Extreme Ultraviolet Research Articles

Relationship between Defect Risks and Effective Reaction Radius for Deprotection in Chemically Amplified Resist Process for Extreme Ultraviolet Lithography

Relationship between Defect Risks and Effective Reaction Radius for Deprotection in Chemically Amplified Resist Process for Extreme Ultraviolet Lithography

Global Coronal Plasma Diagnostics Based on Multislit Extreme-ultraviolet Spectroscopy

Full-disk spectroscopic observations of the solar corona are highly desired to forecast solar eruptions and their impact on planets and to uncover the origin of solar wind. In this paper, we introduce a new multislit design (five slits) to obtain extreme-ultraviolet (EUV) spectra simultaneously. The selected spectrometer wavelength range (184–197 Å) contains several bright EUV lines that can be used for spectral diagnostics. The multislit approach offers an unprecedented way to efficiently obtain the global spectral data but the ambiguity from different slits should be resolved. Using a numerical simulation of the global corona, we primarily concentrate on the optimization of the disambiguation process, with the objective of extracting decomposed spectral information of six primary lines. This subsequently facilitates a comprehensive series of plasma diagnostics, including density (Fe xii 195.12/186.89 Å), Doppler velocity (Fe xii 193.51 Å), line width (Fe xii 193.51 Å), and temperature diagnostics (Fe viii 185.21 Å, Fe x 184.54 Å, Fe xi 188.22 Å, and Fe xii 193.51 Å). We find a good agreement between the forward modeling parameters and the inverted results at the initial eruption stage of a coronal mass ejection, indicating the robustness of the decomposition method and its immense potential for global monitoring of the solar corona.

Accurate and efficient evaluation of the ionization potentials of extreme ultraviolet photoresists using density functionals and semi-empirical methods

Extreme ultraviolet (EUV) photoresists have become the core materials in lithography with nanometer-sized patterns and are actively explored on the path to realizing smaller critical dimensions. These photoresists can be small molecule-, polymer-, or organic–inorganic hybrid-based, with the full molecular working mechanism under investigation. For the rational design of EUV photoresists, theoretical guidance using tools like first-principle calculations and multi-scale simulations can be of great help. Considering the extremely high standard of accuracy in EUV lithography, it is critical to ensure the adoption of the appropriate methodologies in the theoretical evaluation of EUV photoresists. However, it is known that density functionals and semi-empirical methods differ in accuracy and efficiency, without a universal rule across materials. This poses a challenge in developing a reliable theoretical framework for calculating EUV photoresists. Here, we present a benchmark investigation of density functionals and semi-empirical methods on the three main types of EUV photoresists, focusing on the ionization potential, a key parameter in their microscopic molecular reactions. The vertical detachment energies (VDE) and adiabatic detachment energies (ADE) were calculated using 12 functionals, including pure functionals, hybrid functionals, Minnesota functionals, and the recently developed optimally tuned range-separated (OTRS) functionals. Several efficient semi-empirical methods were also chosen, including AM1, PM6, PM7, and GFN1-xTB in the extended tight-binding theoretical framework. These results guide the accurate and efficient calculation of EUV photoresists and are valuable for the development of multi-scale lithography protocols.Graphical

Comparison of wavefront sensing and ablation imprinting for FEL focus diagnostics at FLASH2

Extreme ultraviolet (EUV) photon beam characterization techniques, Hartmann wavefront sensing and single shot ablation imprinting, were compared along the caustic of a tightly focused free-electron laser (FEL) beam at beamline FL24 of FLASH2, the Free-electron LASer in Hamburg at DESY. The transverse coherence of the EUV FEL was determined by a Young’s double pinhole experiment and used in a back-propagation algorithm which includes partial coherence to calculate the beam intensity profiles along the caustic from the wavefront measurements. A very good agreement of the profile structure and size is observed for different wavelengths between the back-propagated profiles, an indirect technique, and ablation imprints. As a result, the Hartmann wavefront sensor including its software MrBeam is a very useful, single shot pulse resolved and fast tool for non-invasive determination of focal spot size and shape and also for beam profiles along the caustic.

