Anisotropic thermal properties are of both fundamental and practical interests, but remain challenging to characterize using conventional methods. In this work, a new metrology based on asymmetric beam time-domain thermoreflectance (AB-TDTR) is developed to measure three-dimensional anisotropic thermal transport by extending the conventional TDTR technique. Using an elliptical laser beam with controlled elliptical ratio and spot size, the experimental signals can be exploited to be dominantly sensitive to measure thermal conductivity along the cross-plane or any specific in-plane directions. An analytic solution for a multi-layer system is derived for the AB-TDTR signal in response to the periodical pulse, elliptical laser beam, and heating geometry to extract the anisotropic thermal conductivity from experimental measurement. Examples with experimental data are given for various materials with in-plane thermal conductivity from 5 W/m K to 2000 W/m K, including isotropic materials (silicon, boron phosphide, and boron nitride), transversely isotropic materials (graphite, quartz, and sapphire), and transversely anisotropic materials (black phosphorus). Furthermore, a detailed sensitivity analysis is conducted to guide the optimal setting of experimental configurations for different materials. The developed AB-TDTR metrology provides a new approach to accurately measure anisotropic thermal phenomena for rational materials design and thermal applications.
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