Ba-, La-, and Zr-doped CeO2−δ films and undoped CeO2−δ film with (00 l) preferred orientation have been prepared on biaxially textured Ni–W substrates by metal organic decomposition (MOD) method. The influences of valences and ionic radii of dopants on the epitaxial growth of CeO2−δ films and oxygen diffusion in the buffer layer were explored by X-ray diffraction (XRD) and atomic force microscopy (AFM). The doping cations with different radii cause the change of the lattice parameter of CeO2−δ film and the mismatch between Ni–W substrate and epitaxial film, which modifies the compressive strain resulted from the elastically lattice deformation in the films. Our results show that the compressive strain is beneficial to the c-axial texture formation of CeO2−δ film. In addition, ionic radius has influence on the surface roughness and the out-of-plane texture of the film. Moreover, the oxygen diffusion results from the inherent variation of the thermodynamic factors, in particular the migration energy of oxygen ions. Meanwhile, larger radius of doping cation would lead to the decrease of the migration energies of oxygen ion due to the steric effect. So compared with the Ba- and La-doped CeO2−δ films, the Zr-doped CeO2−δ film shows slight oxygen diffusion. These results are significant to improving the properties of buffer layer for coated conductors.
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