Eruption of a Million-Kelvin Warm Magnetic Flux Rope on the Sun

Solar magnetic flux rope (MFR) plays a central role in the physics of coronal mass ejections (CMEs). It mainly includes a cold filament at typical chromospheric temperatures (∼10,000 K) and a hot channel at high coronal temperatures (∼10 MK). The warm MFR at quiescent coronal temperatures of a million Kelvin is, however, rarely reported. In this study, using multiwavelength images from the Atmospheric Imaging Assembly (AIA) on board the Solar Dynamic Observatory and Extreme Ultraviolet Imager (EUVI) on board the Solar Terrestrial Relations Observatory-A, we present an eruption of a warm channel that represents an MFR with quiescent coronal temperatures (∼0.6–2.5 MK). On 2022 May 8, we observed the failed eruption of a hot channel, with the average temperature and emission measure (EM) of 10 MK and 1.1 × 1028 cm−5, using AIA high-temperature images in the active region (AR) 13007. This failed eruption was associated with a C8.2 flare, with no CME. Subsequently, we observed a warm channel that appeared in AIA and EUVI low-temperature images rather than in AIA high-temperature images. It then erupted and transformed into a semicircular shape. An associated C2.1 flare, along with the signatures of magnetic reconnection in AIA high-temperature images, were identified. Additionally, we observed a CME associated with this event. Compared with the hot channel, the warm channel is cooler and rarer with the average temperature and EM of 1.7 (1.6) MK and 2.0 × 1026 (2.3 × 1026) cm−5. All the results suggest an unambiguous observation of the million-Kelvin warm MFR that erupted as a CME and fill a gap in the temperature domain of coronal MFRs.

Renormalizing the high-harmonic interference via double-slit and grating

A method to utilize high-harmonic interference in Young’s double-slit followed by a grating holds promise for precisely measuring the refractive-index spectrum in the extreme ultraviolet (EUV) region. The measurement is currently bottlenecked by the time it takes to fit the Fresnel interference patterns. The conventional fitting procedure, involving multiple numerical integrals for evaluating the EUV propagation through the slit and grating, takes ≳30min on a standard laptop computer, while the data acquisition time is ∼200s. Here, we apply an analytic Gaussian integral and bypass one of the numerical integrals associated with the grating. The analysis reduces to evaluating a renormalized EUV propagation in a simple double-slit interferometer, and the estimated fitting time on a laptop becomes as short as 112 s. Our study enables real-time analysis during measurements, facilitating mass optical-data collection of EUV lithography materials.

Zn-Ti oxo cluster photoresists for EUV Lithography: Cluster structure and lithographic performance

Low reflectivity of multilayer mirror–induced low efficiency of existing extreme ultraviolet lithography (EUVL) has triggered the search for photoresists with heightened sensitivity. For this purpose, considerable research has focused on elements with high extreme ultraviolet (EUV) absorption, leading to considerable advancements. Solubility alteration, often resulting from ligand variations after exposure, is influenced by the cluster structure, markedly impacting lithography sensitivity. Herein, three Ti-based metal clusters, Ti6O4(OEt)8(OMc)8 (T-2), Zn2Ti4O4(OiPr)2(OMc)10 (TZ-1), and Zn4Ti2O2(OAc)2(OBu)2(OMc)10 (TZ-2), are designed and synthesized to elucidate the effects of the structure on lithography. These mixed metal–oxo clusters derived from Ti6O4(OR)8(OOCR)8 and stabilized by identical ligands exhibit structural diversity. The increase in the number of zinc atoms results in marked alterations in the oxo core, thereby triggering alterations in ligand coordination modes. These variations confer metal clusters with different solubility and lithographic properties. Analysis of the photochemical reaction mechanism and theoretical calculations reveal a reactive tridentate ligand coordination mode that considerably improves lithography sensitivity. Therefore, changing the ligand coordination mode by designing a mixed metal–oxo core holds promise for discovering new photoresists for EUV lithography.

Scaling relations in laser-induced vaporization of thin free-flying liquid metal sheets

We experimentally study the vaporization of free-flying liquid tin sheets when exposed to a 100-ns laser pulse with an intensity between 0.2×107 and 4×107 W/cm2, a case inspired by current developments around “advanced target shaping” in industrial laser-produced plasma sources for extreme ultraviolet (EUV) nanolithography machines. Our findings reveal a gradual vaporization and a linear relationship between the average vaporization rate and laser pulse intensity (with a prefactor of 1.0(3)×10−7ms−1/Wcm−2), for various targets ranging from 20nmto200nm in thickness. We introduce a numerical one-dimensional heating and vaporization model based on Hertz-Knudsen evaporation and find excellent agreement between simulations and experimental data. We furthermore demonstrate that the amount of vaporization of liquid tin targets in the investigated laser intensity range is governed solely by the deposited fluence, and collapse all data onto a single nondimensional curve, enabling the accurate prediction of vaporization dynamics in applications in future development of EUV sources. Published by the American Physical Society 2024

