The retardation change versus temperature was measured for deep UV multiorder crystal quartz wave plates. The influence of temperature on the wave-plate performance is even more significant for the deep UV region due to the shorter wavelength and increased number of wave periods in the retarder for the given thickness and sharp changes of refractive indices versus temperature and wavelength? Precise control of temperature is needed for accurate analysis of the wave-plate optical parameters. The wave plate should be designed for a certain temperature and used within a tightly controlled temperature range; otherwise its performance will be degraded, affecting the entire optical system. A simple laser-based method was exploited and developed for wave-plate performance evaluation versus temperature for the half and quarter wave retardation. All this information needs to be taken into account for deep UV wave-plate design to ensure the best possible performance of the retarder.