Fabrication Of Capacitors Research Articles

Novel BaTiO3-Based, Ag/Pd-Compatible Lead-Free Relaxors with Superior Energy Storage Performance.

Ceramic dielectrics are reported with superior energy storage performance for applications, such as power electronics in electrical vehicles. A recoverable energy density (Wrec) of ∼4.55 J cm–3 with η ∼ 90% is achieved in lead-free relaxor BaTiO3-0.06Bi2/3(Mg1/3Nb2/3)O3 ceramics at ∼520 kV cm–1. These ceramics may be co-fired with Ag/Pd, which constitutes a major step forward toward their potential use in the fabrication of commercial multilayer ceramic capacitors. Compared to stoichiometric Bi(Mg2/3Nb1/3)O3-doped BaTiO3 (BT), A-site deficient Bi2/3(Mg1/3Nb2/3)O3 reduces the electrical heterogeneity of BT. Bulk conductivity differs from the grain boundary only by 1 order of magnitude which, coupled with a smaller volume fraction of conducting cores due to enhanced diffusion of the dopant via A-site vacancies in the A-site sublattice, results in higher breakdown strength under an electric field. This strategy can be employed to develop new dielectrics with improved energy storage performance.

Effects of series resistance and interface state on electrical properties of Al/Er2O3/Eu2O3/SiO2/n-Si/Al MOS capacitors

Advances in Metal-Oxide-Semiconductor (MOS) capacitors fabrication and processing techniques have significantly reduced the adverse effects of processing on the disruption of the ideal MOS devices. However, changes in interface state density and series resistance have remained significant issues for the performance of MOS devices. In this paper, the impacts of multi-layers on the electrical interface states and series resistance characteristics of Al/Er2O3/Eu2O3/SiO2/n-Si/Al MOS capacitors is reported, by analyzing Capacitance – Voltage (C – V), conductance (G/ω – V), series resistance, and interface states density. Ideal characteristics have been observed for obtained series resistance (Rs) and interface state density (Dit), and the calculated values of Dit are in order of (1010 eV2Cm−2). The outcomes have demonstrated that the Rs and the Dit are essential factors that influence the electrical characteristics of the MOS capacitors. Furthermore, interfacial layers are the cause of variations in the Rs and Dit.

Electrical and Magnetodielectric Properties of Magneto-Active Fabrics for Electromagnetic Shielding and Health Monitoring.

An efficient, low-cost and environmental-friendly method to fabricate magneto-active fabrics (MAFs) based on cotton fibers soaked with silicone oil and iron oxide microfibers (mFe) at mass fractions 2 wt.%, 4 wt.% and 8 wt.% is presented. It is shown that mFe induce good magnetic properties in MAFs, which are subsequently used as dielectric materials for capacitor fabrication. The electrical properties of MAFs are investigated in a static magnetic field with intensities of 0 kA/m, 160 kA/m and 320 kA/m, superimposed on a medium-frequency electric field. The influence of mFe on the electrical capacitance and dielectric loss tangent is determined, and it can be observed that the electrical conductivity, dielectric relaxation times and magnetodielectric effects are sensibly influenced by the applied magnetic and electric fields. The results indicate that the MAFs have electrical properties which could be useful for protection against electromagnetic pollution or for health monitoring.

Fabrication of high-performance dual carbon Li-ion hybrid capacitor: mass balancing approach to improve the energy-power density and cycle life

Most lithium-ion capacitor (LIC) devices include graphite or non-porous hard carbon as negative electrode often failing when demanding high energy at high power densities. Herein, we introduce a new LIC formed by the assembly of polymer derived hollow carbon spheres (HCS) and a superactivated carbon (AC), as negative and positive electrodes, respectively. The hollow microstructure of HCS and the ultra large specific surface area of AC maximize lithium insertion/diffusion and ions adsorption in each of the electrodes, leading to individual remarkable capacity values and rate performances. To optimize the performance of the LIC not only in terms of energy and power densities but also from a stability point of view, a rigorous mass balance study is also performed. Optimized LIC, using a 2:1 negative to positive electrode mass ratio, shows very good reversibility within the operative voltage region of 1.5–4.2 V and it is able to deliver a specific cell capacity of 28 mA h−1 even at a high current density of 10 A g−1. This leads to an energy density of 68 W h kg−1 at an extreme power density of 30 kW kg−1. Moreover, this LIC device shows an outstanding cyclability, retaining more than 92% of the initial capacity after 35,000 charge–discharge cycles.