Stellar wind impact on early atmospheres around unmagnetized Earth-like planets

ABSTRACT Stellar rotation at early ages plays a crucial role in the survival of primordial atmospheres around Earth-mass exoplanets. Earth-like planets orbiting fast-rotating stars may undergo complete photoevaporation within the first few hundred Myr driven by the enhanced stellar XUV [X-rays and extreme ultraviolet (EUV)] radiation, while planets orbiting slow-rotating stars are expected to experience difficulty in losing their primordial envelopes. Besides the action of stellar radiation, stellar winds induce additional erosion on these primordial atmospheres, altering their morphology, extent, and causing supplementary atmospheric losses. In this paper, we study the impact of activity-dependent stellar winds on primordial atmospheres to evaluate the extent to which the action of these winds can be significant in the whole planetary evolution at early evolutionary stages. We performed 3D magnetohydrodynamical (MHD) simulations of the interaction of photoevaporating atmospheres around unmagnetized Earth-mass planets in the time span between 50 and 500 Myr, analysing the joint evolution of stellar winds and atmospheres for both fast- and slow-rotating stars. Our results reveal substantial changes in the evolution of primordial atmospheres when influenced by fast-rotating stars, with a significant reduction in extent at early ages. In contrast, atmospheres embedded in the stellar winds from slow-rotating stars remain largely unaltered. The interaction of the magnetized stellar winds with the ionized upper atmospheres of these planets allows us to evaluate the formation and evolution of different MHD structures, such as double bow shocks and induced magnetospheres. This work will shed light on the first evolutionary stages of Earth-like exoplanets, which are of crucial relevance in terms of planet habitability.

Controlling the bandwidth of high harmonic emission peaks with the spectral polarization of the driver.

We demonstrate a high harmonic-generation scheme that offers control over the bandwidth of the spectral peaks. The scheme uses a vectorial two-color driver with close central frequencies, generated by spectrally splitting a linearly polarized input femtosecond-duration laser pulse and subsequently recombining the two halves after their polarizations are made cross-elliptical and counter-rotating. This results in the generation of new emission channels that coalesce into broad odd-integer HHG peaks, the bandwidth of each being proportional to the frequency difference between the two colors, to the harmonic order and inversely proportional to the driver fields' ellipticities. Peak broadening to the extent that a supercontinuum is formed is also demonstrated. This source will find use in HHG applications benefiting from high-flux broadband extreme ultraviolet radiation, such as attosecond transient absorption spectroscopy.

High-harmonic spin-shearing interferometry for spatially resolved EUV magneto-optical spectroscopy

We present a method for achieving hyperspectral magnetic imaging in the extreme ultraviolet (EUV) region based on high-harmonic generation (HHG). By interfering two mutually coherent orthogonally-polarized and laterally-sheared HHG sources, we create an EUV illumination beam with spatially-dependent ellipticity. By placing a magnetic sample in the beamline and sweeping the relative time delay between the two sources, we record a spatially resolved interferogram that is sensitive to the EUV magnetic circular dichroism of the sample. This image contains the spatially-resolved magneto-optical response of the sample at each harmonic order, and can be used to measure the magnetic properties of spatially inhomogeneous magnetic samples.

EUV Radiation in the Range of 10–20 nm from Liquid Spray Targets Containing O, Cl, Br and I Atoms under Pulsed Laser Excitation

The article describes the results of an investigation to determine the values of radiation intensities emitted by O-, Cl-, Br-, and I-containing liquid spray targets in absolute units in the wavelength range 10–20 nm when excited by pulsed laser radiation. The conversion coefficients of laser radiation into the EUV radiation are given for some wavelengths. The authors’ specially designed pulse extrusion liquid supply system was used to form the liquid spray targets. An Nd:YAG laser with λ = 1064 nm, τ = 8.4 ns, and Epulse = 0.8 J was used to excite the targets. Spectral measurements were made using a grazing incidence grating spectrometer–monochromator. The absolute intensities of a number of emission lines were also measured using a Bragg spectrometer based on a Mo/Be multilayer X-ray mirror, calibrated by both sensitivity and wavelength. The high values of absolute intensities of the liquid targets in the extreme ultraviolet wavelength range were demonstrated.

