Diamond films were synthesized by a chemical vapor deposition (CVD). Raman spectrum showed the diamond line at 1332 cm−1 and X-ray diffraction pattern exhibited a strong (111) peak of diamond. The scanning electron microscopy analysis showed that the CVD diamond film was grown to be unepitaxial crystallites with pyramidal hillocks. Three-dimensional thermoluminescence spectrum of CVD diamond film irradiated with X-ray produced one peak at 560 K and 430 nm. The main 560 K glow curve was caused by first order kinetics. Activation energy and escape frequency of the main peak were calculated to be 0.92∼1.05 eV and 3.4 × 107 s−1, respectively. The emission spectrum at 560 K was split into 1.63 eV, 2.60 eV, and 3.07 eV emission bands that were found to be associated with silicon-vacancy center, H3, and A center, respectively.
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