Noncovalent functionalization of boron nitride nanotubes using poly(2,7‐carbazole)s

AbstractTo fully actualize the potential of boron nitride nanotubes (BNNTs), it is necessary to overcome the inherent insolubility of this nanomaterial. Drawing on the successes realized in the analogous carbon nanotube field, noncovalent functionalization with conjugated polymers offers a simple, scalable route toward the production of stable dispersions of BNNTs. 2,7‐carbazoles were chosen as our core monomer based on density functional theory (DFT) predictions, which suggest superior interactions with BNNTs when compared to fluorene‐BNNT interactions. Homo poly(2,7‐carbazole)s and copolymers with fluorenes were synthesized and used successfully to disperse BNNTs into organic solvents. Thermogravimetric analysis and atomic force microscopy results confirm the proficiency of these polymers to disperse large amounts (> 80% by weight) of individualized BNNTs. Analysis of absorbance data shows that the choice of solvent is critical, with stability enhanced in THF compared to CHCl3 due to the more efficient planarization of polymer chains on the surface of BNNTs, particularly for the homopolymers. The utility of these highly‐soluble poly(2,7‐carbazole)‐BNNT complexes for printed electronics and transparent composites was demonstrated by the fabrication of simple capacitors and incorporation into poly(methyl methacrylate) composites, respectively.

Graphene Based Aerogels: Fundamentals and Applications as Supercapacitors

Abstract Super Capacitors have attained a huge amount of attention due to their outstanding features and characteristics such as high-power density, excellent charge/discharge routine, and tendency of a longer lifetime. Graphene, a single layer of hexagonally crammed carbon atoms, has always been considered as an outstanding material for super capacitor fabrication due to its higher theoretical surface area, high electrical conductivity, stable thermal properties, and its mechanical and chemical properties. Super capacitor electrode resources which are based on 3D network/aerogel structures are resultant of graphene is a prime area of research due to their porous structure and lattice which meets the expense of rapid electron transport, higher stability, and a good cycle performance. This review intents to summarize the fundamentals and the fabrication strategies of 3D graphene aerogels.

An Affordable Fabrication of a Zeolite-Based Capacitor for Gas Sensing.

The development of even more compact, inexpensive, and highly sensitive gas sensors is widespread, even though their performances are still limited and technological improvements are in continuous evolution. Zeolite is a class of material which has received particular attention in different applications due to its interesting adsorption/desorption capabilities. The behavior of a zeolite 4A modified capacitor has been investigated for the adsorption of nitrogen (N2), nitric oxide (NO) and 1,1-Difluoroethane (C2H4F2), which are of interest in the field of chemical, biological, radiological, and nuclear threats. Sample measurements were carried out in different environmental conditions, and the variation of the sensor electric capacitance was investigated. The dielectric properties were influenced by the type and concentration of gas species in the environment. Higher changes in capacitance were shown during the adsorption of dry air (+4.2%) and fluorinated gas (+7.3%), while lower dielectric variations were found upon exposure to N2 (−0.4%) and NO (−0.5%). The proposed approach pointed-out that a simple fabrication process may provide a convenient and affordable fabrication of reusable capacitive gas sensor.

Design and characterization of compact digital RF MEMS capacitors and phase shifters in CMOS 0.35 µm technology

This work reports on the design, fabrication and characterization of compact digital RF MEMS capacitors and phase shifters that are built in the back end of line (BEOL) of CMOS 0.35 µm technology. The devices are micromachined using a maskless post-processing sequence with cryogenic cooling on to control the out-of-plane warping of the metal-oxide structural layers. The implemented vertical electrostatic actuation in the developed post process allows the realization of highly compact designs of both devices, and an operating voltage of the devices is stay below 70 V. The 4-bit capacitors provide a measured tuning ratio close to 10:1 which corresponds to 0.15 pF to 1.2 pF over the frequency range 3–10 GHz. The overall footprint of the digital capacitor is 0.6 mm × 0.9 mm. The measured quality factor after de-embedding the losses due to the RF probing pads is up to 120. The measurement of the 4-bit phase shifters reveals low insertion loss <3 dB at 20 GHz along with low variation of the insertion loss <1 dB up to the same frequency. The measured phase shift is 150 at 20 GHz. The overall footprint of the 4-bit phase shifter is around 1 mm × 1 mm.