Separation of kinetic rate orders in extreme ultraviolet transient grating spectroscopy

We present an extreme ultraviolet (EUV) transient grating (TG) experiment of the spinel Co3O4 compound using tuneable incident energies across the Co M2,3-edge and a 395 nm probe pulse, detecting both the first and the second diffraction orders (SDOs). While the first diffraction order shows a monotonous behavior as a function of time, with a sharp response at t = 0, followed by a weak sub-picosecond component and a nearly constant signal thereafter, the time dependence of SDO varies dramatically with the incident energy as it is tuned across the Co M-edge, with the appearance of a component at t > 1 ps that grows with increasing energy. The results are rationalized in terms of the deviations of the initial grating from sinusoidal to non-sinusoidal, namely a flattening of the grating pattern, that introduces new Fourier components. These deviations are due to higher order, three-body terms in the population relaxation kinetics. The present results highlight the use of the SDO response in EUV TG as a tool to identify higher order terms in the population kinetics.

Optimization of conditions for excitation of Xe laser plasma in an extreme ultraviolet radiation source for nanolithography in order to increase its efficiency

Subject of study. The study focuses on laser plasma excited by a Xe gas-jet target. Aim of study. The aim of this study is to increase the output of extreme ultraviolet radiation from such a plasma to a level that meets the requirements of industrial production, specifically for use as a radiation source in a new branch of lithography with a wavelength near 11.2 nm. Method. The primary method used involves changing the diameter of the laser beam by moving a Xe gas-jet target along its axis. This adjustment leads to a change in the interaction area between the beam and the target, which in turn alters the size of the laser spark. The intensity of plasma radiation at wavelengths of 11.2 nm and 13.5 nm was measured using a surface-barrier Si photosensor and a Bragg mirror. Additionally, the energy of the laser radiation absorbed by the plasma was measured. Main results. The results show that, when the diameter of the laser beam illuminating the target increases from 46 µm to 344 µm, the energy emitted in the extreme ultraviolet range increases by approximately 5 times. In the identified irradiation mode, the efficiency of converting laser radiation into radiation with a wavelength of 11.2 nm was 3.9%. Recent measurements of the plasma lifetime have shown that it depends on the size of the plasma and, in several experiments, is significantly shorter than the laser pulse duration. This finding suggests that the plasma lifetime can be used as an optimization parameter when selecting the laser pulse duration. Practical significance. A record-high efficiency is obtained for the conversion of laser pulse energy into extreme ultraviolet radiation by a laser-plasma radiation source with a gas target. This achievement opens up the prospect of using such sources in the industrial production of microcircuits.

Temperature effects on the nanoscale thermoelastic response of a SiO2 membrane

We crossed two femtosecond extreme ultraviolet (EUV) pulses on a 100 nm thick amorphous membrane of SiO2, generating transient gratings (TGs) of light intensity with 84 nm spatial periodicity. The EUV TG excitation gave rise to the efficient generation of Lamb waves (LWs) and of a temperature grating, whose dynamics was studied at two different initial sample temperatures, 50 and 300 K. The short penetration depth of the EUV excitation pulses turned into a strong non-uniformity in the actual temperature as a function of the depth from the sample surface. At the lowest temperature, the LW frequencies presented a sizable shift in time due to the thermal equilibration along the membrane thickness. The analysis of the EUV TG waveforms allowed us to determine the decay time of the thermal grating and the sound attenuation coefficient, both found in reasonable agreement with the literature. The results show how EUV TG can provide information of non-equilibrium thermoelastic dynamics in thin membranes transparent to optical radiation.

Coronal Signatures of Flare Generated Fast-Mode Wave at EUV and Radio Wavelengths

This paper presents a detailed study of the type II solar radio burst that occurred on 06 March 2014 using combined data analysis. It is a classical radio event consisting of type III radio burst and a following type II radio burst in the dynamic spectrum. The type II radio burst is observed between 235 – 130 MHz (120 – 60 MHz) in harmonic (fundamental) bands with the life time of 5 minutes between 09:26 – 09:31 UT. The estimated speed of type II burst by applying two-fold Saito model is ∼ 650 km s−1. An extreme ultraviolet (EUV) wave is observed with Atmospheric Imaging Assembly (AIA) onboard the Solar Dynamics Observatory (SDO). The very close temporal onset association of the EUV wave and flare energy release indicates that the EUV wave is likely produced by a flare pressure pulse. The eruption is also accompanied by a weak coronal mass ejection (CME) observed with the coronagraphs onboard the Solar and Heliospheric Observatory (SOHO) and the twin Solar Terrestrial Relations Observatory (STEREO). The plane of sky speed of the CME was ∼ 252 km s−1 in the SOHO/LASCO-C2 and ∼ 280 km s−1 in the STEREO-B/SECCHI-COR1 images. The EUV wave has two wave fronts, one expanding radially outward and the other one moving along the flare loop arcade. The source position of the type II burst imaged by the Nançay Radio Heliograph (NRH) shows that it was associated with the outward moving EUV wave. The CME is independent of the shock wave as confirmed by the location of NRH radio sources below the CME’s leading edge. Therefore the type II radio burst is probably ignited by the flare. This study shows the possibility of EUV wave and coronal shock triggered by flare pressure pulse, generating the observed type II radio burst.

