and etching processes) is analyzed according to the resonance of the designed metasurface. The influence of the following parameters causes a shift of resonant frequencies of the considered metasurface: etching deviation e, metallization thickness tAl and SiO2 layer thickness tSiO2. The quality of the metasurface affected by the variations of obtained geometrical parameters was determined by the deviation of resonant frequency Δfr. The developed numerical model was verified by THz-TDS (terahertz time-domain spectroscopy) measurements of the fabricated structure.

Simple route for high-throughput fabrication of metasurfaces using one-step UV-curable resin printing.

Phase-gradient metasurfaces are two-dimensional (2D) optical elements that can manipulate light by imposing local, space-variant phase changes on an incident electromagnetic wave. These metasurfaces hold the potential and the promise to revolutionize photonics by providing ultrathin alternatives for a wide range of common optical elements such as bulky refractive optics, waveplates, polarizers, and axicons. However, the fabrication of state-of-the-art metasurfaces typically requires some time-consuming, expensive, and possibly hazardous processing steps. To overcome these limitations on conventional metasurface fabrication, a facile methodology to produce phase-gradient metasurfaces through one-step UV-curable resin printing is developed by our research group. The method dramatically reduces the required processing time and cost, as well as eliminates safety hazards. As a proof-of-concept, the advantages of the method are clearly demonstrated via a rapid reproduction of high-performance metalenses based on the Pancharatnam-Berry phase gradient concept in the visible spectrum.

A universal metasurface transfer technique for heterogeneous integration.

Metasurfaces offer a versatile platform for engineering the wavefront of light using nanostructures with subwavelength dimensions and hold great promise for dramatically miniaturizing conventional optical elements due to their small footprint and broad functionality. However, metasurfaces so far have been mainly demonstrated on bulky and planar substrates that are often orders of magnitude thicker than the metasurface itself. Conventional substrates not only nullify the reduced footprint advantage of metasurfaces, but also limit their application scenarios. The bulk substrate also determines the metasurface dielectric environment, with potentially undesired optical effects that undermine the optical performance. Here we develop a universal polymer-assisted transfer technique to tackle this challenge by decoupling the substrate employed on the fabrication of metasurfaces from that used for the target application. As an example, Huygens' metasurfaces with 120 nm thickness in the visible range (532 nm) are demonstrated to be transferred onto a 100 nm thick freestanding SiNx membrane while maintaining excellent structural integrity and optical performance of diffraction-limited focusing. This transfer method not only enables the thinnest dielectric metalens to the best of our knowledge, but also opens up new opportunities in integrating cascaded and multilayer metasurfaces, as well as the heterogeneous integration with nonconventional substrates and various electronic/photonic devices.

2.5D switchable metasurfaces

Nowadays, two-dimensional metasurfaces are widely used to control the amplitude, phase, and direction of light. However, such structures do not provide sufficient degrees of freedom, and thus, the fine adjustment of their optical properties is limited. To solve this problem, phase change materials such as GeSbTe are used. This family of materials is attractive for engineering tunable optical elements because of their non-volatile reversible phase transition and pronounced changes of the dielectric permittivity. Besides, the so-called two and a half dimensional (2.5D) metasurfaces introduce an additional degree of freedom. A fabrication of metasurface combining these two approaches and a detailed study of its photonic properties was reported. The arrangement in 2.5D geometry was tailored to match the lattice resonances to the frequency of the magnetic dipoles supported by the metasurface elements to demonstrate the effects related to the interaction between resonances of different origin. The phase change material enables the on/off switching behavior of the complex resonance effect.

Nanocavity-encapsulated perovskite nanocrystals with enhanced luminescence by Mie resonance

Perovskite nanocrystals (PeNCs) have been regarded as one of the most promising candidate materials for next-generation display technology due to their remarkable optical performance. However, addressing the limitations of inherent instability and low luminescence efficiency of PeNC films is still a huge obstacle in its commercialization process. Herein, the low-cost and large-area perovskite nanocrystal composite films (NCFs) based on hexagonally distributed TiO2-based metasurface (inspired by the surface structure of butterfly wings) in combination with PeNCs encapsulated in PMMA matrix were fabricated. The photoluminescence intensity of perovskite NCFs can be enhanced by a maximum of 3.89 times based on the Purcell effect by tailoring to match the emission peaks of their PeNCs in various bands using the flexibility of metasurface design. The encapsulation of PMMA polymer and TiO2 nanocavities also effectively enhanced the stability of PeNCs. Benefiting from these favorable characteristics, perovskite NCFs are applied to liquid crystal displays (LCDs) as color conversion layers, with color gamut reaching 122% of the NTSC standard and 180% of the commercial LCD screen, respectively, demonstrating that perovskite NCFs possess enormous potential in the high-end display fields. Furthermore, this metasurface fabrication process avoids complicated, time-consuming, and expensive process flow, laying the foundation for further commercialization beyond the laboratory.