Facile fabrication of highly porous TiO2 microrods anode with enhanced Al-ion storage for hybrid capacitors

Hybrid capacitor has attracted great interest owing to the higher energy density compared with traditional double-layer capacitor. However, the fabrication of high-performance hybrid aqueous capacitor based on low-cost and multivalent ion storage remains challenging. In this work, highly porous TiO2 microrods (P-TiO2-MRs) with uniform and large pore size are prepared extensively with a simple hydrothermal synthesis. Such micro/nano-structured anode exhibit remarkably enhanced Al ion intercalation/deintercalation performance in optimized AlCl3 aqueous electrolyte. The electrode has large discharge capacity with 111.1 mAh g−1 @ 1 A g−1 and superior rate capability with 49.8 mAh g−1 @ 5 A g−1. For the first time, a novel hybrid device is fabricated through assembling insertion-type P-TiO2-MRs anode and absorption-type active carbon (AC) cathode (P-TiO2-MRs//AC) in AlCl3 aqueous electrolyte. The fabricated hybrid capacitor delivers a high energy density of 26.3 Wh kg−1 @ 627.3 W kg−1 as well as an outstanding high power of 5454.5 W kg−1 @ 10.9 Wh kg−1. In addition, it also displays excellent rate capability and superior retention of 63% even after 1000 cycles.

Nanocomposite Material Characterization of a Solid-State Fractional Capacitor

This article analyzes the material characterization of the nanocomposite employed in the fabrication of a solid-state fractional capacitor. The studies on the nanocomposite characterization include the Fourier-transform infrared (FTIR) spectroscopy spectra, the Raman spectra, the X-ray powder diffraction (XRD) spectrum, the transmission electron microscopy (TEM), and the scanning electron microscopy (SEM) images. In this article, there are two types of nanocomposites used for the fabrication of solid-state fractional capacitors, and for which, the analysis has been carried out. One is the nanocomposite cured at 25 °C and the other cured at 60 °C. From the results, we tried to correlate it with the constant phase angle (CPA) obtained for the solid-state fractional capacitor.

Flexible and transparent capacitors based on gel‐type natural polymers

AbstractIn this work, we study the capacitive properties of gel‐type natural abundant polymers without any dopants, mainly commercial gelatin and agar in deionized water. Here, we propose a facile fabrication of flexible, transparent, and planar electrolytic capacitors using these gel‐type and indium tin oxide thin films as electrodes deposited on poly(ethylene terephthalate) substrates. Through cyclic voltammetry and galvanostatic charge–discharge techniques, we found that the devices show a specific capacitance in the order of the millifarads per gram, a specific power of ~10 mW cm−2, which is sufficient to active low‐power devices, and a life cycle with nearly 100% efficiency after 1,000 cycles. We found that we do not need to add dopants that improve the ionic conductivity of the natural polyelectrolytes to obtain capacitances within the millifarads per gram. The flexibility of the capacitors was demonstrated by bending them, after which they exhibited the same electrochemical performance as the unbent devices. The optical transparency of the capacitors was measured by UV–V is spectroscopy showing a high transmittance in the visible region.

From core–shell particles to dense Ba0.8Sr0.2Zr0.1Ti0.9O3@Bi2O3–Fe2O3–SiO2 ceramics with low sintering temperature and improved dielectric, energy storage properties