On the role of target mass in extreme ultraviolet light generation from CO2-driven tin plasmas for nanolithography

Target conditioning is a crucial ingredient of high-power extreme ultraviolet (EUV) source operation in state-of-the-art nanolithography. It involves deforming tin microdroplets into tens of nanometer-thin sheets, sheets which are subsequently irradiated by intense CO2 laser radiation to form a hot, EUV-emitting plasma. Recent experiments have found that a substantial fraction of the initial droplet mass is lost in the deformation phase through fragmentation. The goal of the present study is to investigate, using radiation-hydrodynamic modeling, how variations in the sheet mass affect EUV source power and the laser-to-in-band conversion efficiency (CE). It is found that high-mass sheets can “feed” the plasma with sufficient mass to sustain the production of in-band-emitting charge states over the course of laser irradiation. Low-mass sheets, on the contrary, cannot supply enough mass to sustain this production over the pulse, thus leading to a reduction in in-band power and CE. The dependence of CE on laser energy and target thickness is quantified, and a rather weak reduction of CE with increasing laser energy for high-mass sheets is identified.

Emission Characteristics of a Laser-Plasma Source of Extreme Ultraviolet Radiation with Thin-Film Targets

Emission Characteristics of a Laser-Plasma Source of Extreme Ultraviolet Radiation with Thin-Film Targets

Preliminary design of an AXUV photodiode-based bolometer camera for MT-I spherical tokamak

The MT-I is a spherical tokamak at the Pakistan Tokamak Plasma Research Institute, and has a major radius of 15 cm and a minor radius of 9 cm. This paper presents the design and computational analysis of the Absolute eXtreme Ultra-Violet (AXUV) photodiode-based bolometer camera, which will be used for the first time in the MT-I tokamak. The bolometer camera contains a single array of 16 AXUV photodiodes placed behind an aperture to compute the line of sight (LOS) and field of view (FOV) of the system. This array is located at the midplane of the vessel, which provides a radial resolution of about 16 mm. The individual FOV of each photodiode and the collective FOV of the array are 4.1° and ±34.5°, respectively. The impurity densities and their cooling rates for elements like carbon, oxygen, and iron are used to compute the plasma emissivity distribution, the power incident on the photodiode array, and signal-to-noise ratio (SNR) analysis. The analysis reveals that the radiated power loss is about 10 % of the ohmic heating input power. The geometrical etendue falls within the range of 2.2 × 10−5 to 3.2 × 10−5 Sr cm2. The bolometer exhibits a frequency response bandwidth of 10 kHz, and its temporal resolution is around 0.1 milliseconds.

Statistical investigation of decayless oscillations in small-scale coronal loops observed by Solar Orbiter/EUI

Decayless kink oscillations are omnipresent in the solar atmosphere, and they are a viable candidate for coronal heating. Although there have been extensive studies of decayless oscillations in coronal loops with lengths of a few hundred megameters, the properties of these oscillations in small-scale (∼10 mm) loops are yet to be explored. In this study, we present the properties of decayless oscillations in small loops embedded in the quiet corona and coronal holes. We use high-resolution observations from the Extreme Ultraviolet Imager on board Solar Orbiter with pixel scales of 210 km and a cadence of 5 s or better. We analysed 42 oscillations in coronal loops with loop lengths varying between 3 to 23 mm. The average displacement amplitude is found to be 134 km. The oscillations period has a range of 28 to 272 s, and the velocity amplitudes range from 2.1 to 16.4 km s−1. The variation in the loop length with the period does not indicate a significant correlation. The wave mode of these waves is uncertain, and standing waves are one possibility. Our results for the coronal seismology and energy flux estimates were obtained considering standing modes. The observed kink speeds are lower than those observed in active region coronal loops. We obtain an average magnetic field value of 2.1 G. We estimated the energy flux with a broad range of 0.6–313 W m−2. Moreover, we note that short-period decayless oscillations are not prevalent in the quiet Sun and coronal holes. Our study suggests that decayless oscillations in small-scale coronal loops are unlikely to provide enough energy to heat the quiet Sun and accelerate solar wind in coronal holes.