The fundamental and technological importance of metal clusters and particles on oxide surfaces is growing. Here, room temperature deposited Ni clusters and particles on clean SrTiO3 (001) surfaces were analyzed with a UHV-TEM/STM combined system to investigate reaction, growth, morphology, and crystal structure consistently. STM observation revealed their growth process from isolated clusters almost of the size of the nuclei to bigger particles. From TEM observation, it was found that small clusters have a semi-commensurate epitaxial orientation relationship, but that bigger ones grow into an incommensurate cube-on-cube epitaxial orientation relationship. STS measurement on Ni particles caused field-induced diffusion of Ni atoms, in which piling up of Ni was recognized at the positions of the STM tips. This is assumed to be related with interfacial reaction.