To achieve high energy storage in dielectric ceramics, a new designed material Ba0.8Sr0.2Zr0.1Ti0.9O3@Bi2O3–Fe2O3–SiO2 with core–shell structure was fabricated by the monodispersed submicron Ba0.8Sr0.2Zr0.1Ti0.9O3 particles (diameter ~ 180 nm) coated with the 25-nm-thick shell of Bi2O3–Fe2O3–SiO2. The influences of Bi2O3–Fe2O3–SiO2 amount, Bi/Fe ratio, and sintering temperature on the phase composition, microstructure, and ceramic electrical properties were investigated. X-ray diffraction analysis of the ceramics revealed the formation of perovskite Ba0.8Sr0.2Zr0.1Ti0.9O3 when the Bi2O3–Fe2O3–SiO2 amount was below 6.0 wt%. The secondary phases Bi2Fe4O9 and Bi4Ti3O12 formed in ceramics when the Bi2O3–Fe2O3–SiO2 amount exceeded 6.0 wt%, as the ceramic grain core–shell structure collapsed. Based on FESEM images, the densification of ceramics can be tenderly controlled at low sintering temperature, and the ceramic grains can maintain their core–shell structure. As the Bi2O3–Fe2O3–SiO2 amount, the ratio of Bi to Fe, and the sintering temperature increase, the ceramic room temperature dielectric constant increases up to a maximum value then decreases. The energy storage density exhibits a similar tendency to increase first and then decrease. Fine-grained Ba0.8Sr0.2Zr0.1Ti0.9O3@Bi2O3–Fe2O3–SiO2 ceramics with Bi/Fe ratio of 1.04 and 6.0 wt% Bi2O3–Fe2O3–SiO2 sintered at 1120 °C had a dielectric constant of 2599, the maximum energy storage density of 1.50 J/cm3 under 29.31 kV/mm. This work proposed a novel method to enhance electrical properties of functional materials, which could be potentially used in the fabrication of capacitors with high energy storage performance.

Structural characterization, electrical properties and gas sensing applications of polypyrrole/Cu-Al2O3 hybrid nanocomposites

The present work focused on the synthesis of polypyrrole (PPy) wrapped nano copper-alumina (Cu-Al2O3) composite by an in situ polymerization of pyrrole in the presence of Cu-Al2O3 nanoparticles. The polymerized samples were systematically characterized by Fourier transform infrared spectroscopy (FTIR), X-ray diffraction (XRD) analysis, scanning electron microscope (SEM), high-resolution transmission electron microscope (HR-TEM), differential scanning calorimetry (DSC), and thermogravimetric analysis (TGA). The properties such as AC and DC conductivity, dielectric constant, and ammonia gas sensing performance of PPy/Cu-Al2O3 composites were investigated in detail as a function of Cu-Al2O3 content. The FTIR spectra showed the existence of sharp and resolved infrared bands of nanoparticles in the PPy chain. The presence of the crystalline peaks of Cu-Al2O3 in the PPy matrix was confirmed from the XRD analysis. SEM images revealed the homogenous growth of Cu-Al2O3 in the polymer with the formation of spherically shaped particles. The HR-TEM observation showed that Cu-Al2O3 particles were dispersed at a nanometer level in the nanocomposites with a width of 30–60 nm. The glass transition temperature of composites obtained from DSC was found to be increased with increase in the content of nanoparticles. TGA analysis proved that the nano Cu-Al2O3 in the content in the composites acted as a mass transport barrier that retards the degradation of the product. The AC conductivity and dielectric constant of the nanocomposite showed that the maximum electrical properties were observed for the composite with 5 weight percentage loading of Cu-Al2O3. DC conductivity showed that the PPy/Cu-Al2O3 composites have higher electrical conductivity than PPy. The ammonia gas sensing property of the composites was significantly enhanced by the addition of Cu-Al2O3 nanoparticles. Therefore, the improved properties of synthesized PPy/Cu-Al2O3 nanocomposite can be useful for developing functional composite material for the fabrication of sensors, electronic devices, and high energy storage capacitors.

Synthesis and characterization of novel nitrogen doped biocarbons from distillers dried grains with solubles (DDGS) for supercapacitor applications

Nitrogen doped biocarbon materials were effectively synthesised from distiller's dried grains with solubles (DDGS) using urea as the nitrogen source. The use of urea in the pre-treatment of DDGS on the fixation of elemental nitrogen in the biocarbon materials was investigated. Urea addition increases the nitrogen content in the obtained biocarbon, which is found to have 9.28 ± 0.67% for the DDGS:Urea weight ratio of 1:3. Physicochemical properties of the intrinsic and nitrogen doped biocarbon material were investigated by employing Raman and BET surface area analysis. Nitrogen rich biocarbon obtained using the DDGS:Urea weight ratio of 1:3 was taken for the fabrication of an electrochemical double layer capacitor. The fabricated symmetric supercapacitor with 2-electrode configuration showed the specific capacitance of 49.7 F·g−1 and 100.7 F·g−1 respectively for the intrinsic and nitrogen doped carbon materials at a current density of 0.5 A·g−1.

Preparation and characterization of ultra-low-temperature of (BiAg)0.5MoO4 dielectric ceramic doped with Y2O3

This paper reports on the use of solid-phase sintering to prepare (BiAg)0.5MoO4 (BAMO) ceramic doped with Yttrium oxide (Y2O3), which is less expensive than the dopants currently used in the commercial formulation of powders for the fabrication of multilayer ceramic capacitors. Experiments were conducted to determine the means by which Y2O3 doping concentration and sintering temperature affect the phase evolution, microstructure, and dielectric properties of BAMO ceramic. Our results reveal the following important findings. Sintering Y2O3-doped BAMO ceramic at 600 °C resulted in the formation of secondary phases (Bi2Mo2O9 and γ"-Bi2MoO6) and constrained grain growth. Sintering at 600 °C promoted the precipitation of silver ions (Ag+) from the starting material (Ag2O) to agglomerate at grain boundaries, leading to a decrease in insulation resistance and breakdown voltage. Interestingly, 5 wt% Y2O3-doped BAMO ceramic sintered at 600 °C presented good dielectric characteristics: εr = 26.6, Q × f value = 22194 GHz, and temperature coefficient of resonant frequency = +14 ppm/°C. Our findings demonstrate that single-phase BAMO ceramic with good density characteristics can be produced via sintering at 600 °C for 1 h. The ultra-low-temperature production of this dielectric material would allow for co-firing with aluminum electrode to further reduce manufacturing costs.

Trifluoroethylene bond enrichment in P(VDF-TrFE) copolymers with enhanced ferroelectric behaviors by plasma fluorination on bottom electrode

Abstract CF4 plasma treatment on n+-Si wafers as bottom electrodes (BEs) of poly(vinylidene fluoride-co-trifluoroethylene) (P(VDF-TrFE)) metal-ferroelectric-metal (MFM) capacitors has been investigated in this study. Prior to the fabrication of MFM capacitors, comprehensive material analyses are administered to identify the incorporation of fluorine atoms into P(VDF-TrFE) copolymers, revealing an enrichment in C2HF3 (trifluoroethylene) bonds and an improvement in the crystallinity of the film. The P(VDF-TrFE) MFM capacitors with CF4-plasma-treated n+-Si wafers show a shallower charge trapping level of 0.154–0.226 eV extracted from the Frenkel–Poole (F–P) emission at 213–273 K for the BE injection compared to that for the top electrode (TE) injection, which is ascribed to the passivation of deep traps by the fluorine atoms that diffused from the n+-Si wafers. Thus, asymmetric remanent polarization and a negative internal bias field are obtained because of the significant increase in the β-phase at the bottom of the P(VDF-TrFE) films. With the CF4 plasma treatment for 1 min, the P(VDF-TrFE) MFM capacitors demonstrate a remanent polarization (2Pr) of 6.58 µC/cm2, a coercive electric field (Ec) of 0.47 MV/cm and stability for more than 3 × 104 cycles with negligible fatigue, making the fluorine-incorporated P(VDF-TrFE) copolymers suitable for future high-performance nonvolatile memory applications.

Comparative Studies on Ionic Liquid and Polymer Ionic Liquid Blend for Application in EDLCs

AbstractIn the present work, comparative studies on two ion‐conducting materials, 1‐butyl‐3‐methylimidazolium chloride (BMIMCl) as ionic liquid (IL) and polymer ionic liquid blend, are reported. For the synthesis of polymer ionic liquid blend system, BMIMCl as ionic liquid, PVDF‐HFP and acetonitrile as a solvent are used. The different polymer ionic liquid blend is prepared by adopting universal solution cast technique and electrolyte sample is optimized mixing IL in the polymer by maintaining ratio 1:4. The impedance plot is observed by LCR Hi‐TESTER. The optimized sample of electrolyte system shows higher ionic conductivity of the order ≈10−3 S cm−1. The Arrhenius behavior is found from the temperature dependence conductivity plot, giving activation energy of Ea ≈ 0.073 eV. The ionic transference number is calculated for IL and optimized polymer ionic liquid blend. Electrical potential window stability is observed for IL and polymer ionic liquid blend. The fabrication of electrochemical double layer capacitors (EDLCs) is done by sandwiching ion conducting materials between two carbon electrodes. The specific capacitance of EDLC cell: AC ||(PVDF‐HFP (20 wt%) + (BMIMCl) (80 wt%)|| AC and AC ||BMIMCl|| AC, gives highest capacitance value ≈116.9 and 96.5 mF cm−2 equivalent to single electrode capacitance 54.57 and 52.6 F g−1, respectively, by cyclic voltammetry studies at 1 mV s−1 scan rate.

Na-ion conducting gel polymer membrane for flexible supercapacitor application

A sodium-ion conducting poly(vinyl alcohol)-based gel polymer electrolyte membrane is developed by plasticizing with an ionic liquid, for the fabrication of electric double-layer capacitors. Sodium triflate is selected as the sodium salt. 1-Ethyl-3 methylimidazoliumtrifluoromethanesulfonate is employed as the plasticizer. The properties of the electrolyte membranes are analyzed in terms of their crystallinity, morphology, thermal stability, electrochemical stability window, ionic transference number, and ionic conductivity. The composition with poly(vinyl alcohol) - 30% sodium triflate + 10% 1-ethyl-3 methylimidazoliumtrifluoromethanesulfonate shows the optimal performances such as good thermal stability up to 150 °C and wide electrochemical stability window of 4.70 V. It is thus employed in the fabrication of electric double-layer capacitors, serving as both ion-conducting electrolyte and separator. The capacitor shows almost 100% coulombic efficiency and stable charge-discharge cyclic property with almost 100% capacity retention after 1000 cycles, when charging up to 1.6 V and 2.0 V with a specific capacitance of 103.7 and 127.8 F g−1, respectively. It compares well with that made of a liquid electrolyte. This excellent performance is attributed to the sodium triflate with large-sized anions and thus high ionic conductivity (3.8 × 10−3 S cm−1) of the electrolyte membrane.

Synthesis of single phase MgTiO3 and influence of Sn4+ substitution on its structural, dielectric and electrical properties

In this work, synthesis of single-phase MgTiO3 and Mg(Ti0.95Sn0.05)O3 ceramics through conventional solid state mixed oxide route using Mg(OH)2 or MgO as raw material was investigated. The phase purity of prepared specimens was examined using X-ray diffraction; bond characteristics were determined via Raman spectroscopy, dielectric properties at low frequency were measured by Impedance spectroscopy and dielectric properties at microwave frequency were measured by vector network analyzer. The properties of Mg(OH)2 based ceramics were also compared to that of MgO based ceramics in frequency range of 10 kHz-3 MHz and temperature range of 298–468 K. It was observed that Mg(OH)2 based materials exhibited not only low losses (tan δ) and low relative permittivity (ϵr) but also possessed smaller value of temperature coefficient of resonant frequency (τf) in comparison to that of MgO based materials. Dielectric and electrical properties of MgTiO3 were further improved by partial replacement of tetravalent cations Ti4+ with Sn4+. The mechanism of electrical conduction for the synthesized specimens was also studied using Jonscher power law and activation energy was evaluated using Arrhenius equation. Best dielectric properties at room temperature in 10 kHz-3 MHz frequency range were displayed by Mg(OH)2 based Mg(Ti0.95Sn0.05)O3 compound having tan δ of 2.32 × 10−4, ϵr of 14.61 and τf of −39.7 ppm/K at 100 kHz frequency. At 15 GHz Mg(OH)2 based Mg(Ti0.95Sn0.05)O3 exhibited tan δ of 2.73 × 10−2 and ϵr of 14.12. This material could be utilized for fabrication of multilayer capacitors, dielectric resonators, filters, antennas, buffer layers and protective coatings.

Fabrication and Characterization of amorphous Lanthanum Zirconate Gate Capacitors

A novel high-k gate dielectric material, i.e., Lanthanum-doped Zirconium oxide (La-doped ZrO2), has been thoroughly studied for applications in future metal oxide semiconductor field-effect transistor (MOSFET). The film's structural, chemical and electrical properties are investigated experimentally. The incorporation of La into ZrO2 impacted the electrical properties in terms of leakage current while not sacrificing its dielectric constant. The dielectric constant of 25 is achieved which is calculated from the C-V analysis taken from Agilent 1500A Semiconductor Device Analyzer. XRD, FTIR, EDX analysis were conducted to confirm the stoichiometry and bond formation of La2Zr2O7. The sol-gel spin coating method is adopted to form a uniform thin film over p-Silicon substrate and Aluminium is evaporated in the eBeam technique as gate electrode to form an MIS capacitor. The La-doped ZrO2 film is hence a potential high-k gate dielectric for future application in MIS thin film transistors.